Patents by Inventor Brian Cleereman

Brian Cleereman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10879259
    Abstract: Methods for forming a string of memory cells, apparatuses having a string of memory cells, and systems are disclosed. One such method for forming a string of memory cells forms a source material over a substrate. A capping material may be formed over the source material. A select gate material may be formed over the capping material. A plurality of charge storage structures may be formed over the select gate material in a plurality of alternating levels of control gate and insulator materials. A first opening may be formed through the plurality of alternating levels of control gate and insulator materials, the select gate material, and the capping material. A channel material may be formed along the sidewall of the first opening. The channel material has a thickness that is less than a width of the first opening, such that a second opening is formed by the semiconductor channel material.
    Type: Grant
    Filed: September 17, 2018
    Date of Patent: December 29, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Jie Sun, Zhenyu Lu, Roger W. Lindsay, Brian Cleereman, John Hopkins, Hongbin Zhu, Fatma Arzum Simsek-Ege, Prasanna Srinivasan, Purnima Narayanan
  • Patent number: 10665599
    Abstract: Some embodiments include a method of forming vertically-stacked memory cells. An opening is formed through a stack of alternating insulative and conductive levels. Cavities are formed to extend into the conductive levels along sidewalls of the opening. At least one of the cavities is formed to be shallower than one or more others of the cavities. Charge-blocking dielectric and charge-storage structures are formed within the cavities. Some embodiments include an integrated structure having a stack of alternating insulative and conductive levels. Cavities extend into the conductive levels. At least one of the cavities is shallower than one or more others of the cavities by at least about 2 nanometers. Charge-blocking dielectric is within the cavities. Charge-storage structures are within the cavities.
    Type: Grant
    Filed: April 1, 2019
    Date of Patent: May 26, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Hongbin Zhu, Gordon A. Haller, Charles H. Dennison, Anish A. Khandekar, Brett D. Lowe, Lining He, Brian Cleereman
  • Publication number: 20190229126
    Abstract: Some embodiments include a method of forming vertically-stacked memory cells. An opening is formed through a stack of alternating insulative and conductive levels. Cavities are formed to extend into the conductive levels along sidewalls of the opening. At least one of the cavities is formed to be shallower than one or more others of the cavities. Charge-blocking dielectric and charge-storage structures are formed within the cavities. Some embodiments include an integrated structure having a stack of alternating insulative and conductive levels. Cavities extend into the conductive levels. At least one of the cavities is shallower than one or more others of the cavities by at least about 2 nanometers. Charge-blocking dielectric is within the cavities. Charge-storage structures are within the cavities.
    Type: Application
    Filed: April 1, 2019
    Publication date: July 25, 2019
    Applicant: Micron Technology, Inc.
    Inventors: Hongbin Zhu, Gordon A. Haller, Charles H. Dennison, Anish A. Khandekar, Brett D. Lowe, Lining He, Brian Cleereman
  • Publication number: 20190131315
    Abstract: Methods for forming a string of memory cells, apparatuses having a string of memory cells, and systems are disclosed. One such method for forming a string of memory cells forms a source material over a substrate. A capping material may be formed over the source material. A select gate material may be formed over the capping material. A plurality of charge storage structures may be formed over the select gate material in a plurality of alternating levels of control gate and insulator materials. A first opening may be formed through the plurality of alternating levels of control gate and insulator materials, the select gate material, and the capping material. A channel material may be formed along the sidewall of the first opening. The channel material has a thickness that is less than a width of the first opening, such that a second opening is formed by the semiconductor channel material.
    Type: Application
    Filed: September 17, 2018
    Publication date: May 2, 2019
    Inventors: Jie Sun, Zhenyu Lu, Roger W. Lindsay, Brian Cleereman, John Hopkins, Hongbin Zhu, Fatam Arzum Simsek-Ege, Prasanna Srinivasan, Purnima Narayanan
  • Patent number: 10269819
    Abstract: Some embodiments include a method of forming vertically-stacked memory cells. An opening is formed through a stack of alternating insulative and conductive levels. Cavities are formed to extend into the conductive levels along sidewalls of the opening. At least one of the cavities is formed to be shallower than one or more others of the cavities. Charge-blocking dielectric and charge-storage structures are formed within the cavities. Some embodiments include an integrated structure having a stack of alternating insulative and conductive levels. Cavities extend into the conductive levels. At least one of the cavities is shallower than one or more others of the cavities by at least about 2 nanometers. Charge-blocking dielectric is within the cavities. Charge-storage structures are within the cavities.
