Patents by Inventor Brian J. Mattson

Brian J. Mattson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Stacked and cross-connected recirculating fans in a semiconductor manufacturing cleanroom
    Patent number: 5069113
    Abstract: A pair of recirculating fans for semiconductor cleanroom use are stacked to allow each fan to service a smaller zone in the cleanroom than if the fans were placed side by side. Each fan controls the temperature, humidity, and particulate count for its own zone of the cleanroom, thereby allowing strict control of these parameters. The ductwork of the two fans are cross connected so that either fan can be maintained or repaired while the other fan services its own zone and the zone normally serviced by the off-line fan.
    Type: Grant
    Filed: June 4, 1990
    Date of Patent: December 3, 1991
    Assignee: Micron Technology, Inc.
    Inventors: Brian J. Mattson, Chester N. Edwards