Patents by Inventor Brian J. Kerley

Brian J. Kerley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor recess formation
    Patent number: 10978306
    Abstract: Methods, apparatuses, and systems related to forming a recess in a semiconductor structure are described. An example method includes etching the semiconductor structure using an elevated temperature dilution of acid and water. The method further includes etching the semiconductor structure using a room temperature wet etch of acid and water and a surface modification chemistry.
    Type: Grant
    Filed: March 29, 2019
    Date of Patent: April 13, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Jerome A. Imonigie, Adriel Jebin Jacob Jebaraj, Brian J. Kerley, Sanjeev Sapra, Ashwin Panday
  • SEMICONDUCTOR RECESS FORMATION
    Publication number: 20200312954
    Abstract: Methods, apparatuses, and systems related to forming a recess in a semiconductor structure are described. An example method includes etching the semiconductor structure using an elevated temperature dilution of acid and water. The method further includes etching the semiconductor structure using a room temperature wet etch of acid and water and a surface modification chemistry.
    Type: Application
    Filed: March 29, 2019
    Publication date: October 1, 2020
    Inventors: Jerome A. Imonigie, Adriel Jebin Jacob Jebaraj, Brian J. Kerley, Sanjeev Sapra, Ashwin Panday