Patents by Inventor Brian J. Ebert

Brian J. Ebert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Bubbler for substrate processing
    Patent number: 7370848
    Abstract: A vaporization chamber for a substrate processing system includes a main body, a cover member and a transition member. The main body is made of aluminum and defines a first inner surface, which defines, at least in part, a cavity. The cover member is also made of aluminum. The cover member defines a second inner surface, which also defines, at least in part, the cavity. The cover member includes a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extends from a first outer surface through the cover member to the second inner surface. The transition member is made of stainless steel and has a transition outer surface and a transition inner surface. The transition inner surface is aluminum cladded. The cover member including a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extend from a first outer surface through the cover member to second inner surface. The transition inner surface and the cover outer surface are welded together.
    Type: Grant
    Filed: June 30, 2006
    Date of Patent: May 13, 2008
    Assignee: ASM America, Inc.
    Inventors: Michael R. Stamp, Frederick J. AmRhein, Arnold J. Dale, Joseph C. Pottebaum, Brian J. Ebert
  • Bubbler for substrate processing
    Patent number: 7077388
    Abstract: A vaporization chamber for a substrate processing system includes a main body, a cover member and a transition member. The main body is made of aluminum and defines a first inner surface, which defines, at least in part, a cavity. The cover member is also made of aluminum. The cover member defines a second inner surface, which also defines, at least in part, the cavity. The cover member includes a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extends from a first outer surface through the cover member to the second inner surface. The transition member is made of stainless steel and has a transition outer surface and a transition inner surface. The transition inner surface is aluminum cladded. The cover member includes a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extend from a first outer surface through the cover member to second inner surface. The transition inner surface and the cover outer surface are welded together.
    Type: Grant
    Filed: July 17, 2003
    Date of Patent: July 18, 2006
    Assignee: ASM America, Inc.
    Inventors: Michael R. Stamp, Frederick J. AmRhein, Arnold J. Dale, Joseph C. Pottebaum, Brian J. Ebert
  • Bubbler for substrate processing
    Publication number: 20040084149
    Abstract: A vaporization chamber for a substrate processing system comprises a main body, a cover member and a transition member. The main body is made of aluminum and defines a first inner surface, which defines, at least in part, a cavity. The cover member is also made of aluminum. The cover member defines a second inner surface, which also defines, at least in part, the cavity. The cover member comprises a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extends from a first outer surface through the cover member to the second inner surface. The transition member is made of stainless steel and has a transition outer surface and a transition inner surface. The transition inner surface is aluminum cladded. The cover member comprising a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extend from a first outer surface through the cover member to second inner surface. The transition inner surface and the cover outer surface are welded together.
    Type: Application
    Filed: July 17, 2003
    Publication date: May 6, 2004
    Inventors: Michael R. Stamp, Frederick J. AmRhein, Arnold J. Dale, Joseph C. Pottebaum, Brian J. Ebert