Patents by Inventor Brian Severson

Brian Severson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12165303
    Abstract: A computer-based method for evaluating progressive damage in a metal test component includes providing Computed Tomography (CT) image data of the component to a processor and processing the CT image data via the processor, including detecting observable defects in the component. The method also includes characterizing the observable defects into corresponding defect categories, generating a data table of the observable defects and the corresponding defect categories, and embedding a collective set of data from the data table into a finite element model (FEM) of the component to thereby construct a modified FEM of the metal test component. Additionally, the method includes analyzing the modified FEM through an isotropic and/or anisotropic structural model, via the processor, to thereby generate a set of test results. A quality control action is then executed with respect to the metal test component based on the test results.
    Type: Grant
    Filed: May 23, 2022
    Date of Patent: December 10, 2024
    Assignee: The Boeing Company
    Inventors: Bryan Lilley, Brittan A. Farmer, Troy Winfree, Yadan Wu, Brian P. Justusson, Jordan A. Severson
  • Patent number: 11342163
    Abstract: A method of operating a substrate support includes arranging a substrate on an inner portion of the substrate support and calculating a desired pocket depth of the substrate support using data indicative of a relationship between the desired pocket depth and at least one process parameter. The desired pocket depth corresponds to a desired distance between an upper surface of an edge ring surrounding the inner portion and an upper surface of the substrate. The method further includes selectively controlling, based on the desired pocket depth as calculated, an actuator to raise and lower at least one of the edge ring and the inner portion to adjust the distance between the upper surface of the edge ring and the upper surface of the substrate.
    Type: Grant
    Filed: May 11, 2020
    Date of Patent: May 24, 2022
    Assignee: Lam Research Corporation
    Inventors: Ivelin Angelov, Cristian Siladie, Dean Larson, Brian Severson
  • Publication number: 20200273671
    Abstract: A method of operating a substrate support includes arranging a substrate on an inner portion of the substrate support and calculating a desired pocket depth of the substrate support using data indicative of a relationship between the desired pocket depth and at least one process parameter. The desired pocket depth corresponds to a desired distance between an upper surface of an edge ring surrounding the inner portion and an upper surface of the substrate. The method further includes selectively controlling, based on the desired pocket depth as calculated, an actuator to raise and lower at least one of the edge ring and the inner portion to adjust the distance between the upper surface of the edge ring and the upper surface of the substrate.
    Type: Application
    Filed: May 11, 2020
    Publication date: August 27, 2020
    Inventors: Ivelin ANGELOV, Cristian Siladie, Dean Larson, Brian Severson
  • Patent number: 10651015
    Abstract: A substrate support includes an inner portion arranged to support a substrate, an edge ring surrounding the inner portion, and a controller that calculates a desired pocket depth of the substrate support. Pocket depth corresponds to a distance between an upper surface of the edge ring and an upper surface of the substrate. Based on the desired pocket depth, the controller selectively controls an actuator to raise and lower at least one of the edge ring and the inner portion to adjust the distance between the upper surface of the edge ring and the upper surface of the substrate.
    Type: Grant
    Filed: February 2, 2017
    Date of Patent: May 12, 2020
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Ivelin Angelov, Cristian Siladie, Dean Larson, Brian Severson
  • Patent number: 10438833
    Abstract: A substrate support includes an inner portion arranged to support a substrate, a lift ring surrounding the inner portion, the lift ring arranged to support an outer edge of the substrate, and a controller configured to control an actuator to adjust a height of the lift ring relative to the inner portion by selectively raising and lowering at least one of the lift ring and the inner portion of the substrate support. To adjust the height of the lift ring, the controller selectively adjusts the height of the lift ring to a transfer height for transfer of the substrate to the lift ring and retrieval of the substrate from the lift ring, and adjusts the height of the lift ring to a processing height for processing of the substrate.
