Patents by Inventor Brian Wiseman

Brian Wiseman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12326659
    Abstract: Reticle containers include a magnetic latch to close the container and clamp the reticle contained within. The magnetic latch includes at least one magnet and another ferromagnetic material, which can be either another magnet or a magnetically attractable material. At least one of the magnets and the other ferromagnetic material can be manipulated to secure or open the container. The manipulation can include at least one of sliding of a housing, rotation of a magnet, or application of an external magnetic field to change the attraction of the magnet and the other ferromagnetic material.
    Type: Grant
    Filed: April 7, 2023
    Date of Patent: June 10, 2025
    Assignee: ENTEGRIS, INC.
    Inventors: Huaping Wang, Russ V. Raschke, Caleb Elwell, Matthew Reber, Brian Wiseman
  • Publication number: 20250180982
    Abstract: Reticle containers include a rotating latch including a spring. The spring provides force bringing the segments of the reticle container towards one another such that a reticle in the container is clamped between the container segments. The rotating latch can include a head as part of an assembly on one of a cover or a baseplate of the reticle container, with a slot configured to accommodate the head provided on the other of the cover or baseplate. The head can be disposed at an end of a shaft, with the shaft connected to a base, which is contacted by spring providing force such that the contact of the head with the other of the cover or baseplate provides clamping force to a reticle stored between the cover and baseplate.
    Type: Application
    Filed: February 11, 2025
    Publication date: June 5, 2025
    Inventors: Russ V. Raschke, Brian Wiseman, Matthew Reber
  • Patent number: 12276924
    Abstract: Reticle pods include inner pods where motion limiting features restrict translational motion of the cover and the baseplate relative to one another. The motion limiting features are in addition to gross alignment features included in the inner pod. The motion limiting features resist the translational motion before the gross alignment features would resist the motion. Motion limiting features can include elastic bodies providing friction against contact surfaces, or pins received on elastic contact surfaces or in diaphragms or motion limiting cups.
    Type: Grant
    Filed: May 15, 2024
    Date of Patent: April 15, 2025
    Assignee: ENTEGRIS, INC.
    Inventors: Russ V. Raschke, Brian Wiseman
  • Publication number: 20250108972
    Abstract: A substrate container is provided including an inner pod configured to accommodate a large format reticle, and an outer pod configured to contain and secure the inner pod. The inner pod can be clamped together using a clip or features provided on the outer pod. Features of the outer pod that can clamp the inner pod include flanges, grooves, angled clamping surfaces, other clamping features, or clamping mechanisms. Clamping mechanisms can be actuated by physical, electrical, and/or magnetic features, such as placement of a door in an opening of a shell, operation of a door latch, or interaction of a tool to release the clamping mechanism using mechanical, electrical, and/or magnetic force.
    Type: Application
    Filed: September 27, 2024
    Publication date: April 3, 2025
    Inventors: Huaping Wang, Anthony M. Tieben, Russ V. Raschke, Brian Wiseman, Tyler Monforton
  • Patent number: 12253798
    Abstract: Reticle containers include a rotating latch including a spring. The spring provides force bringing the segments of the reticle container towards one another such that a reticle in the container is clamped between the container segments. The rotating latch can include a head as part of an assembly on one of a cover or a baseplate of the reticle container, with a slot configured to accommodate the head provided on the other of the cover or baseplate. The head can be disposed at an end of a shaft, with the shaft connected to a base, which is contacted by spring providing force such that the contact of the head with the other of the cover or baseplate provides clamping force to a reticle stored between the cover and baseplate.
    Type: Grant
    Filed: April 10, 2023
    Date of Patent: March 18, 2025
    Assignee: ENTEGRIS, INC.
    Inventors: Russ V. Raschke, Brian Wiseman, Matthew Reber
  • Publication number: 20250028239
    Abstract: Described are baseplate devices used to support, transport, and process a reticle, including to support a reticle during a step of detecting particle contamination at a surface of the reticle prior to using the reticle in an extreme ultraviolet (EUV) lithography process.
    Type: Application
    Filed: June 4, 2024
    Publication date: January 23, 2025
    Inventors: Huaping Wang, Russ V. Raschke, Brian Wiseman
  • Patent number: 12140860
    Abstract: A door of a reticle pod includes a window having a lens, sidewall, and a ledge. The window may be positioned or affixed internally in a door between the housing and a cover. A compressive seal may be used in conjunction with the window. The sidewalls, the ledge and the compressive seal work together to enable a compression fit in the door while maintained the desired level of protection from external contaminants.
