Patents by Inventor Brian J. Fisher

Brian J. Fisher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Treatment for reduction of line edge roughness
    Patent number: 7670760
    Abstract: A method for reducing line edge roughness (LER) in a layer of photoresist is provided. In accordance with the method, a layer of photoresist is applied to a substrate. The layer of photoresist is then patterned and annealed in an atmosphere comprising at least one gas selected from the group consisting of hydrogen, nitrogen and fluorine-containing materials. Preferably, the anneal is performed after patterning the photoresist, but either immediately after, or subsequent to, the trim.
    Type: Grant
    Filed: March 6, 2006
    Date of Patent: March 2, 2010
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Jinmiao James Shen, Jonathan L. Cobb, William D. Darlington, Brian J. Fisher, Mark D. Hall, Vikas R. Sheth, Mehul D. Shroff, James E. Vasek
  • Plasma treatment for surface of semiconductor device
    Patent number: 7176130
    Abstract: A method for forming a semiconductor device (10) includes forming an organic anti-reflective coating (OARC) layer (18) over the semiconductor device (10). A tetra-ethyl-ortho-silicate (TEOS) layer (20) is formed over the OARC layer (18). The TEOS layer (20) is exposed to oxygen-based plasma at a temperature of at most about 300 degrees Celsius. In an alternative embodiment, the TEOS layer (20) is first exposed to a nitrogen-based plasma before being exposed to the oxygen-based plasma. A photoresist layer (22) is formed over the TEOS layer (20) and patterned. By applying oxygen based plasma and nitrogen based plasma to the TEOS layer (20) before applying photoresist, pattern defects are reduced.
    Type: Grant
    Filed: November 12, 2004
    Date of Patent: February 13, 2007
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Jin Miao Shen, Brian J. Fisher, Mark D. Hall, Kurt H. Junker, Vikas R. Sheth, Mehul D. Shroff
  • Camera stand and actuating mechanism
    Patent number: 6488420
    Abstract: A camera stand and camera housing for allowing users to photograph themselves with a single use camera. The stand may include a tripod having legs that are adjustable in and out to spread the legs and collapse them together. A camera pedestal at the top of the tripod has a ball that fits in a socket on the bottom of the camera housing to provide for universal aiming of the camera. The camera housing has a rear opening for loading and unloading of cameras and a hinged door for closing the rear opening. Alignment surfaces inside the housing assure that all commercially available single use cameras are positioned with their shutter buttons located directly below a striker which actuates the shutter button. A control mechanism forces the striker downwardly against the shutter button after elapse of a time delay giving the user enough time to move in front of the camera.
    Type: Grant
    Filed: June 21, 2000
    Date of Patent: December 3, 2002
    Inventor: Brian J. Fisher