Patents by Inventor Brett Busch
Brett Busch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20230234943Abstract: Described herein are compounds, methods of making such compounds, pharmaceutical compositions and medicaments comprising such compounds, and methods of using such compounds for inhibiting three prime repair exonuclease 1 (“TREX1”).Type: ApplicationFiled: June 25, 2021Publication date: July 27, 2023Inventors: Thomas Walter DUBENSKY, JR., Ryan C. CLARK, Justin ERNST, Garrick K. PACKARD, Brett BUSCH, Joe Fred NAGAMIZO, Biswajit KALITA, Athisayamani Jeyaraj DURAISWAMY
-
Publication number: 20160043089Abstract: Memory cell support lattices and methods of forming the same are described herein. As an example, a method of forming a memory cell support lattice includes forming a mask on a number of capacitor elements in an array, such that a space between vertically and horizontally adjacent capacitor elements is fully covered and a space between diagonally adjacent capacitor elements is partially covered and forming a support lattice in a support material by etching the support material to remove portions of the support material below the openings in the mask.Type: ApplicationFiled: October 7, 2015Publication date: February 11, 2016Inventors: Zhimin Song, Che-Chi Lee, Brett Busch
-
Patent number: 9184167Abstract: Memory cell support lattices and methods of forming the same are described herein. As an example, a method of forming a memory cell support lattice includes forming a mask on a number of capacitor elements in an array, such that a space between vertically and horizontally adjacent capacitor elements is fully covered and a space between diagonally adjacent capacitor elements is partially covered and forming a support lattice in a support material by etching the support material to remove portions of the support material below the openings in the mask.Type: GrantFiled: August 21, 2012Date of Patent: November 10, 2015Assignee: Micron Technology, Inc.Inventors: Zhimin Song, Che-Chi Lee, Brett Busch
-
Patent number: 8871103Abstract: A blanket stop layer is conformally formed on a layer with a large step height. A first chemical mechanical polishing process is performed to remove the blanket stop layer atop the layer in the raised region. A second chemical mechanical polishing process is performed to planarize the wafer using the blanket stop layer as a stop layer when the layer is lower than or at a same level as the blanket stop layer or using the layer as a stop layer when the blanket stop layer is lower than or at a same level as the layer, or a selective dry etch is performed to remove the layer in the raised region. Thus, the layer in the raised region can be easily removed without occurrence of dishing in the non-raised region which is protected by the blanket stop layer.Type: GrantFiled: October 9, 2013Date of Patent: October 28, 2014Assignee: Nanya Technology Corp.Inventors: Brett Busch, Gowri Damarla, Anurag Jindal, Chia-Yen Ho, Thy Tran
-
Patent number: 8692305Abstract: Semiconductor device structures include an at least partially formed container capacitor having a generally cylindrical first conductive member with at least one inner sidewall surface, a lattice material at least partially laterally surrounding an upper end portion of the first conductive member, an anchor material, and at least one aperture extending through the lattice material between the at least partially formed container capacitor and an adjacent at least partially formed container capacitor. Other structures include an at least partially formed container capacitor, a lattice material, and an anchor material disposed over a surface of the lattice material and at least a portion of an end surface of the first conductive member and forming a chemical barrier over at least a portion of an interface between the lattice material and the upper end portion of the first conductive member.Type: GrantFiled: November 1, 2011Date of Patent: April 8, 2014Assignee: Micron Technology, Inc.Inventors: Brett Busch, Kevin R. Shea, Thomas A. Figura
-
Publication number: 20140054745Abstract: Memory cell support lattices and methods of forming the same are described herein. As an example, a method of forming a memory cell support lattice includes forming a mask on a number of capacitor elements in an array, such that a space between vertically and horizontally adjacent capacitor elements is fully covered and a space between diagonally adjacent capacitor elements is partially covered and forming a support lattice in a support material by etching the support material to remove portions of the support material below the openings in the mask.Type: ApplicationFiled: August 21, 2012Publication date: February 27, 2014Applicant: MICRON TECHNOLOGY, INC.Inventors: Zhimin Song, Che-Chi Lee, Brett Busch
-
Publication number: 20140038414Abstract: A blanket stop layer is conformally formed on a layer with a large step height. A first chemical mechanical polishing process is performed to remove the blanket stop layer atop the layer in the raised region. A second chemical mechanical polishing process is performed to planarize the wafer using the blanket stop layer as a stop layer when the layer is lower than or at a same level as the blanket stop layer or using the layer as a stop layer when the blanket stop layer is lower than or at a same level as the layer, or a selective dry etch is performed to remove the layer in the raised region. Thus, the layer in the raised region can be easily removed without occurrence of dishing in the non-raised region which is protected by the blanket stop layer.Type: ApplicationFiled: October 9, 2013Publication date: February 6, 2014Applicant: NANYA TECHNOLOGY CORP.Inventors: BRETT BUSCH, GOWRI DAMARLA, ANURAG JINDAL, Chia-Yen Ho, THY TRAN
