Patents by Inventor Brian C. Leslie
Brian C. Leslie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7656170Abstract: Disclosed is a method of inspecting a sample. The sample is scanned in a first direction with at least one particle beam. The sample is scanned in a second direction with at least one particle beam. The second direction is at an angle to the first direction. The number of defects per an area of the sample are found as a result of the first scan, and the position of one or more of the found defects is determined from the second scan. In a specific embodiment, the sample includes a test structure having a plurality of test elements thereon. A first portion of the test elements is exposed to the beam during the first scan to identify test elements having defects, and a second portion of the test elements is exposed during the second scan to isolate and characterize the defect.Type: GrantFiled: February 14, 2007Date of Patent: February 2, 2010Assignee: KLA-Tencor Technologies CorporationInventors: Gustavo A. Pinto, Brian C. Leslie, David L. Adler, Akella V. S. Satya, Padma A. Satya, legal representative, Robert Thomas Long, David J. Walker
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Patent number: 7477372Abstract: In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface.Type: GrantFiled: April 23, 2007Date of Patent: January 13, 2009Assignee: KLA-Tencor Technologies CorporationInventors: Brian C. Leslie, Mehrdad Nikoonahad, Keith B. Wells
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Publication number: 20080237487Abstract: Disclosed is a method of inspecting a sample. The sample is scanned in a first direction with at least one particle beam. The sample is scanned in a second direction with at least one particle beam. The second direction is at an angle to the first direction. The number of defects per an area of the sample are found as a result of the first scan, and the position of one or more of the found defects is determined from the second scan. In a specific embodiment, the sample includes a test structure having a plurality of test elements thereon. A first portion of the test elements is exposed to the beam during the first scan to identify test elements having defects, and a second portion of the test elements is exposed during the second scan to isolate and characterize the defect.Type: ApplicationFiled: February 14, 2007Publication date: October 2, 2008Inventors: Gustavo A. Pinto, Brian C. Leslie, David L. Adler, Akella V.S. Satya, Robert Thomas Long, David J. Walker, Padma A. Satya
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Patent number: 7075637Abstract: In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface.Type: GrantFiled: April 10, 2003Date of Patent: July 11, 2006Assignee: KLA-Tencor CorporationInventors: Brian C. Leslie, Mehrdad Nikoonahad, Keith B. Wells
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Patent number: 7012439Abstract: Disclosed is a method of inspecting a sample. The sample is scanned in a first direction with at least one particle beam. The sample is scanned in a second direction with at least one particle beam. The second direction is at an angle to the first direction. The number of defects per an area of the sample are found as a result of the first scan, and the position of one or more of the found defects is determined from the second scan. In a specific embodiment, the sample includes a test structure having a plurality of test elements thereon. A first portion of the test elements is exposed to the beam during the first scan to identify test elements having defects, and a second portion of the test elements is exposed during the second scan to isolate and characterize the defect.Type: GrantFiled: February 15, 2005Date of Patent: March 14, 2006Assignee: KLA-Tencor Technologies CorporationInventors: Gustavo A. Pinto, Brian C. Leslie, David L. Adler, Akella V. S. Satya, Robert Thomas Long, David J. Walker
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Patent number: 6888627Abstract: In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface.Type: GrantFiled: April 10, 2003Date of Patent: May 3, 2005Assignee: KLA-Tencor CorporationInventors: Brian C. Leslie, Mehrdad Nikoonahad, Keith B. Wells
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Patent number: 6867606Abstract: Disclosed is a method of inspecting a sample. The sample is scanned in a first direction with at least one particle beam. The sample is scanned in a second direction with at least one particle beam. The second direction is at an angle to the first direction. The number of defects per an area of the sample are found as a result of the first scan, and the position of one or more of the found defects is determined from the second scan. In a specific embodiment, the sample includes a test structure having a plurality of test elements thereon. A first portion of the test elements is exposed to the beam during the first scan to identify test elements having defects, and a second portion of the test elements is exposed during the second scan to isolate and characterize the defect.Type: GrantFiled: March 13, 2003Date of Patent: March 15, 2005Assignee: KLA-Tencor Technologies, Inc.Inventors: Gustavo A. Pinto, Brian C. Leslie, David L. Adler, Akella V. S. Satya, Robert Thomas Long, David J. Walker
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Publication number: 20030227619Abstract: In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface.Type: ApplicationFiled: April 10, 2003Publication date: December 11, 2003Inventors: Brian C. Leslie, Mehrdad Nikoonahad, Keith B. Wells
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Publication number: 20030206294Abstract: In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface.Type: ApplicationFiled: April 10, 2003Publication date: November 6, 2003Inventors: Brian C. Leslie, Mehrdad Nikoonahad, Keith B. Wells
