Patents by Inventor Brian B. Jeffreys

Brian B. Jeffreys has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and systems for shielding in sputtering chambers
    Patent number: 5482612
    Abstract: An improved metal film deposition system is disclosed which comprises an improved shield (80) to prevent particulate contamination of processed wafers. The shield (80) includes an interstitial layer of flame-sprayed metal which adheres well to both the material comprising the metal film and the metal comprising the shield (80). Further, the shield utilizes radiused deflections (84) and (86) to disperse the forces created by the crystalline growth of the metal film.
    Type: Grant
    Filed: August 5, 1994
    Date of Patent: January 9, 1996
    Assignee: Texas Instruments Incorporated
    Inventors: Frank O. Armstrong, Brian B. Jeffreys