Patents by Inventor Brian George Heil

Brian George Heil has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for controlling ion energy in radio frequency plasmas
    Patent number: 8933629
    Abstract: A method of establishing a DC bias in front of at least one electrode in a plasma operating apparatus by applying an RF voltage with at least two harmonic frequency components with a controlled relative phase between the components, where at least one of the higher frequency components is established as an even multiple of the lower frequency component.
    Type: Grant
    Filed: November 8, 2013
    Date of Patent: January 13, 2015
    Assignee: Ruhr-Universität Bochum
    Inventors: Brian George Heil, Uwe Czarnetzki, Ralf Peter Brinkmann, Thomas Mussenbrock
  • METHOD FOR CONTROLLING ION ENERGY IN RADIO FREQUENCY PLASMAS
    Publication number: 20140103808
    Abstract: A method of establishing a DC bias in front of at least one electrode in a plasma operating apparatus by applying an RF voltage with at least two harmonic frequency components with a controlled relative phase between the components, where at least one of the higher frequency components is established as an even multiple of the lower frequency component.
    Type: Application
    Filed: November 8, 2013
    Publication date: April 17, 2014
    Applicant: Ruhr-Universitat Bochum
    Inventors: Brian George Heil, Uwe Czarnetzki, Ralf Peter Brinkmann, Thomas Mussenbrock
  • Method for controlling ion energy in radio frequency plasmas
    Patent number: 8643280
    Abstract: A method of establishing a DC bias in front of at least one electrode in a plasma operating apparatus by applying an RF voltage with at least two harmonic frequency components with a controlled relative phase between the components, where at least one of the higher frequency components is established as an even multiple of the lower frequency component.
    Type: Grant
    Filed: July 11, 2008
    Date of Patent: February 4, 2014
    Assignee: Ruhr-Universität Bochum
    Inventors: Brian George Heil, Uwe Czarnetzki, Ralf Peter Brinkmann, Thomas Mussenbrock
  • METHOD FOR CONTROLLING ION ENERGY IN RADIO FREQUENCY PLASMAS
    Publication number: 20110248634
    Abstract: A method of establishing a DC bias in front of at least one electrode in a plasma operating apparatus by applying an RF voltage with at least two harmonic frequency components with a controlled relative phase between the components, where at least one of the higher frequency components is established as an even multiple of the lower frequency component.
    Type: Application
    Filed: July 11, 2008
    Publication date: October 13, 2011
    Applicant: RUHR-UNIVERSITAT
    Inventors: Brian George Heil, Uwe Czarnetzki, Ralf Peter Brinkmann, Thomas Mussenbrock