Patents by Inventor Brian Roberts Routh, JR.
Brian Roberts Routh, JR. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11069523Abstract: A method and apparatus for material deposition onto a sample to form a protective layer composed of at least two materials that have been formulated and arranged according to the material properties of the sample.Type: GrantFiled: May 21, 2018Date of Patent: July 20, 2021Assignee: FEI CompanyInventors: Brian Roberts Routh, Jr., Thomas G. Miller, Chad Rue, Noel Thomas Franco
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Patent number: 10825651Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.Type: GrantFiled: May 13, 2019Date of Patent: November 3, 2020Assignee: FEI CompanyInventors: Valerie Brogden, Jeffrey Blackwood, Michael Schmidt, Dhruti Trivedi, Richard J. Young, Thomas G. Miller, Brian Roberts Routh, Jr., Stacey Stone, Todd Templeton
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Publication number: 20190272975Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.Type: ApplicationFiled: May 13, 2019Publication date: September 5, 2019Applicant: FEI CompanyInventors: Valerie Brogden, Jeffrey Blackwood, Michael Schmidt, Dhruti Trivedi, Richard J. Young, Thomas G. Miller, Brian Roberts Routh, JR., Stacey Stone, Todd Templeton
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Patent number: 10340119Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.Type: GrantFiled: March 20, 2017Date of Patent: July 2, 2019Assignee: FEI CompanyInventors: Valerie Brogden, Jeffrey Blackwood, Michael Schmidt, Dhruti Trivedi, Richard J. Young, Thomas G. Miller, Brian Roberts Routh, Jr., Stacey Stone, Todd Templeton
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Publication number: 20180277361Abstract: A method and apparatus for material deposition onto a sample to form a protective layer composed of at least two materials that have been formulated and arranged according to the material properties of the sample.Type: ApplicationFiled: May 21, 2018Publication date: September 27, 2018Applicant: FEI CompanyInventors: Brian Roberts Routh, JR., Thomas G. Miller, Chad Rue, Noel Thomas Franco
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Patent number: 10068749Abstract: A method and apparatus for producing thin lamella for TEM observation. The steps of the method are robust and can be used to produce lamella in an automated process. In some embodiments, a protective coating have a sputtering rate matched to the sputtering rate of the work piece is deposited before forming the lamella. In some embodiments, the bottom of the lamella slopes away from the feature of interest, which keeps the lamella stable and reduces movement during thinning. In some embodiments, a fiducial is used to position the beam for the final thinning, instead of using an edge of the lamella. In some embodiments, the tabs are completed after high ion energy final thinning to keep the lamella more stable. In some embodiments, a defocused low ion energy and pattern refresh delay is used for the final cut to reduce deformation of the lamella.Type: GrantFiled: May 21, 2013Date of Patent: September 4, 2018Assignee: FEI CompanyInventors: Scott Edward Fuller, Brian Roberts Routh, Jr., Michael Moriarty
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Patent number: 9978586Abstract: A method and apparatus for material deposition onto a sample to form a protective layer composed of at least two materials that have been formulated and arranged according to the material properties of the sample.Type: GrantFiled: March 31, 2016Date of Patent: May 22, 2018Assignee: FEI CompanyInventors: Brian Roberts Routh, Jr., Thomas G. Miller, Chad Rue, Noel Thomas Franco
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Publication number: 20170256380Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.Type: ApplicationFiled: March 20, 2017Publication date: September 7, 2017Applicant: FEI CompanyInventors: Valerie Brogden, Jeffrey Blackwood, Michael Schmidt, Dhruti Trivedi, Richard J. Young, Thomas G. Miller, Brian Roberts Routh, JR., Stacey Stone, Todd Templeton
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Publication number: 20170133220Abstract: A method and apparatus for material deposition onto a sample to form a protective layer composed of at least two materials that have been formulated and arranged according to the material properties of the sample.Type: ApplicationFiled: March 31, 2016Publication date: May 11, 2017Applicant: FEI CompanyInventors: Brian Roberts Routh, JR., Thomas G. Miller, Chad Rue, Noel Thomas Franco
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Patent number: 9601313Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.Type: GrantFiled: November 6, 2015Date of Patent: March 21, 2017Assignee: FEI COMPANYInventors: Valerie Brogden, Jeffrey Blackwood, Michael Schmidt, Dhruti Trivedi, Richard J. Young, Thomas G. Miller, Brian Roberts Routh, Jr., Stacey Stone, Todd Templeton
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Patent number: 9601312Abstract: A single column charged particle source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the source to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis.Type: GrantFiled: February 24, 2016Date of Patent: March 21, 2017Assignee: FEI COMPANYInventor: Brian Roberts Routh, Jr.