    Type: Grant
    Filed: February 8, 2017
    Date of Patent: October 8, 2019
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Brian Severson, Ivelin Angelov, James Eugene Caron
  • Publication number: 20170236743
    Abstract: A substrate support includes an inner portion arranged to support a substrate, a lift ring surrounding the inner portion, the lift ring arranged to support an outer edge of the substrate, and a controller configured to control an actuator to adjust a height of the lift ring relative to the inner portion by selectively raising and lowering at least one of the lift ring and the inner portion of the substrate support. To adjust the height of the lift ring, the controller selectively adjusts the height of the lift ring to a transfer height for transfer of the substrate to the lift ring and retrieval of the substrate from the lift ring, and adjusts the height of the lift ring to a processing height for processing of the substrate.
    Type: Application
    Filed: February 8, 2017
    Publication date: August 17, 2017
    Inventors: Brian Severson, Ivelin Angelov, James Eugene Caron
  • Publication number: 20170236741
    Abstract: A substrate support includes an inner portion arranged to support a substrate, an edge ring surrounding the inner portion, and a controller that calculates a desired pocket depth of the substrate support. Pocket depth corresponds to a distance between an upper surface of the edge ring and an upper surface of the substrate. Based on the desired pocket depth, the controller selectively controls an actuator to raise and lower at least one of the edge ring and the inner portion to adjust the distance between the upper surface of the edge ring and the upper surface of the substrate.
    Type: Application
    Filed: February 2, 2017
    Publication date: August 17, 2017
    Inventors: Ivelin Angelov, Cristian Siladie, Dean Larson, Brian Severson
  • Patent number: 8851463
    Abstract: Examples of novel semiconductor processing pedestals, and apparatuses including such pedestals, are described. These pedestals are specifically configured to provide uniform heat transfer to semiconductor substrates and to reduce maintenance complexity and/or frequency. Specifically, a pedestal may include a removable cover positioned over a metal platen of the pedestal. The removable cover is configured to maintain a consistent and uniform temperature profile of its substrate-facing surface even though the platen's upper-surface, which supports the cover and is in thermal communication with the cover, may have a much less uniform temperature profile. The cover may be made from certain ceramic materials and shaped as a thin plate. These materials are resistant to the processing environments and maintain their thermal characteristics over many processing cycles. The cover can be easily removed from the platen and replaced with a new one without a need for major disassembly of the entire apparatus.
    Type: Grant
    Filed: January 8, 2013
    Date of Patent: October 7, 2014
    Assignee: Novellus Systems, Inc.
    Inventors: Ivelin Angelov, Brian Severson, Natan Solomon
  • Publication number: 20130122431
    Abstract: Examples of novel semiconductor processing pedestals, and apparatuses including such pedestals, are described. These pedestals are specifically configured to provide uniform heat transfer to semiconductor substrates and to reduce maintenance complexity and/or frequency. Specifically, a pedestal may include a removable cover positioned over a metal platen of the pedestal. The removable cover is configured to maintain a consistent and uniform temperature profile of its substrate-facing surface even though the platen's upper-surface, which supports the cover and is in thermal communication with the cover, may have a much less uniform temperature profile. The cover may be made from certain ceramic materials and shaped as a thin plate. These materials are resistant to the processing environments and maintain their thermal characteristics over many processing cycles. The cover can be easily removed from the platen and replaced with a new one without a need for major disassembly of the entire apparatus.
    Type: Application
    Filed: January 8, 2013
    Publication date: May 16, 2013
    Inventors: Ivelin Angelov, Brian Severson, Natan Solomon
  • Patent number: 8371567
    Abstract: Examples of novel semiconductor processing pedestals, and apparatuses including such pedestals, are described. These pedestals are specifically configured to provide uniform heat transfer to semiconductor substrates and to reduce maintenance complexity and/or frequency. Specifically, a pedestal may include a removable cover positioned over a metal platen of the pedestal. The removable cover is configured to maintain a consistent and uniform temperature profile of its substrate-facing surface even though the platen's upper-surface, which supports the cover and is in thermal communication with the cover, may have a much less uniform temperature profile. The cover may be made from certain ceramic materials and shaped as a thin plate. These materials are resistant to the processing environments and maintain their thermal characteristics over many processing cycles. The cover can be easily removed from the platen and replaced with a new one without a need for major disassembly of the entire apparatus.
