Patents by Inventor Brian J. Cleereman

Brian J. Cleereman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Three dimensional memory
    Patent number: 11949022
    Abstract: A method to fabricate a three dimensional memory structure may include creating a stack of layers including a conductive source layer, a first insulating layer, a select gate source layer, and a second insulating layer, and an array stack. A hole through the stack of layers may then be created using the conductive source layer as a stop-etch layer. The source material may have an etch rate no faster than 33% as fast as an etch rate of the insulating material for the etch process used to create the hole. A pillar of semiconductor material may then fill the hole, so that the pillar of semiconductor material is in electrical contact with the conductive source layer.
    Type: Grant
    Filed: February 23, 2022
    Date of Patent: April 2, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Zhenyu Lu, Hongbin Zhu, Gordon A. Haller, Roger W. Lindsay, Andrew Bicksler, Brian J. Cleereman, Minsoo Lee
  • BLOCK-TO-BLOCK ISOLATION AND DEEP CONTACT USING PILLARS IN A MEMORY ARRAY
    Publication number: 20230036595
    Abstract: An integrated circuit memory includes a first memory block and an adjacent second memory block. The first memory block comprises a first memory pillar around which a first memory cell is formed. The second memory block comprises a second memory pillar around which a second memory cell is formed. An isolation or slit area between the first and second memory blocks electrically isolates the first and second memory blocks. In an example, the slit area comprising a slit pillar around which no memory cells are formed. The slit pillar is a dummy pillar, and insulator material electrically isolates the slit pillar from a Word Line (WL) through which it passes. The isolation layer electrically can also isolate a (WL) of the first memory block from a corresponding WL of the second memory block. In an example, the slit pillar and the memory pillars have at least in part similar structures.
    Type: Application
    Filed: February 8, 2020
    Publication date: February 2, 2023
    Inventors: Deepak THIMMEGOWDA, Brian J. CLEEREMAN, Srivardhan GOWDA, Jui-Yen LIN, Liu LIU, Krishna PARAT, Jong Sun SEL, Baosuo ZHOU
  • Three Dimensional Memory
    Publication number: 20220181483
    Abstract: A method to fabricate a three dimensional memory structure may include creating a stack of layers including a conductive source layer, a first insulating layer, a select gate source layer, and a second insulating layer, and an array stack. A hole through the stack of layers may then be created using the conductive source layer as a stop-etch layer. The source material may have an etch rate no faster than 33% as fast as an etch rate of the insulating material for the etch process used to create the hole. A pillar of semiconductor material may then fill the hole, so that the pillar of semiconductor material is in electrical contact with the conductive source layer.
    Type: Application
    Filed: February 23, 2022
    Publication date: June 9, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Zhenyu Lu, Hongbin Zhu, Gordon A. Haller, Roger W. Lindsay, Andrew Bicksler, Brian J. Cleereman, Minsoo Lee
  • Three dimensional memory
    Patent number: 11289611
    Abstract: A method to fabricate a three dimensional memory structure may include creating a stack of layers including a conductive source layer, a first insulating layer, a select gate source layer, and a second insulating layer, and an array stack. A hole through the stack of layers may then be created using the conductive source layer as a stop-etch layer. The source material may have an etch rate no faster than 33% as fast as an etch rate of the insulating material for the etch process used to create the hole. A pillar of semiconductor material may then fill the hole, so that the pillar of semiconductor material is in electrical contact with the conductive source layer.
    Type: Grant
    Filed: April 10, 2020
    Date of Patent: March 29, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Zhenyu Lu, Hongbin Zhu, Gordon A. Haller, Roger W. Lindsay, Andrew Bicksler, Brian J. Cleereman, Minsoo Lee
  • Three Dimensional Memory
    Publication number: 20200243677
    Abstract: A method to fabricate a three dimensional memory structure may include creating a stack of layers including a conductive source layer, a first insulating layer, a select gate source layer, and a second insulating layer, and an array stack. A hole through the stack of layers may then be created using the conductive source layer as a stop-etch layer. The source material may have an etch rate no faster than 33% as fast as an etch rate of the insulating material for the etch process used to create the hole. A pillar of semiconductor material may then fill the hole, so that the pillar of semiconductor material is in electrical contact with the conductive source layer.
    Type: Application
    Filed: April 10, 2020
    Publication date: July 30, 2020
    Applicant: Micron Technology, Inc.
    Inventors: Zhenyu Lu, Hongbin Zhu, Gordon A. Haller, Roger W. Lindsay, Andrew Bicksler, Brian J. Cleereman, Minsoo Lee
  • Three dimensional memory
    Patent number: 10651315
    Abstract: A method to fabricate a three dimensional memory structure may include creating a stack of layers including a conductive source layer, a first insulating layer, a select gate source layer, and a second insulating layer, and an array stack. A hole through the stack of layers may then be created using the conductive source layer as a stop-etch layer. The source material may have an etch rate no faster than 33% as fast as an etch rate of the insulating material for the etch process used to create the hole. A pillar of semiconductor material may then fill the hole, so that the pillar of semiconductor material is in electrical contact with the conductive source layer.
    Type: Grant
    Filed: December 17, 2012
    Date of Patent: May 12, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Zhenyu Lu, Hongbin Zhu, Gordon A Haller, Roger W. Lindsay, Andrew Bicksler, Brian J. Cleereman, Minsoo Lee
  • THREE DIMENSIONAL MEMORY
    Publication number: 20140167131
    Abstract: A method to fabricate a three dimensional memory structure may include creating a stack of layers including a conductive source layer, a first insulating layer, a select gate source layer, and a second insulating layer, and an array stack. A hole through the stack of layers may then be created using the conductive source layer as a stop-etch layer. The source material may have an etch rate no faster than 33% as fast as an etch rate of the insulating material for the etch process used to create the hole. A pillar of semiconductor material may then fill the hole, so that the pillar of semiconductor material is in electrical contact with the conductive source layer.
    Type: Application
    Filed: December 17, 2012
    Publication date: June 19, 2014
    Inventors: Zhenyu Lu, Hongbin Zhu, Gordon A. Haller, Roger W. Lindsay, Andrew Bicksler, Brian J. Cleereman, Minsoo Lee