Patents by Inventor Brian T. Helenbrook

Brian T. Helenbrook has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10106911
    Abstract: An apparatus for growing a silicon crystal substrate comprising a heat source, an anisotropic thermal load leveling component, a crucible, and a cold plate component is disclosed. The anisotropic thermal load leveling component possesses a high thermal conductivity and may be positioned atop the heat source to be operative to even-out temperature and heat flux variations emanating from the heat source. The crucible may be operative to contain molten silicon in which the top surface of the molten silicon may be defined as a growth interface. The crucible may be substantially surrounded by the anisotropic thermal load leveling component. The cold plate component may be positioned above the crucible to be operative with the anisotropic thermal load leveling component and heat source to maintain a uniform heat flux at the growth surface of the molten silicon.
    Type: Grant
    Filed: October 4, 2016
    Date of Patent: October 23, 2018
    Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Frederick M. Carlson, Brian T. Helenbrook
  • Publication number: 20170037535
    Abstract: An apparatus for growing a silicon crystal substrate comprising a heat source, an anisotropic thermal load leveling component, a crucible, and a cold plate component is disclosed. The anisotropic thermal load leveling component possesses a high thermal conductivity and may be positioned atop the heat source to be operative to even-out temperature and heat flux variations emanating from the heat source. The crucible may be operative to contain molten silicon in which the top surface of the molten silicon may be defined as a growth interface. The crucible may be substantially surrounded by the anisotropic thermal load leveling component. The cold plate component may be positioned above the crucible to be operative with the anisotropic thermal load leveling component and heat source to maintain a uniform heat flux at the growth surface of the molten silicon.
    Type: Application
    Filed: October 4, 2016
    Publication date: February 9, 2017
    Inventors: Frederick M. Carlson, Brian T. Helenbrook
  • Patent number: 9464364
    Abstract: An apparatus for growing a silicon crystal substrate comprising a heat source, an anisotropic thermal load leveling component, a crucible, and a cold plate component is disclosed. The anisotropic thermal load leveling component possesses a high thermal conductivity and may be positioned atop the heat source to be operative to even-out temperature and heat flux variations emanating from the heat source. The crucible may be operative to contain molten silicon in which the top surface of the molten silicon may be defined as a growth interface. The crucible may be substantially surrounded by the anisotropic thermal load leveling component. The cold plate component may be positioned above the crucible to be operative with the anisotropic thermal load leveling component and heat source to maintain a uniform heat flux at the growth surface of the molten silicon.
    Type: Grant
    Filed: November 9, 2011
    Date of Patent: October 11, 2016
    Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Frederick M. Carlson, Brian T. Helenbrook
  • Patent number: 8539408
    Abstract: The invention of novel methods is described for efficient and accurate thermal simulation of a structure that can be primarily constructed using building blocks. These structures may include, but not limited to, semiconductor chips, photovoltaic/solar panels, battery packs, etc. The methods are formulated in hierarchical function spaces, rather than the physical space and provide three-dimensional (3D) steady-state and transient temperature profiles of the structure, which are as detailed as full-scale numerical simulation, using substantially less computational degrees-of-freedom (DOF). The number of DOF required is comparable to that of lumped thermal models, yet no ad-hoc modeling assumptions related to geometry, dimensions, temperature profiles, or heat flow paths are required. The methods can be applied to evaluate temperature profiles at different levels of granularity.
    Type: Grant
    Filed: July 29, 2009
    Date of Patent: September 17, 2013
    Assignee: Clarkson University
    Inventors: Ming-Cheng Cheng, Brian T. Helenbrook
  • Publication number: 20130112135
    Abstract: An apparatus for growing a silicon crystal substrate comprising a heat source, an anisotropic thermal load leveling component, a crucible, and a cold plate component is disclosed. The anisotropic thermal load leveling component possesses a high thermal conductivity and may be positioned atop the heat source to be operative to even-out temperature and heat flux variations emanating from the heat source. The crucible may be operative to contain molten silicon in which the top surface of the molten silicon may be defined as a growth interface. The crucible may be substantially surrounded by the anisotropic thermal load leveling component. The cold plate component may be positioned above the crucible to be operative with the anisotropic thermal load leveling component and heat source to maintain a uniform heat flux at the growth surface of the molten silicon.
    Type: Application
    Filed: November 9, 2011
    Publication date: May 9, 2013
    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Frederick M. Carlson, Brian T. Helenbrook