Patents by Inventor Brett Jacobs

Brett Jacobs has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Impedance matching circuit for operation with a kilohertz RF generator and a megahertz RF generator to control plasma processes
    Patent number: 9984859
    Abstract: An impedance matching circuit (IMC) is described. The impedance matching circuit includes a first circuit. The first circuit has an input coupled to a kilohertz (kHz) radio frequency (RF) generator. The IMC includes a second circuit. The second circuit has an input coupled to a low frequency megahertz (MHz) RF generator. The IMC includes a third circuit. The third circuit has an input coupled to a high frequency MHz RF generator. The IMC includes an output of the first, second, and third circuits coupled to an input of an RF transmission line. The first circuit and the second circuit provide isolation between a kHz RF signal sent through the first circuit and a low frequency MHz RF signal sent through the second circuit.
    Type: Grant
    Filed: February 22, 2017
    Date of Patent: May 29, 2018
    Assignee: Lam Research Corporation
    Inventors: Alexei Marakhtanov, Felix Kozakevich, John Patrick Holland, Brett Jacobs
  • IMPEDANCE MATCHING CIRCUIT FOR OPERATION WITH A KILOHERTZ RF GENERATOR AND A MEGAHERTZ RF GENERATOR TO CONTROL PLASMA PROCESSES
    Publication number: 20170162368
    Abstract: An impedance matching circuit (IMC) is described. The impedance matching circuit includes a first circuit. The first circuit has an input coupled to a kilohertz (kHz) radio frequency (RF) generator. The IMC includes a second circuit. The second circuit has an input coupled to a low frequency megahertz (MHz) RF generator. The IMC includes a third circuit. The third circuit has an input coupled to a high frequency MHz RF generator. The IMC includes an output of the first, second, and third circuits coupled to an input of an RF transmission line. The first circuit and the second circuit provide isolation between a kHz RF signal sent through the first circuit and a low frequency MHz RF signal sent through the second circuit.
    Type: Application
    Filed: February 22, 2017
    Publication date: June 8, 2017
    Inventors: Alexei Marakhtanov, Felix Kozakevich, John Patrick Holland, Brett Jacobs
  • Impedance matching circuit for operation with a kilohertz RF generator and a megahertz RF generator to control plasma processes
    Patent number: 9595424
    Abstract: An impedance matching circuit (IMC) is described. The impedance matching circuit includes a first circuit. The first circuit has an input coupled to a kilohertz (kHz) radio frequency (RF) generator. The IMC includes a second circuit. The second circuit has an input coupled to a low frequency megahertz (MHz) RF generator. The IMC includes a third circuit. The third circuit has an input coupled to a high frequency MHz RF generator. The IMC includes an output of the first, second, and third circuits coupled to an input of an RF transmission line. The first circuit and the second circuit provide isolation between a kHz RF signal sent through the first circuit and a low frequency MHz RF signal sent through the second circuit.
    Type: Grant
    Filed: March 2, 2015
    Date of Patent: March 14, 2017
    Assignee: Lam Research Corporation
    Inventors: Alexei Marakhtanov, Felix Kozakevich, John Patrick Holland, Brett Jacobs
  • IMPEDANCE MATCHING CIRCUIT FOR OPERATION WITH A KILOHERTZ RF GENERATOR AND A MEGAHERTZ RF GENERATOR TO CONTROL PLASMA PROCESSES
    Publication number: 20160260584
    Abstract: An impedance matching circuit (IMC) is described. The impedance matching circuit includes a first circuit. The first circuit has an input coupled to a kilohertz (kHz) radio frequency (RF) generator. The IMC includes a second circuit. The second circuit has an input coupled to a low frequency megahertz (MHz) RF generator. The IMC includes a third circuit. The third circuit has an input coupled to a high frequency MHz RF generator. The IMC includes an output of the first, second, and third circuits coupled to an input of an RF transmission line. The first circuit and the second circuit provide isolation between a kHz RF signal sent through the first circuit and a low frequency MHz RF signal sent through the second circuit.
    Type: Application
    Filed: March 2, 2015
    Publication date: September 8, 2016
    Inventors: Alexei Marakhtanov, Felix Kozakevich, John Patrick Holland, Brett Jacobs