Patents by Inventor Brian J. Downum

Brian J. Downum has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Flexible polishing fluid delivery system
    Patent number: 7086933
    Abstract: A method and apparatus for delivering a polishing fluid to a chemical mechanical polishing surface is provided. In one embodiment, an apparatus for delivering a polishing fluid to a chemical mechanical polishing surface includes an arm having a plurality of holes formed in the arm for retaining a plurality of polishing fluid delivery tubes. Each of the tubes are disposed through one of the holes and coupled to the arm. The number of holes exceeds the number of tubes, thereby allowing the distribution of polishing fluid to a polishing surface and correspondingly the local polishing rates across a diameter of a substrate being polished to be controlled.
    Type: Grant
    Filed: April 22, 2002
    Date of Patent: August 8, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Lidia Vereen, Peter N. Skarpelos, Brian J. Downum, Patrick Williams, Terry Kin-Ting Ko, Christopher Heung-Gyun Lee, Kenneth Reese Reynolds, John Hearne, Daniel Hachnochi
  • Flexible polishing fluid delivery system
    Publication number: 20030199229
    Abstract: A method and apparatus for delivering a polishing fluid to a chemical mechanical polishing surface is provided. In one embodiment, an apparatus for delivering a polishing fluid to a chemical mechanical polishing surface includes an arm having a plurality of holes formed in the arm for retaining a plurality of polishing fluid delivery tubes. Each of the tubes are disposed through one of the holes and coupled to the arm. The number of holes exceeds the number of tubes, thereby allowing the distribution of polishing fluid to a polishing surface and correspondingly the local polishing rates across a diameter of a substrate being polished to be controlled.
    Type: Application
    Filed: April 22, 2002
    Publication date: October 23, 2003
    Applicant: Applied Materials, Inc.
    Inventors: Lidia Vereen, Peter N. Skarpelos, Brian J. Downum, Patrick Williams, Terry Kin-Ting Ko, Christopher Heung-Gyun Lee, Kenneth Reese Reynolds, John Hearne, Daniel Hachnochi