    Type: Grant
    Filed: October 8, 2020
    Date of Patent: November 12, 2024
    Assignee: ENTEGRIS, INC.
    Inventors: Shawn D. Eggum, Anthony M. Tieben, Brian Wiseman, Russ V. Raschke, Huaping Wang
  • Publication number: 20240302757
    Abstract: Reticle pods include inner pods where motion limiting features restrict translational motion of the cover and the baseplate relative to one another. The motion limiting features are in addition to gross alignment features included in the inner pod. The motion limiting features resist the translational motion before the gross alignment features would resist the motion. Motion limiting features can include elastic bodies providing friction against contact surfaces, or pins received on elastic contact surfaces or in diaphragms or motion limiting cups.
    Type: Application
    Filed: May 15, 2024
    Publication date: September 12, 2024
    Inventors: Russ V. Raschke, Brian Wiseman
  • Patent number: 12013648
    Abstract: Reticle pods include inner pods where motion limiting features restrict translational motion of the cover and the baseplate relative to one another. The motion limiting features are in addition to gross alignment features included in the inner pod. The motion limiting features resist the translational motion before the gross alignment features would resist the motion. Motion limiting features can include elastic bodies providing friction against contact surfaces, or pins received on elastic contact surfaces or in diaphragms or motion limiting cups.
    Type: Grant
    Filed: November 7, 2022
    Date of Patent: June 18, 2024
    Assignee: ENTEGRIS, INC.
    Inventors: Russ V. Raschke, Brian Wiseman
  • Publication number: 20240160098
    Abstract: A reticle container includes an outer pod and an inner pod, the inner pod configured to contain a reticle. The outer pod includes a pod door including a purge port, and a pod dome including one or more channels configured to receive a purge gas from the purge port and direct the purge gas to particular locations within the outer pod. The channels can direct the purge gas to one or more filters of the inner pod. The channels can direct the purge gas such that there is a pressure differential between the pressure at a first filter and the pressure at the second filter. The inner pod can include deflectors or channels to further direct the purge flow through the inner pod to purge the area surrounding the reticle.
    Type: Application
    Filed: November 3, 2023
    Publication date: May 16, 2024
    Inventors: Russ V. Raschke, Brian Wiseman
  • Publication number: 20240096670
    Abstract: A spacer for parts of a reticle pod includes spacer contacts configured to contact alignment features of a cover and a baseplate of the reticle pod such that the cover and baseplate are separated by a gap. The spacer includes a frame connecting at least two of the spacer contacts. The frame can include a spring arm allowing deformation such that the spacer contacts can be moved relative to one another to facilitate interfacing with the alignment features. The spacer contacts can be configured to surround pins included in the alignment features. The spacer contacts can be configured to be inserted into lead-in portions of channels included in the alignment features.
    Type: Application
    Filed: September 20, 2023
    Publication date: March 21, 2024
    Inventors: Brian Wiseman, Russ V. Raschke, Paul J. Magoon, Huaping Wang
  • Publication number: 20240061326
    Abstract: Reticle containers include a cover and a baseplate having contact surfaces configured to contact one another when the reticle container is assembled. Relief areas are provided adjacent to at least one of the contact surfaces. The relief areas are such that plating provided on in those relief areas do not contact the other of the cover or the baseplate when the reticle container is assembled. The relief areas can include structures such as beveled regions, depressions, and radiused regions. The relief areas can optionally further serve as a robber during an electroplating process.
    Type: Application
    Filed: August 11, 2023
    Publication date: February 22, 2024
    Inventors: Russ V. Raschke, Caleb Elwell, Brian Wiseman
  • Publication number: 20230418152
    Abstract: Spacers include a base configured to be placed within depressions of one of a cover or a baseplate of a reticle pod, and a contact surface configured to contact the other of the cover and the baseplate. The spacers are configured to space the cover and the baseplate apart from one another such that sealing surfaces of the cover and the baseplate are separated by a gap. The depressions can be gripper pockets of the baseplate. Multiple spacers can be used in a reticle pod to provide the gap between sealing surfaces. The spacers can be installed to prepare a reticle pod for shipment.
