Patents by Inventor Brian Duda

Brian Duda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for measuring pedestal temperature in a semiconductor wafer processing system
    Patent number: 5893643
    Abstract: Apparatus for measuring wafer support pedestal temperature in a semiconductor wafer processing system. The apparatus measures infrared energy emitted by the bottom of the pedestal via a tube having one end inserted in a bore through the underside of the cathode pedestal base. The distal end of the tube is coupled to a temperature sensor. Both the tube and temperature sensor are fitted with insulating sleeve adapters to suppress unwanted RF signals from coupling to the sensor.
    Type: Grant
    Filed: March 25, 1997
    Date of Patent: April 13, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Ajay Kumar, Jeffrey Chinn, Shashank C. Deshmukh, Weinan Jiang, Brian Duda, Rolf Guenther, Bruce Minaee, Marco Mombelli, Mark Wiltse