-
Patent number: 8580690Abstract: A blanket stop layer is conformally formed on a layer with a large step height. A first chemical mechanical polishing process is performed to remove the blanket stop layer atop the layer in the raised region. A second chemical mechanical polishing process is performed to planarize the wafer using the blanket stop layer as a stop layer when the layer is lower than or at a same level as the blanket stop layer or using the layer as a stop layer when the blanket stop layer is lower than or at a same level as the layer, or a selective dry etch is performed to remove the layer in the raised region. Thus, the layer in the raised region can be easily removed without occurrence of dishing in the non-raised region which is protected by the blanket stop layer.Type: GrantFiled: April 6, 2011Date of Patent: November 12, 2013Assignee: Nanya Technology Corp.Inventors: Brett Busch, Gowri Damarla, Anurag Jindal, Chia-Yen Ho, Thy Tran
-
Patent number: 8524704Abstract: Compounds, compositions and methods for modulating the activity of receptors are provided. In particular, compounds and compositions are provided for modulating the activity of receptors and for the treatment, prevention, or amelioration of one or more symptoms of disease or disorder directly or indirectly related to the activity of the receptors.Type: GrantFiled: August 4, 2009Date of Patent: September 3, 2013Assignee: Exelixis, Inc.Inventors: Brett Busch, Brenton T. Flatt, Xiao-Hui Gu, Richard Martin, Raju Mohan, Tie-Lin Wang, Jason H. Wu
-
Patent number: 8318578Abstract: A method of forming a capacitor includes providing material having an opening therein over a node location on a substrate. A shield is provided within and across the opening, with a void being received within the opening above the shield and a void being received within the opening below the shield. The shield comprises a nitride. Etching is conducted within the opening through the nitride-comprising shield. After the etching, a first capacitor electrode is formed within the opening in electrical connection with the node location. A capacitor dielectric and a second capacitor electrode are formed operatively adjacent the first capacitor electrode. Other aspects and implementations are contemplated.Type: GrantFiled: October 7, 2009Date of Patent: November 27, 2012Assignee: Micron Technology, Inc.Inventors: Kevin Shea, Brett Busch, Farrell Good, Irina Vasilyeva, Vishwanath Bhat
-
Publication number: 20120258596Abstract: A blanket stop layer is conformally formed on a layer with a large step height. A first chemical mechanical polishing process is performed to remove the blanket stop layer atop the layer in the raised region. A second chemical mechanical polishing process is performed to planarize the wafer using the blanket stop layer as a stop layer when the layer is lower than or at a same level as the blanket stop layer or using the layer as a stop layer when the blanket stop layer is lower than or at a same level as the layer, or a selective dry etch is performed to remove the layer in the raised region. Thus, the layer in the raised region can be easily removed without occurrence of dishing in the non-raised region which is protected by the blanket stop layer.Type: ApplicationFiled: April 6, 2011Publication date: October 11, 2012Inventors: BRETT BUSCH, GOWRI DAMARLA, ANURAG JINDAL, CHIA-YEN HO, THY TRAN
-
Publication number: 20120043596Abstract: Semiconductor device structures include an at least partially formed container capacitor having a generally cylindrical first conductive member with at least one inner sidewall surface, a lattice material at least partially laterally surrounding an upper end portion of the first conductive member, an anchor material, and at least one aperture extending through the lattice material between the at least partially formed container capacitor and an adjacent at least partially formed container capacitor. Other structures include an at least partially formed container capacitor, a lattice material, and an anchor material disposed over a surface of the lattice material and at least a portion of an end surface of the first conductive member and forming a chemical barrier over at least a portion of an interface between the lattice material and the upper end portion of the first conductive member.Type: ApplicationFiled: November 1, 2011Publication date: February 23, 2012Applicant: MICRON TECHNOLOGY, INC.Inventors: Brett Busch, Kevin R. Shea, Thomas A. Figura
-
Patent number: 8058126Abstract: Methods of forming semiconductor devices that include one or more container capacitors include anchoring an end of a conductive member to a surrounding lattice material using an anchor material, which may be a dielectric. The anchor material may extend over at least a portion of an end surface of the conductive member, at least a portion of the lattice material, and an interface between the conductive member and the lattice material. In some embodiments, the anchor material may be formed without significantly covering an inner sidewall surface of the conductive member. Furthermore, in some embodiments, a barrier material may be provided over at least a portion of the anchor material and over at least a portion of an inner sidewall surface of the conductive member. Novel semiconductor devices and structures are fabricated using such methods.Type: GrantFiled: February 4, 2009Date of Patent: November 15, 2011Assignee: Micron Technology, Inc.Inventors: Brett Busch, Kevin R. Shea, Thomas A. Figura
-
