Abstract: The present discloses a pump apparatus having a first pump and at least one controller. The at least one controller is suitable for generating a first control signal for controlling the first pump. The at least one controller is suitable for generating a second control signal for controlling operation of a second pump. The second pump is external to the pump apparatus. One or more pump connection port is provided in the pump apparatus for outputting the second control signal to the second pump. The present disclosure also relates to a vacuum system comprising a pump apparatus of the type described herein.

Abstract: A method of assigning an identifier to a controller of a modular vacuum pumping and/or abatement system, the method including: determining, by a first controller of the modular vacuum pumping and/or abatement system, that a first identifier is to be assigned to a second controller of the modular vacuum pumping and/or abatement system, wherein the second controller is located at a module of the modular vacuum pumping and/or abatement system; transmitting, by the first controller, a first signal indicative of the first identifier to the second controller; receiving, by a user input device coupled to the module, a user input; and adopting, by the second controller, the first identifier as its identifier in response to the user input.

Abstract: According to an aspect of the present disclosure there is provided a modular heater control unit. The modular heater control unit is configured to control a heating element for heating a component. The modular heater control unit includes complementary first and second ports to enable the modular heater control unit to be connected to one or more like modular heater control unit in a serial configuration. The modular heater control unit has a controller including at least one processor and at least one memory. The controller is configured to communicate with a supervisory control unit. The present disclosure also relates to a heating system; and a supervisory control unit.

Abstract: A method of assigning an identifier to a controller of a modular vacuum pumping and/or abatement system, the method including: determining, by a first controller of the modular vacuum pumping and/or abatement system, that a first identifier is to be assigned to a second controller of the modular vacuum pumping and/or abatement system, wherein the second controller is located at a module of the modular vacuum pumping and/or abatement system; transmitting, by the first controller, a first signal indicative of the first identifier to the second controller; receiving, by a user input device coupled to the module, a user input; and adopting, by the second controller, the first identifier as its identifier in response to the user input.

Abstract: Infra-red sensors are often used in turbo molecular pumps to detect the temperature of the rotor or other mechanical parts and therefore indicate imminent, or potential, running failures. As deposits build up on either the infra-red sensor, or on the surface being monitored, the reading given by the sensor may not be a true representation of the actual surface temperature which can cause the pump controller to fail to stop the pump in time. The present invention provides a method and device for calibrating the sensor by creating a determined temperature rise in the sensor whilst keeping the rotor at ambient temperature. In particular the present invention uses the motor stator as the heater for causing the temperature increase.

Abstract: Infra-red sensors are often used in turbo molecular pumps to detect the temperature of the rotor or other mechanical parts and therefore indicate imminent, or potential, running failures. As deposits build up on either the infra-red sensor, or on the surface being monitored, the reading given by the sensor may not be a true representation of the actual surface temperature which can cause the pump controller to fail to stop the pump in time. The present invention provides a method and device for calibrating the sensor by creating a determined temperature rise in the sensor whilst keeping the rotor at ambient temperature. In particular the present invention uses the motor stator as the heater for causing the temperature increase.

Abstract: A process equipment heating system has a group of electric heaters and a heater checking system. The heater checking system is configured to determine a resistance value R1 for the group of electric heaters, compare the resistance value R1 with a reference resistance value RR and judge a fault condition if the resistance value R1 differs from the reference resistance value RR by more than a predetermined amount.

Abstract: A process equipment heating system has a group of electric heaters and a heater checking system. The heater checking system is configured to determine a resistance value R1 for the group of electric heaters, compare the resistance value R1 with a reference resistance value RR and judge a fault condition if the resistance value R1 differs from the reference resistance value RR by more than a predetermined amount.