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Publication number: 20160172156Abstract: A single column charged particle source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the source to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis.Type: ApplicationFiled: February 24, 2016Publication date: June 16, 2016Applicant: FEI CompanyInventor: Brian Roberts Routh, JR.
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Publication number: 20160141147Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.Type: ApplicationFiled: November 6, 2015Publication date: May 19, 2016Applicant: FEI CompanyInventors: Valerie Brogden, Jeffrey Blackwood, Michael Schmidt, Dhruti Trivedi, Richard J. Young, Thomas G. Miller, Brian Roberts Routh, JR., Stacey Stone, Todd Templeton
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Patent number: 9281163Abstract: A TEM grid provides posts having steps, the steps increasing the number of samples that can be attached to the grid. In some embodiments, each post includes a one sided stair step configuration. A method of extracting multiple samples includes extracting samples and attaching the samples to the different stair steps on the posts.Type: GrantFiled: April 14, 2014Date of Patent: March 8, 2016Assignee: FEI CompanyInventors: Brian Roberts Routh, Jr., Valerie Brogden, Michael Schmidt
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Patent number: 9275828Abstract: A single column charged particle source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the source to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis.Type: GrantFiled: May 6, 2014Date of Patent: March 1, 2016Assignee: FEI CompanyInventor: Brian Roberts Routh, Jr.
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Publication number: 20150294834Abstract: A TEM grid provides posts having steps, the steps increasing the number of samples that can be attached to the grid. In some embodiments, each post includes a one sided stair step configuration. A method of extracting multiple samples includes extracting samples and attaching the samples to the different stair steps on the posts.Type: ApplicationFiled: April 14, 2014Publication date: October 15, 2015Applicant: FEI CompanyInventors: Brian Roberts Routh, JR., Valerie Brogden, Michael Schmidt
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Publication number: 20140326877Abstract: A single column charged particle source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the source to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis.Type: ApplicationFiled: May 6, 2014Publication date: November 6, 2014Applicant: FEI CompanyInventor: Brian Roberts Routh, JR.
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Patent number: 8766214Abstract: The invention relates to a method of preparing and imaging a sample using a particle-optical apparatus, equipped with an electron column and an ion beam column, a camera system, a manipulator. The method comprises the steps of deriving a first ptychographic image of the sample from a first electron image, thinning the sample, and forming a second ptychographic image of the sample. In an embodiment of the invention the seed image used for the second image is the first ptychographic image. In another embodiment the second ptychographic image is the image of the layer removed during the thinning. In another embodiment the inner potential of the sample is determined and dopant concentrations are determined.Type: GrantFiled: June 17, 2013Date of Patent: July 1, 2014Assignee: FEI CompanyInventors: Brian Roberts Routh, Jr., Peter Christiaan Tiemeijer, Bart Jozef Janssen, Thomas G. Miller, David Foord, Ivan Lazić
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Patent number: 8716673Abstract: A single column inductively coupled plasma source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the ICP to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis.Type: GrantFiled: November 29, 2011Date of Patent: May 6, 2014Assignee: FEI CompanyInventor: Brian Roberts Routh, Jr.
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Publication number: 20140007307Abstract: The invention relates to a method of preparing and imaging a sample using a particle-optical apparatus, equipped with an electron column and an ion beam column, a camera system, a manipulator. The method comprising comprises the steps of deriving a first ptychographic image of the sample from a first electron image, thinning the sample, and forming a second ptychographic image of the sample. In an embodiment of the invention the seed image used for the second image is the first ptychografic image. In another embodiment the second ptychographic image is the image of the layer removed during the thinning. In another embodiment the inner potential of the sample is determined and dopant concentrations are determined.Type: ApplicationFiled: June 17, 2013Publication date: January 2, 2014Inventors: Brian Roberts Routh, JR., Peter Christiaan Tiemeijer, Bart Jozef Janssen, Thomas G. Miller, David Foord, Ivan Lazic