    Type: Grant
    Filed: April 25, 2017
    Date of Patent: April 23, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Hongbin Zhu, Gordon A. Haller, Charles H. Dennison, Anish A. Khandekar, Brett D. Lowe, Lining He, Brian Cleereman
  • Patent number: 10229928
    Abstract: An integrated circuit may include a pillar of semiconductor material, a field effect transistor having a channel that is formed in the pillar of semiconductor material, and two or more memory cells, stacked vertically on top of the field effect transistor, and having channels that are formed in the pillar semiconductor of material.
    Type: Grant
    Filed: April 19, 2016
    Date of Patent: March 12, 2019
    Assignee: Intel Corporation
    Inventors: Jie Jason Sun, Brian Cleereman, Minsoo Lee
  • Patent number: 10090317
    Abstract: Methods for forming a string of memory cells, apparatuses having a string of memory cells, and systems are disclosed. One such method for forming a string of memory cells forms a source material over a substrate. A capping material may be formed over the source material. A select gate material may be formed over the capping material. A plurality of charge storage structures may be formed over the select gate material in a plurality of alternating levels of control gate and insulator materials. A first opening may be formed through the plurality of alternating levels of control gate and insulator materials, the select gate material, and the capping material. A channel material may be formed along the sidewall of the first opening. The channel material has a thickness that is less than a width of the first opening, such that a second opening is formed by the semiconductor channel material.
    Type: Grant
    Filed: July 27, 2016
    Date of Patent: October 2, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Jie Sun, Zhenyu Lu, Roger W. Lindsay, Brian Cleereman, John Hopkins, Hongbin Zhu, Fatma Arzum Simsek-Ege, Prasanna Srinivasan, Purnima Narayanan
  • Publication number: 20170229470
    Abstract: Some embodiments include a method of forming vertically-stacked memory cells. An opening is formed through a stack of alternating insulative and conductive levels. Cavities are formed to extend into the conductive levels along sidewalls of the opening. At least one of the cavities is formed to be shallower than one or more others of the cavities. Charge-blocking dielectric and charge-storage structures are formed within the cavities. Some embodiments include an integrated structure having a stack of alternating insulative and conductive levels. Cavities extend into the conductive levels. At least one of the cavities is shallower than one or more others of the cavities by at least about 2 nanometers. Charge-blocking dielectric is within the cavities. Charge-storage structures are within the cavities.
    Type: Application
    Filed: April 25, 2017
    Publication date: August 10, 2017
    Inventors: Hongbin Zhu, Gordon A. Haller, Charles H. Dennison, Anish A. Khandekar, Brett D. Lowe, Lining He, Brian Cleereman
  • Patent number: 9659949
    Abstract: Some embodiments include a method of forming vertically-stacked memory cells. An opening is formed through a stack of alternating insulative and conductive levels. Cavities are formed to extend into the conductive levels along sidewalls of the opening. At least one of the cavities is formed to be shallower than one or more others of the cavities. Charge-blocking dielectric and charge-storage structures are formed within the cavities. Some embodiments include an integrated structure having a stack of alternating insulative and conductive levels. Cavities extend into the conductive levels. At least one of the cavities is shallower than one or more others of the cavities by at least about 2 nanometers. Charge-blocking dielectric is within the cavities. Charge-storage structures are within the cavities.
    Type: Grant
    Filed: March 23, 2015
    Date of Patent: May 23, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Hongbin Zhu, Gordon A. Haller, Charles H. Dennison, Anish A. Khandekar, Brett D. Lowe, Lining He, Brian Cleereman
  • Publication number: 20160336341
    Abstract: Methods for forming a string of memory cells, apparatuses having a string of memory cells, and systems are disclosed. One such method for forming a string of memory cells forms a source material over a substrate. A capping material may be formed over the source material. A select gate material may be formed over the capping material. A plurality of charge storage structures may be formed over the select gate material in a plurality of alternating levels of control gate and insulator materials. A first opening may be formed through the plurality of alternating levels of control gate and insulator materials, the select gate material, and the capping material. A channel material may be formed along the sidewall of the first opening. The channel material has a thickness that is less than a width of the first opening, such that a second opening is formed by the semiconductor channel material.