    Type: Application
    Filed: June 20, 2023
    Publication date: December 28, 2023
    Inventors: Russ V. Raschke, Brian Wiseman, Paul J. Magoon, Huaping Wang
  • Publication number: 20230333463
    Abstract: Reticle containers include a magnetic latch to close the container and clamp the reticle contained within. The magnetic latch includes at least one magnet and another ferromagnetic material, which can be either another magnet or a magnetically attractable material. At least one of the magnets and the other ferromagnetic material can be manipulated to secure or open the container. The manipulation can include at least one of sliding of a housing, rotation of a magnet, or application of an external magnetic field to change the attraction of the magnet and the other ferromagnetic material.
    Type: Application
    Filed: April 7, 2023
    Publication date: October 19, 2023
    Inventors: Huaping Wang, Russ V. Raschke, Caleb Elwell, Matthew Reber, Brian Wiseman
  • Publication number: 20230333464
    Abstract: Reticle containers include a rotating latch including a spring. The spring provides force bringing the segments of the reticle container towards one another such that a reticle in the container is clamped between the container segments. The rotating latch can include a head as part of an assembly on one of a cover or a baseplate of the reticle container, with a slot configured to accommodate the head provided on the other of the cover or baseplate. The head can be disposed at an end of a shaft, with the shaft connected to a base, which is contacted by spring providing force such that the contact of the head with the other of the cover or baseplate provides clamping force to a reticle stored between the cover and baseplate.
    Type: Application
    Filed: April 10, 2023
    Publication date: October 19, 2023
    Inventors: Russ V. Raschke, Brian Wiseman, Matthew Reber
  • Publication number: 20230148165
    Abstract: Reticle pods include inner pods where motion limiting features restrict translational motion of the cover and the baseplate relative to one another. The motion limiting features are in addition to gross alignment features included in the inner pod. The motion limiting features resist the translational motion before the gross alignment features would resist the motion. Motion limiting features can include elastic bodies providing friction against contact surfaces, or pins received on elastic contact surfaces or in diaphragms or motion limiting cups.
    Type: Application
    Filed: November 7, 2022
    Publication date: May 11, 2023
    Inventors: Russ V. Raschke, Brian Wiseman
  • Publication number: 20210109439
    Abstract: A door of a reticle pod includes a window having a lens, sidewall, and a ledge. The window may be positioned or affixed internally in a door between the housing and a cover. A compressive seal may be used in conjunction with the window. The sidewalls, the ledge and the compressive seal work together to enable a compression fit in the door while maintained the desired level of protection from external contaminants.
    Type: Application
    Filed: October 8, 2020
    Publication date: April 15, 2021
    Inventors: Shawn D. EGGUM, Anthony M. TIEBEN, Brian WISEMAN, Russ V. RASCHKE, Huaping WANG
  • Publication number: 20200144086
    Abstract: A container for supporting a workpiece, the workpiece including a chamfer around upper and lower edges of the workpiece is disclosed. The container includes a door and a shell capable of coupling with the door to define an isolated environment within the container. The container includes a workpiece support mounted to the door. The workpiece support includes a support post. The support post is configured to support a workpiece at a corner of the workpiece. The support post includes a first sloping wall. A second sloping wall is at a bottom of the first sloping wall. The second sloping side wall is configured to support a workpiece. The first sloping wall and the second sloping wall are oriented with different non-zero slopes.
    Type: Application
    Filed: October 8, 2019
    Publication date: May 7, 2020
    Inventors: Anthony Mathius TIEBEN, Shawn Daniel EGGUM, Russ V. RASCHKE, Brian WISEMAN, Huaping WANG
  • Patent number: 8528738
    Abstract: A container for holding a plurality of substrates includes an enclosure portion defining an interior space. The enclosure has a pluralit of slots for receiving the substrates, and a door (26) for sealingly closing an open side A cushion (62) is received on the door.
    Type: Grant
    Filed: June 12, 2007
    Date of Patent: September 10, 2013
    Assignee: Entegris, Inc.
    Inventor: Brian Wiseman
  • Patent number: D1066292
    Type: Grant
    Filed: September 15, 2022
    Date of Patent: March 11, 2025
    Assignee: ENTEGRIS, INC.
    Inventors: Brian Wiseman, Russ V. Raschke, Paul J. Magoon, Huaping Wang