Publication number: 20100193853Abstract: Methods of forming semiconductor devices that include one or more container capacitors include anchoring an end of a conductive member to a surrounding lattice material using an anchor material, which may be a dielectric. The anchor material may extend over at least a portion of an end surface of the conductive member, at least a portion of the lattice material, and an interface between the conductive member and the lattice material. In some embodiments, the anchor material may be formed without significantly covering an inner sidewall surface of the conductive member. Furthermore, in some embodiments, a barrier material may be provided over at least a portion of the anchor material and over at least a portion of an inner sidewall surface of the conductive member. Novel semiconductor devices and structures are fabricated using such methods.Type: ApplicationFiled: February 4, 2009Publication date: August 5, 2010Applicant: MICRON TECHNOLOGY, INC.Inventors: Brett Busch, Kevin R. Shea, Thomas A. Figura
-
Publication number: 20100173824Abstract: Compounds, compositions and methods for modulating the activity of receptors are provided. In particular, compounds and compositions are provided for modulating the activity of receptors and for the treatment, prevention, or amelioration of one or more symptoms of disease or disorder directly or indirectly related to the activity of the receptors.Type: ApplicationFiled: August 4, 2009Publication date: July 8, 2010Applicant: EXELIXIS, INC.Inventors: Brett Busch, Brenton T. Flatt, Xiao-Hui Gu, Richard Martin, Raju Mohan, Tie-Lin Wang, Jason H. Wu
-
Publication number: 20100025362Abstract: A method of forming a capacitor includes providing material having an opening therein over a node location on a substrate. A shield is provided within and across the opening, with a void being received within the opening above the shield and a void being received within the opening below the shield. The shield comprises a nitride. Etching is conducted within the opening through the nitride-comprising shield. After the etching, a first capacitor electrode is formed within the opening in electrical connection with the node location. A capacitor dielectric and a second capacitor electrode are formed operatively adjacent the first capacitor electrode. Other aspects and implementations are contemplated.Type: ApplicationFiled: October 7, 2009Publication date: February 4, 2010Applicant: Micron Technology, Inc.Inventors: Kevin Shea, Brett Busch, Farrell Good, Irina Vasilyeva, Vishwanath Bhat
-
Patent number: 7618874Abstract: A method of forming a capacitor includes providing material having an opening therein over a node location on a substrate. A shield is provided within and across the opening, with a void being received within the opening above the shield and a void being received within the opening below the shield. The shield comprises a nitride. Etching is conducted within the opening through the nitride-comprising shield. After the etching, a first capacitor electrode is formed within the opening in electrical connection with the node location. A capacitor dielectric and a second capacitor electrode are formed operatively adjacent the first capacitor electrode. Other aspects and implementations are contemplated.Type: GrantFiled: May 2, 2008Date of Patent: November 17, 2009Assignee: Micron Technology, Inc.Inventors: Kevin Shea, Brett Busch, Farrell Good, Irina Vasilyeva, Vishwanath Bhat
-
Publication number: 20090275185Abstract: A method of forming a capacitor includes providing material having an opening therein over a node location on a substrate. A shield is provided within and across the opening, with a void being received within the opening above the shield and a void being received within the opening below the shield. The shield comprises a nitride. Etching is conducted within the opening through the nitride-comprising shield. After the etching, a first capacitor electrode is formed within the opening in electrical connection with the node location. A capacitor dielectric and a second capacitor electrode are formed operatively adjacent the first capacitor electrode. Other aspects and implementations are contemplated.Type: ApplicationFiled: May 2, 2008Publication date: November 5, 2009Inventors: Kevin Shea, Brett Busch, Farrell Good, Irina Vasilyeva, Vishwanath Bhat
-
Patent number: 7595311Abstract: Compounds, compositions and methods for modulating the activity of receptors are provided. In particular, compounds and compositions are provided for modulating the activity of receptors and for the treatment, prevention, or amelioration of one or more symptoms of disease or disorder directly or indirectly related to the activity of the receptors.Type: GrantFiled: December 2, 2003Date of Patent: September 29, 2009Assignee: Exelixis, Inc.Inventors: Brett Busch, Brenton T Flatt, Xiao-Hui Gu, Richard Martin, Raju Mohan, Tie-Lin Wang, Jason H Wu
-
Publication number: 20070105303Abstract: A plurality of capacitor electrode openings is formed within capacitor electrode-forming material. A first set of the openings is formed to a depth which is greater within the capacitor electrode-forming material than is a second set of the openings. Conductive first capacitor electrode material is formed therein. A sacrificial retaining structure is formed elevationally over both the first capacitor electrode material and the capacitor electrode-forming material, leaving some of the capacitor electrode-forming material exposed. With the retaining structure in place, at least some of the capacitor electrode-forming material is etched from the substrate effective to expose outer sidewall surfaces of the first capacitor electrode material.Type: ApplicationFiled: December 26, 2006Publication date: May 10, 2007Inventors: Brett Busch, Fred Fishburn, James Rominger