    Type: Application
    Filed: July 27, 2016
    Publication date: November 17, 2016
    Inventors: Jie Sun, Zhenyu Lu, Roger W. Lindsay, Brian Cleereman, John Hopkins, Hongbin Zhu, Fatma Arzum Simsek-Ege, Prasanna Srinivasan, Purnima Narayanan
  • Publication number: 20160307914
    Abstract: An integrated circuit may include a pillar of semiconductor material, a field effect transistor having a channel that is formed in the pillar of semiconductor material, and two or more memory cells, stacked vertically on top of the field effect transistor, and having channels that are formed in the pillar semiconductor of material.
    Type: Application
    Filed: April 19, 2016
    Publication date: October 20, 2016
    Inventors: Jie Jason Sun, Brian Cleereman, Minsoo Lee
  • Publication number: 20160284719
    Abstract: Some embodiments include a method of forming vertically-stacked memory cells. An opening is formed through a stack of alternating insulative and conductive levels. Cavities are formed to extend into the conductive levels along sidewalls of the opening. At least one of the cavities is formed to be shallower than one or more others of the cavities. Charge-blocking dielectric and charge-storage structures are formed within the cavities. Some embodiments include an integrated structure having a stack of alternating insulative and conductive levels. Cavities extend into the conductive levels. At least one of the cavities is shallower than one or more others of the cavities by at least about 2 nanometers. Charge-blocking dielectric is within the cavities. Charge-storage structures are within the cavities.
    Type: Application
    Filed: March 23, 2015
    Publication date: September 29, 2016
    Inventors: Hongbin Zhu, Gordon A. Haller, Charles H. Dennison, Anish A. Khandekar, Brett D. Lowe, Lining He, Brian Cleereman
  • Patent number: 9431410
    Abstract: Methods for forming a string of memory cells, apparatuses having a string of memory cells, and systems are disclosed. One such method for forming a string of memory cells forms a source material over a substrate. A capping material may be formed over the source material. A select gate material may be formed over the capping material. A plurality of charge storage structures may be formed over the select gate material in a plurality of alternating levels of control gate and insulator materials. A first opening may be formed through the plurality of alternating levels of control gate and insulator materials, the select gate material, and the capping material. A channel material may be formed along the sidewall of the first opening. The channel material has a thickness that is less than a width of the first opening, such that a second opening is formed by the semiconductor channel material.
    Type: Grant
    Filed: November 1, 2013
    Date of Patent: August 30, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Jie Sun, Zhenyu Lu, Roger W. Lindsay, Brian Cleereman, John Hopkins, Hongbin Zhu, Fatma Arzum Simsek-Ege, Prasanna Srinivasan, Purnima Narayanan
  • Patent number: 9343469
    Abstract: An integrated circuit may include a pillar of semiconductor material, a field effect transistor having a channel that is formed in the pillar of semiconductor material, and two or more memory cells, stacked vertically on top of the field effect transistor, and having channels that are formed in the pillar semiconductor of material.
    Type: Grant
    Filed: June 27, 2012
    Date of Patent: May 17, 2016
    Assignee: INTEL CORPORATION
    Inventors: Jie Sun, Brian Cleereman, Minsoo Lee
  • Patent number: 9219070
    Abstract: A 3-D memory array comprises a plurality of elevationally extending strings of memory cells. An array of select devices is elevationally over and individually coupling with individual of the strings. The select devices individually comprise a channel, gate dielectric proximate the channel, and gate material proximate the gate dielectric. The individual channels are spaced from one another. The gate material comprises a plurality of gate lines running along columns of the spaced channels elevationally over the strings. Dielectric material is laterally between immediately adjacent of the gate lines. The dielectric material and the gate lines have longitudinally non-linear edges at an interface relative one another. Additional embodiments are disclosed.
