Patents by Inventor Brian Shekerjian

Brian Shekerjian has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermal cycle resistant seal and method of sealing for use with semiconductor wafer processing apparatus
    Patent number: 5575856
    Abstract: A semi conductor wafer processing apparatus has a wafer supporting susceptor having a sealing surface, a susceptor drive shaft for connection to the susceptor also having a sealing surface, a seal disposed between the susceptor and drive shaft sealing surfaces having a rigid metallic core and a ductile metallic coating on the core, and fasteners connecting the susceptor to the drive shaft and compressing the seal between the susceptor and drive shaft sealing surfaces. The seal retains sealing capability upon being subjected to changes in temperature.
    Type: Grant
    Filed: May 11, 1994
    Date of Patent: November 19, 1996
    Assignees: Sony Corporation, Materials Research Corporation
    Inventors: Robert F. Foster, Brian Shekerjian, Joseph T. Hillman