Abstract: An electrostatic chuck for supporting a semiconductor wafer, including: a chuck body having a dielectric region and an insulating region, the insulating region having a higher electrical resistivity than the dielectric region, an electrode embedded in the chuck body, and a barrier layer provided between dielectric region and the insulating region.

Abstract: A method of producing a rare earth oxysulfide scintillating ceramic body includes heat treatment to form a consolidated body, followed by gas hot isostatic pressing (GHIPing). A powder is first provided having the general formula (M1-xLnx)2O2S, wherein M is a rare earth element, and Ln is at least one element selected from the group consisting of Eu, Ce, Pr, Tb, Yb, Dy, Sm, and Ho, and 1×10?6<X<2×10?1. The powder is heat treated to form a consolidated body having closed porosity, wherein heat treating is carried out at a temperature Tht. The consolidated body is GHIPed to a density not less than 99% of theoretical density, in a GHIPing environment having a temperature Thip, where 1100° C.<Thip<1500° C., to thereby form a densified body.

Abstract: An electrostatic chuck for supporting a semiconductor wafer, including: a chuck body having a dielectric region and an insulating region, the insulating region having a higher electrical resistivity than the dielectric region, an electrode embedded in the chuck body, and a barrier layer provided between dielectric region and the insulating region.

Abstract: A system for localized wireless audio communication includes a controller and headphones. The controller may be for transmitting a wireless signal representing audio information. The controller may be configured to encode the audio information. The headphones may be configured to receive the wireless signal and reproduce the audio information, wherein encoding the audio information includes providing an authentication uniquely associating the controller and the headphones, and reproducing the audio information includes verifying the authentication so that audio information represented by wireless signals from a source other than the controller is not reproduced.