Patents by Inventor Brian Kinnear

Brian Kinnear has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8004678
    Abstract: In one embodiment, a wafer alignment system, comprises a radiation source to generate radiation, a radiation directing assembly to direct at least a portion of the radiation onto a surface of a wafer, the radiation having a polarization state, an optical analyzer to collect at least a portion of the radiation reflected from the wafer, the wafer including at least a first region having a first grating pattern oriented in a first direction and at least a second region having a second grating pattern oriented in a second direction, different from the first direction.
    Type: Grant
    Filed: June 26, 2007
    Date of Patent: August 23, 2011
    Assignee: Intel Corporation
    Inventors: Martin Weiss, Brian Kinnear, Telly Koffas, David Fryer, Ming-chuan Yang, William T Blanton
  • Publication number: 20090002706
    Abstract: In one embodiment, a wafer alignment system, comprises a radiation source to generate radiation, a radiation directing assembly to direct at least a portion of the radiation onto a surface of a wafer, the radiation having a polarization state, an optical analyzer to collect at least a portion of the radiation reflected from the wafer, the wafer including at least a first region having a first grating pattern oriented in a first direction and at least a second region having a second grating pattern oriented in a second direction, different from the first direction.
    Type: Application
    Filed: June 26, 2007
    Publication date: January 1, 2009
    Inventors: Martin Weiss, Brian Kinnear, Telly Koffas, David Fryer, Ming-chuan Yang, William T. Blanton