    Type: Grant
    Filed: April 13, 2011
    Date of Patent: February 12, 2013
    Assignee: Novellus Systems, Inc.
    Inventors: Ivelin Angelov, Brian Severson, Natan Solomon
  • Publication number: 20120264051
    Abstract: Examples of novel semiconductor processing pedestals, and apparatuses including such pedestals, are described. These pedestals are specifically configured to provide uniform heat transfer to semiconductor substrates and to reduce maintenance complexity and/or frequency. Specifically, a pedestal may include a removable cover positioned over a metal platen of the pedestal. The removable cover is configured to maintain a consistent and uniform temperature profile of its substrate-facing surface even though the platen's upper-surface, which supports the cover and is in thermal communication with the cover, may have a much less uniform temperature profile. The cover may be made from certain ceramic materials and shaped as a thin plate. These materials are resistant to the processing environments and maintain their thermal characteristics over many processing cycles. The cover can be easily removed from the platen and replaced with a new one without a need for major disassembly of the entire apparatus.
    Type: Application
    Filed: April 13, 2011
    Publication date: October 18, 2012
    Applicant: NOVELLUS SYSTEMS, INC.
    Inventors: Ivelin Angelov, Brian Severson, Natan Solomon
  • Publication number: 20100120335
    Abstract: The partial contact wafer retaining ring apparatus is disclosed. For example, one disclosed embodiment provides a wafer retaining ring comprising a ring for retaining the wafer, the ring having an inner diameter surface configured to restrict lateral wafer motion, and at least one interface surface configured to interface with a polishing surface. The interface surface comprises a recessed section adjacent to the ring inner diameter, configured to preclude contact between the recessed section and the polishing surface.
    Type: Application
    Filed: November 7, 2008
    Publication date: May 13, 2010
    Applicant: NOVELLUS SYSTEMS, INC.
    Inventors: Haoquan Fang, Ivelin Angelov, Brian Severson, Benjamin A. Bonner, Serge Kosche, Patrick J. Lord, Brian J. Brown
  • Patent number: 7632170
    Abstract: Chemical mechanical planarization apparatuses with polishing assemblies that provide for the passive removal of slurry are provided. In accordance with an embodiment, a work piece polishing assembly comprises a polishing pad comprising a polishing surface and an exhaust aperture that extends through the polishing pad from the polishing surface and is configured to receive a slurry from the polishing surface. An underlying member is disposed underlying the polishing pad and comprises a peripheral surface. The underlying member comprises a channel that is in fluid communication with the aperture and that opens at the peripheral surface of the underlying member.
    Type: Grant
    Filed: June 25, 2007
    Date of Patent: December 15, 2009
    Assignee: Novellus Systems, Inc.
    Inventors: Fergal O'Moore, Steve Schultz, Brian Severson
  • Publication number: 20080318495
    Abstract: Chemical mechanical planarization apparatuses with polishing assemblies that provide for the passive removal of slurry are provided. In accordance with an embodiment, a work piece polishing assembly comprises a polishing pad comprising a polishing surface and an exhaust aperture that extends through the polishing pad from the polishing surface and is configured to receive a slurry from the polishing surface. An underlying member is disposed underlying the polishing pad and comprises a peripheral surface. The underlying member comprises a channel that is in fluid communication with the aperture and that opens at the peripheral surface of the underlying member.
    Type: Application
    Filed: June 25, 2007
    Publication date: December 25, 2008
    Applicant: NOVELLUS SYSTEMS, INC.
    Inventors: Fergal O'Moore, Steve Schultz, Brian Severson
  • Patent number: 7402098
    Abstract: An edge control system for deployment on a CMP carrier head comprising a bladder and a carrier head housing having a passage extending therethrough. The bladder includes a flexible diaphragm and is coupled to the carrier head housing. The edge control system comprises first and second annular ribs, each of which comprises a first end portion sealingly coupled to the carrier head housing, a second end portion coupled to the diaphragm, and a strain relief member substantially intermediate the first end portion and the second end portion. A plenum is substantially defined by the first and second annular ribs and the carrier head housing. The passage is fluidly coupled to the plenum to permit the pressurization of the plenum, and the strain relief member promotes the extension of the first and second annular ribs away from the carrier head housing when the plenum is pressurized.
