Patents by Inventor Brian Benard

Brian Benard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Low temperature sub-atmospheric ozone oxidation process for making thin gate oxides
    Patent number: 5946588
    Abstract: A process for making thin gate oxides comprising the layering of a semiconductor substrate with at least an oxide layer and a nitride layer. The layers are then patterned and etched, thereby exposing portions of the substrate. The substrate is then doped, thereby creating a channel stop region. The exposed portions of the substrate are oxidized, thereby creating a field oxide region. The oxide and nitride layers are removed, thereby exposing sites of active areas, and a gate oxide layer grown in an ozone-containing atmosphere.
    Type: Grant
    Filed: January 7, 1997
    Date of Patent: August 31, 1999
    Assignee: Micron Technology, Inc.
    Inventors: Aftab Ahmad, Randhir P. S. Thakur, J. Brett Rolfson, Brian Benard