Abstract: Multiple waste streams, including incompatible chemicals such as concentrated acids and/or strong base effluents, are handled together without the need for limiting or interrupting the processes run by the wafer processing tools. In some embodiments, waste tanks are primed with diluents, such as water, and a predetermined percentage of diluent is maintained in the waste tanks. In some embodiments, a diluent is flowed into the waste tanks concurrently with the waste pumping to generate a rinsing action for the waste tanks. Methods of the present disclosure accommodate both gravity type and vacuum type waste tanks.

Abstract: A reactor assembly includes a first block having an array of reactors defined therein and a second block having an array of openings defined within a surface of the second block. Each opening of he array of openings is substantially aligned with a corresponding opening of the array of reactors so that that each reactor is associated with at least one corresponding opening defined within the surface of the second block when the surface of the second block is placed on a surface of the first block. The first block is removably sealed against each surface defining the array of openings. A network of channels is defined within the second block. The network of channels is in fluid communication with a fluid source.