    Type: Grant
    Filed: October 27, 2006
    Date of Patent: July 22, 2008
    Assignee: Novellus Systems, Inc.
    Inventors: Brian Severson, John Stumpf, Stephen C. Schultz
  • Publication number: 20080102732
    Abstract: An edge control system for deployment on a CMP carrier head comprising a bladder and a carrier head housing having a passage extending therethrough. The bladder includes a flexible diaphragm and is coupled to the carrier head housing. The edge control system comprises first and second annular ribs, each of which comprises a first end portion sealingly coupled to the carrier head housing, a second end portion coupled to the diaphragm, and a strain relief member substantially intermediate the first end portion and the second end portion. A plenum is substantially defined by the first and second annular ribs and the carrier head housing. The passage is fluidly coupled to the plenum to permit the pressurization of the plenum, and the strain relief member promotes the extension of the first and second annular ribs away from the carrier head housing when the plenum is pressurized.
    Type: Application
    Filed: October 27, 2006
    Publication date: May 1, 2008
    Applicant: NOVELLUS SYSTEMS, INC.
    Inventors: Brian Severson, John Stumpf, Stephen C. Schultz
  • Patent number: 7335092
    Abstract: A carrier head for supporting a workpiece is provided. The carrier head comprises a mount plate having an aperture therethrough, and a clamp ring having a foot portion and a first leg portion extending therefrom. The first leg portion extends through the aperture, and the foot portion abuts the mount plate proximate the aperture. A flexible bladder has first and second ribs that are received between the mount plate and the foot portion. An annular fastener is removably coupled to the leg portion, and engages the mount plate to cause the first and second ribs to be sealingly secured between the mount plate and the foot portion.
    Type: Grant
    Filed: October 27, 2006
    Date of Patent: February 26, 2008
    Assignee: Novellus Systems, Inc.
    Inventors: Brian Severson, John Stumpf, Stephen C. Schultz
  • Patent number: 7229339
    Abstract: Methods and apparatus are provided for the chemical mechanical planarization (CMP) of a surface of a work piece. In accordance with one embodiment of the invention the apparatus comprises a plurality of CMP systems, a plurality of load cups for loading unprocessed work pieces into and unloading processed work pieces from the plurality of CMP systems, a plurality of cleaning stations for cleaning processed work pieces unloaded from the CMP systems, and a single robot configured to transfer unprocessed work pieces to the plurality of load cups and to transfer processed work pieces from the load cups to the plurality of cleaning stations.
    Type: Grant
    Filed: July 2, 2004
    Date of Patent: June 12, 2007
    Assignee: Novellus Systems, Inc.
    Inventors: John F. Stumpf, Franklin D. Root, Brian Severson, David Marquardt, John Derwood Herb, James Jed Crawford, Rand Conner, Jasent Montano, Kevin Bertsch, Robert Marshall Stowell, Edmund Minshall, Timothy Cleary
  • Publication number: 20060003671
    Abstract: Methods and apparatus are provided for the chemical mechanical planarization (CMP) of a surface of a work piece. In accordance with one embodiment of the invention the apparatus comprises a plurality of CMP systems, a plurality of load cups for loading unprocessed work pieces into and unloading processed work pieces from the plurality of CMP systems, a plurality of cleaning stations for cleaning processed work pieces unloaded from the CMP systems, and a single robot configured to transfer unprocessed work pieces to the plurality of load cups and to transfer processed work pieces from the load cups to the plurality of cleaning stations.
    Type: Application
    Filed: July 2, 2004
    Publication date: January 5, 2006
    Inventors: John Stumpf, Franklin Root, Brian Severson, David Marquardt, John Herb, James Crawford, Rand Conner, Jasent Montano, Kevin Bertsch, Robert Stowell, Edmund Minshall, Timothy Cleary
  • Patent number: D671901
    Type: Grant
    Filed: April 13, 2011
    Date of Patent: December 4, 2012
    Assignee: Novellus Systems, Inc.
    Inventors: Ivelin Angelov, Brian Severson, Natan Solomon