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Publication number: 20030155927Abstract: Disclosed is a method of inspecting a sample. The sample is scanned in a first direction with at least one particle beam. The sample is scanned in a second direction with at least one particle beam. The second direction is at an angle to the first direction. The number of defects per an area of the sample are found as a result of the first scan, and the position of one or more of the found defects is determined from the second scan. In a specific embodiment, the sample includes a test structure having a plurality of test elements thereon. A first portion of the test elements is exposed to the beam during the first scan to identify test elements having defects, and a second portion of the test elements is exposed during the second scan to isolate and characterize the defect.Type: ApplicationFiled: March 13, 2003Publication date: August 21, 2003Applicant: KLA Tencor Technologies CorporationInventors: Gustavo A. Pinto, Brian C. Leslie, David L. Adler, Akella V.S. Satya, Robert Thomas Long, David J. Walker
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Patent number: 6566885Abstract: A sample is inspected. The sample is scanned in a first direction with at least one particle beam. The sample is scanned in a second direction with at least one particle beam. The second direction is at an angle to the first direction. The number of defects per an area of the sample are found as a result of the first scan, and the position of one or more of the found defects is determined from the second scan. In a specific embodiment, the sample includes a test structure having a plurality of test elements thereon. A first portion of the test elements is exposed to the beam during the first scan to identify test elements having defects, and a second portion of the test elements is exposed during the second scan to isolate and characterize the defect.Type: GrantFiled: August 25, 2000Date of Patent: May 20, 2003Assignee: KLA-TencorInventors: Gustavo A. Pinto, Brian C. Leslie, David L. Adler, Akella V. S. Satya, Robert Thomas Long, David J. Walker
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Patent number: 6445199Abstract: Disclosed is a method of inspecting a sample. The sample is illuminated with an incident beam, thereby causing voltage contrast within structures present on the sample. Voltage contrast is detected within the structures. Information from the detected voltage contrast is stored, and position data concerning the location of features corresponding to at least a portion of the stored voltage contrast information is also stored. In a specific embodiment, the features represent electrical defects present on the sample. In another embodiment, the stored position data is in the form of a two dimensional map. In another aspect, the sample is re-inspected and the stored position data is used in analyzing data resulting from the re-inspection.Type: GrantFiled: August 25, 2000Date of Patent: September 3, 2002Assignee: KLA-Tencor CorporationInventors: Akella V. S. Satya, Brian C. Leslie, Gustavo A. Pinto, Robert Thomas Long, Neil Richardson, Bin-Ming Benjamin Tsai
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Patent number: 6433561Abstract: Disclosed is a method of inspecting a sample. At least a portion of the sample is illuminated. Signals received from the illuminated portion are detected, and the detected signals are processed to find defects present on the sample. The processing of the detected signals is optimized, at least in part, based upon results obtained from voltage contrast testing. In one implementation, the illumination is an optical illumination. In another embodiment, the processing comprises automated defect classification, and setup of the automated classification is optimized using the results obtained from voltage contrast testing. In another implementation, the results relate to a probability that a feature present on the sample represents an electrical defect.Type: GrantFiled: August 25, 2000Date of Patent: August 13, 2002Assignee: KLA-Tencor CorporationInventors: Akella V. S. Satya, Gustavo A. Pinto, Robert Thomas Long, Bin-Ming Benjamin Tsai, Brian C. Leslie
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Publication number: 20020097393Abstract: A high sensitivity and high throughput surface inspection system directs a focused beam of light at a grazing angle towards the surface to be inspected. Relative motion is caused between the beam and the surface so that the beam scans a scan path covering substantially the entire surface and light scattered along the path is collected for detecting anamolies. The scan path comprises a plurality of arrays of straight scan path segments. The focused beam of light illuminates an area of the surface between 5-15 microns in width and this system is capable of inspecting in excess of about 40 wafers per hour for 150 millimeter diameter wafers (6-inch wafers), in excess of about 20 wafers per hour for 200 millimeter diameter wafers (8-inch wafers) and in excess of about 10 wafers per hour for 300 millimeter diameter wafers (12-inch wafers).Type: ApplicationFiled: September 11, 2001Publication date: July 25, 2002Inventors: Mehrdad Nikoonahad, Stanley E. Stokowski, Keith B. Wells, Brian C. Leslie
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Patent number: 6081325Abstract: In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface.Type: GrantFiled: June 3, 1997Date of Patent: June 27, 2000Assignee: Kla-Tencor CorporationInventors: Brian C. Leslie, Mehrdad Nikoonahad, Keith B. Wells
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Patent number: 5355212Abstract: A method of locating particle and defect features on a periodically patterned surface uses multiple threshold intensity levels to identify features in the data stream produced by scanning the surface with a light beam and detecting the light scattered from the surface. High thresholds are assigned to regions of the surface with high background scatter, while low thresholds are assigned to regions of the surface with low background scatter. The scattered light is detected with a wide dynamic range detector producing high resolution 12-bit pixel data capable of resolving the smallest particles and defects of interest in low scatter regions, while avoiding saturation in high scatter regions. Periodic pattern features are removed from the data by mapping features from a plurality of periodically repeating die on the surface to a single die map and looking for overlapping features. Unique, nonoverlapping features are determined to correspond to particles and defects.Type: GrantFiled: July 19, 1993Date of Patent: October 11, 1994Assignee: Tencor InstrumentsInventors: Keith B. Wells, Hung Nguyen, Ralph T. Johnson, Brian C. Leslie