Patents by Inventor Brian P. Meinke

Brian P. Meinke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Alternating current rotatable sputter cathode
    Patent number: 7905995
    Abstract: The present invention is an alternating current rotary sputter cathode in a vacuum chamber. The apparatus includes a housing containing a vacuum and a cathode disposed therein. A drive shaft is rotatably mounted in the bearing housing. A rotary vacuum seal is located in the bearing housing for sealing the drive shaft to the housing. An at least one electrical contact is disposed between a power source and the cathode for transmittal of an oscillating or fluctuating current to the cathode. The electrical contact between the power source and the cathode is disposed inside of the vacuum chamber, greatly reducing, and almost eliminating, the current induced heating of various bearing, seals, and other parts of the rotatably sputter cathode assembly.
    Type: Grant
    Filed: July 14, 2008
    Date of Patent: March 15, 2011
    Assignee: Applied Materials, Inc.
    Inventors: John R. German, Daniel T. Crowley, Brian P. Meinke, Roger L. Peterson
  • ALTERNATING CURRENT ROTATABLE SPUTTER CATHODE
    Publication number: 20080264786
    Abstract: The present invention is an alternating current rotary sputter cathode in a vacuum chamber. The apparatus includes a housing containing a vacuum and a cathode disposed therein. A drive shaft is rotatably mounted in the bearing housing. A rotary vacuum seal is located in the bearing housing for sealing the drive shaft to the housing. An at least one electrical contact is disposed between a power source and the cathode for transmittal of an oscillating or fluctuating current to the cathode. The electrical contact between the power source and the cathode is disposed inside of the vacuum chamber, greatly reducing, and almost eliminating, the current induced heating of various bearing, seals, and other parts of the rotatably sputter cathode assembly.
    Type: Application
    Filed: July 14, 2008
    Publication date: October 30, 2008
    Inventors: John R. German, Daniel T. Crowley, Brian P. Meinke, Roger L. Peterson
  • Alternating current rotatable sputter cathode
    Patent number: 7399385
    Abstract: The present invention is an alternating current rotary sputter cathode in a vacuum chamber. The apparatus includes a housing containing a vacuum and a cathode disposed therein. A drive shaft is rotatably mounted in the bearing housing. A rotary vacuum seal is located in the bearing housing for sealing the drive shaft to the housing. An at least one electrical contact is disposed between a power source and the cathode for transmittal of an oscillating or fluctuating current to the cathode. The electrical contact between the power source and the cathode is disposed inside of the vacuum chamber, greatly reducing, and almost eliminating, the current induced heating of various bearing, seals, and other parts of the rotatably sputter cathode assembly.
    Type: Grant
    Filed: January 8, 2004
    Date of Patent: July 15, 2008
    Assignee: Tru Vue, Inc.
    Inventors: John R. German, Daniel T. Crowley, Brian P. Meinke, Roger L. Peterson
  • Alternating current rotatable sputter cathode
    Publication number: 20040140208
    Abstract: The present invention is an alternating current rotary sputter cathode in a vacuum chamber. The apparatus includes a housing containing a vacuum and a cathode disposed therein. A drive shaft is rotatably mounted in the bearing housing. A rotary vacuum seal is located in the bearing housing for sealing the drive shaft to the housing. An at least one electrical contact is disposed between a power source and the cathode for transmittal of an oscillating or fluctuating current to the cathode. The electrical contact between the power source and the cathode is disposed inside of the vacuum chamber, greatly reducing, and almost eliminating, the current induced heating of various bearing, seals, and other parts of the rotatably sputter cathode assembly.
    Type: Application
    Filed: January 8, 2004
    Publication date: July 22, 2004
    Inventors: John R. German, Daniel T. Crowley, Brian P. Meinke, Roger L. Peterson
  • Alternating current rotatable sputter cathode
    Publication number: 20020189939
    Abstract: The present invention is an alternating current rotary sputter cathode in a vacuum chamber. The apparatus includes a housing containing a vacuum and a cathode disposed therein. A drive shaft is rotatably mounted in the bearing housing. A rotary vacuum seal is located in the bearing housing for sealing the drive shaft to the housing. An at least one electrical contact is disposed between a power source and the cathode for transmittal of an oscillating or fluctuating current to the cathode. The electrical contact between the power source and the cathode is disposed inside of the vacuum chamber, greatly reducing, and almost eliminating, the current induced heating of various bearing, seals, and other parts of the rotatably sputter cathode assembly.
    Type: Application
    Filed: June 14, 2001
    Publication date: December 19, 2002
    Inventors: John R. German, Daniel T. Crowley, Brian P. Meinke, Roger L. Peterson