Patents by Inventor Brent M. Colvin

Brent M. Colvin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for mechanically cleaning the edges of wafers
    Patent number: 5976267
    Abstract: A method and apparatus for cleaning the edges of substrates. The present invention provides a cleaning mechanism that cleans particles off the edge of the wafer based on friction at a point of contact between the wafer and a wafer edge brush. In one embodiment, the cleaning mechanism includes a side brush that cleans the top-side or bottom-side of a wafer. The side brush is rotated by a motor that is attached to a first end of the side brush. An edge brush is attached to a second end of the side brush and is rotated along with the side brush to clean the edge of the wafer.
    Type: Grant
    Filed: May 4, 1998
    Date of Patent: November 2, 1999
    Assignee: Intel Corporation
    Inventors: Timothy S. Culkins, Brent M. Colvin, Michael R. Carter
  • Apparatus for mechanically cleaning the edges of wafers
    Patent number: 5937469
    Abstract: A method and apparatus for cleaning the edges of substrates. The present invention provides a cleaning mechanism that cleans particles off the edge of the wafer based on friction at a point of contact between the wafer and a wafer edge brush. In one embodiment, the cleaning mechanism includes a side brush that cleans the top-side or bottom-side of a wafer. The side brush is rotated by a motor that is attached to a first end of the side brush. An edge brush is attached to a second end of the side brush and is rotated along with the side brush to clean the edge of the wafer.
    Type: Grant
    Filed: December 3, 1996
    Date of Patent: August 17, 1999
    Assignee: Intel Corporation
    Inventors: Timothy S. Culkins, Brent M. Colvin, Michael R. Carter