    Type: Grant
    Filed: February 5, 2013
    Date of Patent: December 22, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Deepak Thimmegowda, Brian Cleereman, Khaled Hasnat
  • Patent number: 9059115
    Abstract: Some embodiments include methods of forming memory. A series of photoresist features may be formed over a gate stack, and a placeholder may be formed at an end of said series. The placeholder may be spaced from the end of said series by a gap. A layer may be formed over and between the photoresist features, over the placeholder, and within said gap. The layer may be anisotropically etched into a plurality of first vertical structures along edges of the photoresist features, and into a second vertical structure along an edge of the placeholder. A mask may be formed over the second vertical structure. Subsequently, the first vertical structures may be used to pattern string gates while the mask is used to pattern a select gate. Some embodiments include methods of forming conductive runners, and some embodiments may include semiconductor constructions.
    Type: Grant
    Filed: December 4, 2013
    Date of Patent: June 16, 2015
    Assignee: Micron Technology, Inc.
    Inventors: David A. Kewley, Brian Cleereman, Stephen W. Russell, Rex Stone, Anthony C. Krauth
  • Publication number: 20150123189
    Abstract: Methods for forming a string of memory cells, apparatuses having a string of memory cells, and systems are disclosed. One such method for forming a string of memory cells forms a source material over a substrate. A capping material may be formed over the source material. A select gate material may be formed over the capping material. A plurality of charge storage structures may be formed over the select gate material in a plurality of alternating levels of control gate and insulator materials. A first opening may be formed through the plurality of alternating levels of control gate and insulator materials, the select gate material, and the capping material. A channel material may be formed along the sidewall of the first opening. The channel material has a thickness that is less than a width of the first opening, such that a second opening is formed by the semiconductor channel material.
    Type: Application
    Filed: November 1, 2013
    Publication date: May 7, 2015
    Applicant: Micron Technology, Inc.
    Inventors: Jie Sun, Zhenyu Lu, Roger W. Lindsay, Brian Cleereman, John Hopkins, Hongbin Zhu, Fatma Arzum Simsek-Ege, Prasanna Srinivasan, Purnima Narayanan
  • Publication number: 20140217488
    Abstract: A 3-D memory array comprises a plurality of elevationally extending strings of memory cells. An array of select devices is elevationally over and individually coupling with individual of the strings. The select devices individually comprise a channel, gate dielectric proximate the channel, and gate material proximate the gate dielectric. The individual channels are spaced from one another. The gate material comprises a plurality of gate lines running along columns of the spaced channels elevationally over the strings. Dielectric material is laterally between immediately adjacent of the gate lines. The dielectric material and the gate lines have longitudinally non-linear edges at an interface relative one another. Additional embodiments are disclosed.
    Type: Application
    Filed: February 5, 2013
    Publication date: August 7, 2014
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Deepak Thimmegowda, Brian Cleereman, Khaled Hasnat
  • Publication number: 20140087558
    Abstract: Some embodiments include methods of forming memory. A series of photoresist features may be formed over a gate stack, and a placeholder may be formed at an end of said series. The placeholder may be spaced from the end of said series by a gap. A layer may be formed over and between the photoresist features, over the placeholder, and within said gap. The layer may be anisotropically etched into a plurality of first vertical structures along edges of the photoresist features, and into a second vertical structure along an edge of the placeholder. A mask may be formed over the second vertical structure. Subsequently, the first vertical structures may be used to pattern string gates while the mask is used to pattern a select gate. Some embodiments include methods of forming conductive runners, and some embodiments may include semiconductor constructions.
    Type: Application
    Filed: December 4, 2013
    Publication date: March 27, 2014
    Applicant: Micron Technology, Inc.
    Inventors: David A. Kewley, Brian Cleereman, Stephen W. Russell, Rex Stone, Anthony C. Krauth
  • Publication number: 20140003148
    Abstract: An integrated circuit may include a pillar of semiconductor material, a field effect transistor having a channel that is formed in the pillar of semiconductor material, and two or more memory cells, stacked vertically on top of the field effect transistor, and having channels that are formed in the pillar semiconductor of material.
    Type: Application
    Filed: June 27, 2012
    Publication date: January 2, 2014
    Inventors: Jie Sun, Brian Cleereman, Minsoo Lee