Patents by Inventor Brian Christopher Barker

Brian Christopher Barker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MULTI-MODAL DATA ANALYSIS FOR DEFECT IDENTIFICATION
    Publication number: 20130103336
    Abstract: A technique for identifying a defect in an object produced by a controllable process is disclosed. A first type of data generated as a result of production of the object by the controllable process is obtained. A second type of data generated as a result of production of the object by the controllable process is obtained. The first type of data and the second type of data are jointly analyzed. A defect is identified in the object based on the joint analysis of the first type of data and the second type of data.
    Type: Application
    Filed: April 18, 2012
    Publication date: April 25, 2013
    Applicant: International Business Machines Corporation
    Inventors: Lisa Amini, Brian Christopher Barker, Perry G. Hartswick, Deepak S. Turaga, Olivier Verscheure, Justin Wai-chow Wong
  • Multi-modal data analysis for defect identification
    Patent number: 8260034
    Abstract: A technique for identifying a defect in an object produced by a controllable process. A first type of data generated as a result of production of the object by the controllable process is obtained. A second type of data generated as a result of production of the object by the controllable process is obtained. The first type of data and the second type of data are jointly analyzed. A defect is identified in the object based on the joint analysis of the first type of data and the second type of data. By way of example, the controllable process comprises a semiconductor manufacturing process such as a silicon wafer manufacturing process and the object produced by the semiconductor manufacturing process comprises a processed wafer. The first type of data comprises tool trace data and the second type of data comprises wafer image data. The tool trace data is generated by a photolithographic tool.
    Type: Grant
    Filed: January 22, 2008
    Date of Patent: September 4, 2012
    Assignee: International Business Machines Corporation
    Inventors: Lisa Amini, Brian Christopher Barker, Perry G. Hartswick, Deepak S. Turaga, Olivier Verscheure, Justin Wai-chow Wong
  • Multi-Modal Data Analysis for Defect Identification
    Publication number: 20090185739
    Abstract: A technique for identifying a defect in an object produced by a controllable process. A first type of data generated as a result of production of the object by the controllable process is obtained. A second type of data generated as a result of production of the object by the controllable process is obtained. The first type of data and the second type of data are jointly analyzed. A defect is identified in the object based on the joint analysis of the first type of data and the second type of data. By way of example, the controllable process comprises a semiconductor manufacturing process such as a silicon wafer manufacturing process and the object produced by the semiconductor manufacturing process comprises a processed wafer. The first type of data comprises tool trace data and the second type of data comprises wafer image data. The tool trace data is generated by a photolithographic tool.
    Type: Application
    Filed: January 22, 2008
    Publication date: July 23, 2009
    Inventors: Lisa Amini, Brian Christopher Barker, Perry G. Hartswick, Deepak S. Turaga, Olivier Verscheure, Justin Wai-chow Wong