Patents by Inventor Brian S. Thornton

Brian S. Thornton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7593190
    Abstract: A head gimbal assembly includes a slider, a flexure, and a plurality of solder receptacles. The slider has an air-bearing surface and a metallized backside opposite the air bearing surface. The flexure includes a flexure tongue layer at least partially formed of stainless steel. The flexure further includes at least one additional layer over the flexure tongue layer. The plurality of solder receptacles extend through the at least one additional layer to the flexure tongue layer. Solder fills at least one of the solder receptacles and contacts the stainless steel of the flexure tongue layer.
    Type: Grant
    Filed: November 27, 2007
    Date of Patent: September 22, 2009
    Assignee: Western Digital (Fremont), LLC
    Inventors: Brian S. Thornton, Edmund Bruno Fanslau, Jr.
  • Publication number: 20040235398
    Abstract: A method and apparatus for utilizing an optimized polishing pad to increase planarity and reduce defects in CMP processing. The optimized polishing pad includes a polishing surface to remove material from and maintain a uniform polish rate with respect to a wafer surface. The polishing pad has a hardness between 62 and 98 shore A and a tensile modulus between 3,500 and 35,000 psi. A three-stage CMP process utilizes a hard pad, a first optimized pad and a second optimized pad to increase planarity while reducing surface defects.
    Type: Application
    Filed: May 10, 2004
    Publication date: November 25, 2004
    Inventors: Brian S. Thornton, Anil K. Pant
  • Patent number: 6634936
    Abstract: A CMP polishing pad improves overall material removal rate uniformity by combining multiple polishing pad sections in a serially linked manner, where the polishing pad sections are characterized by at least two different material removal rate profiles. The polishing pad is designed by determining a wafer polishing profile for each of a group of polishing pads where each polishing pad has a unique groove configuration, determining a combination of polishing pad segments, each of the segments constructed with one of the unique groove configurations, that will combine to achieve an improved uniformity in the polishing profile, and manufacturing a polishing pad having pad sections corresponding to the analytically determined pad sections.
    Type: Grant
    Filed: May 30, 2001
    Date of Patent: October 21, 2003
    Assignee: Lam Research Corporation
    Inventors: Alan J. Jensen, Brian S. Thornton
  • Patent number: 6585579
    Abstract: A CMP polishing pad improves overall material removal rate uniformity by combining multiple polishing pad sections in a serially linked manner, where the polishing pad sections are characterized by at least two different material removal rate profiles. The polishing pad is designed by determining a wafer polishing profile for each of a group of polishing pads where each polishing pad has a unique groove configuration, determining a combination of polishing pad segments, each of the segments constructed with one of the unique groove configurations, that will combine to achieve an improved uniformity in the polishing profile, and manufacturing a polishing pad having pad sections corresponding to the analytically determined pad sections.
    Type: Grant
    Filed: July 13, 2001
    Date of Patent: July 1, 2003
    Assignee: Lam Research Corporation
    Inventors: Alan J. Jensen, Brian S. Thornton
  • Patent number: 6554201
    Abstract: A method for producing an aerosol generator utilizes a vibratable member having a plurality of apertures for producing liquid droplets upon vibration of the vibratable member. A support member is injection molded about the vibratable member, and a vibratable element is placed in vibrational communication with the vibratable member.
    Type: Grant
    Filed: May 2, 2001
    Date of Patent: April 29, 2003
    Assignee: Aerogen, Inc.
    Inventors: Michael A. Klimowicz, Brian S. Thornton
  • Publication number: 20020162898
    Abstract: A method for producing an aerosol generator utilizes a vibratable member having a plurality of apertures for producing liquid droplets upon vibration of the vibratable member. A support member is injection molded about the vibratable member, and a vibratable element is placed in vibrational communication with the vibratable member.
    Type: Application
    Filed: May 2, 2001
    Publication date: November 7, 2002
    Inventors: Michael A. Klimowicz, Brian S. Thornton
  • Publication number: 20020028646
    Abstract: A CMP polishing pad improves overall material removal rate uniformity by combining multiple polishing pad sections in a serially linked manner, where the polishing pad sections are characterized by at least two different material removal rate profiles. The polishing pad is designed by determining a wafer polishing profile for each of a group of polishing pads where each polishing pad has a unique groove configuration, determining a combination of polishing pad segments, each of the segments constructed with one of the unique groove configurations, that will combine to achieve an improved uniformity in the polishing profile, and manufacturing a polishing pad having pad sections corresponding to the analytically determined pad sections.
    Type: Application
    Filed: July 13, 2001
    Publication date: March 7, 2002
    Applicant: Lam Research Corporation.
    Inventors: Alan J. Jensen, Brian S. Thornton
  • Publication number: 20010031615
    Abstract: A CMP polishing pad improves overall material removal rate uniformity by combining multiple polishing pad sections in a serially linked manner, where the polishing pad sections are characterized by at least two different material removal rate profiles. The polishing pad is designed by determining a wafer polishing profile for each of a group of polishing pads where each polishing pad has a unique groove configuration, determining a combination of polishing pad segments, each of the segments constructed with one of the unique groove configurations, that will combine to achieve an improved uniformity in the polishing profile, and manufacturing a polishing pad having pad sections corresponding to the analytically determined pad sections.
    Type: Application
    Filed: May 30, 2001
    Publication date: October 18, 2001
    Applicant: Lam Research Corporation
    Inventors: Alan J. Jensen, Brian S. Thornton
  • Patent number: 6261168
    Abstract: A CMP polishing pad improves overall material removal rate uniformity by combining multiple polishing pad sections in a serially linked manner, where the polishing pad sections are characterized by at least two different material removal rate profiles. The polishing pad is designed by determining a wafer polishing profile for each of a group of polishing pads where each polishing pad has a unique groove configuration, determining a combination of polishing pad segments, each of the segments constructed with one of the unique groove configurations, that will combine to achieve an improved uniformity in the polishing profile, and manufacturing a polishing pad having pad sections corresponding to the analytically determined pad sections.
    Type: Grant
    Filed: May 21, 1999
    Date of Patent: July 17, 2001
    Assignee: Lam Research Corporation
    Inventors: Alan J. Jensen, Brian S. Thornton