Abstract: A method for detecting an endpoint of a seasoning process for a plasma tool includes (a) operating the plasma tool to run a seasoning recipe on at least one seasoning wafer before running a monitoring recipe on at least one monitoring wafer; (b) collecting, while running the monitoring recipe on the monitoring wafer, monitoring data associated with the running the monitoring recipe; and (c) generating an estimated product parameter using a virtual metrology (VM) model that is configured to estimate a product parameter using the monitoring data. The VM model is based on production data associated with running a production recipe on production wafers and product parameters of the production wafers measured after the running the production recipe. The endpoint of the seasoning process is obtained by repeating (a), (b) and (c), and the endpoint is obtained when the estimated product parameter stabilizes.

Abstract: A material handling system for use in storing and moving goods within multi-level storage warehouses, ocean going vessels and the like wherein storage areas are provided on at least one of the levels and wherein goods are automatically transferred to and from the storage areas and between the various levels by self-propelled load transfer vehicles. The load transfer vehicles move across the surface of the various levels and are also movable under their own power within open vertical trunks between the levels to thereby move goods to any desired area within the system, warehouse or vessel.

Abstract: A system and method for automated handling, transferring and storing conventional cargo storage containers on a cargo ship wherein the containers are stored in a multi-tier cell system and are manipulated by powered transfer units which are selectively moveable along an intersecting overhead track system such that containers may be simultaneously retrieved from, moved or placed within any of the cells of the ship. The transfer units are equipped both with hoists, which control spreader beams which are selectively secured to the cargo containers, and guide stabilizers, which prevent undesirable movement of the cargo containers when they are elevated above the cell structures such that the containers may be manipulated even during rough sea conditions such that the system is essentially continuously operable as a floating supply distribution system.