Abstract: A method for forming small repeating structures, such as contact holes, is disclosed. The method comprises using a phase shift mask to perform a first exposure of a photoresist layer formed atop of a substrate. The phase shift mask includes etched regions and unetched regions. Next, the position of the phase shift mask is adjusted relative to the photoresist layer. A second exposure through the adjusted phase shift mask is performed on the photoresist layer. The photoresist is developed and is used as a mask for etching the substrate. After etch, the photoresist is stripped and cleaned. The resulted small sub-wavelength pattern is formed from the disclosed technique.

Abstract: A barcode module for an automated data storage libary is described. More particularly, a barcode module capable of being manipulated by a picker and easily retrofitted to existing data storage libraries is described. The barcode module may be equipped with a network interface capable of receiving high-level commands over a control network from a central control unit and converting the high-level commands into low-level commands used to control the barcode module.