Abstract: A support pedestal includes a support member including a resistive layer having a plurality of zones, a routing layer, and a plurality of conductive vias. The plurality of zones are defined by a plurality of independently controllable resistive heating elements. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of conductive vias.

Abstract: A heater system is provided. The system includes a resistive element with a temperature coefficient of resistance (TCR) of at least about 1,000 ppm such that the resistive element functions as a heater and as a temperature sensor and the resistive element is a material having greater than about 95% nickel. The system also includes a heater control module including a two-wire controller with a power control module that is configured to periodically compare a measured resistance value of the resistive element against a reference temperature to adjust for resistance drift over time during operation such that a temperature drift of the resistive element is less than about 1% over a temperature range of about 500° C.-1,000° C.

Abstract: A support pedestal includes a support member including a resistive layer having a plurality of zones, a routing layer, and a plurality of conductive vias. The plurality of zones are defined by a plurality of independently controllable resistive heating elements. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of conductive vias.

Abstract: The present disclosure provides a support pedestal that includes a support member including a resistive layer having at least two zones, a routing layer, and a plurality of conductive vias. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of vias. The number of zones of the resistive layer is greater than or equal to a number of wires coupled to the routing layer. The routing layer may include a plurality of arm portions that extend from a central region of the routing layer. The support pedestal may further include a second resistive layer disposed along the same plane as the routing layer.

Abstract: A support pedestal includes a substrate, a plurality of resistive heating elements disposed on the substrate and defining a plurality of heating zones, and electric terminals disposed at a central region of the substrate. At least one of the electric terminals is connected to at least two of the plurality of resistive heating elements.

Abstract: A support pedestal is provided that includes a substrate having a top resistive layer defining a first set of zones and a bottom resistive layer defining a second set of zones. Each zone of the first and second set of zones is coupled to at least two electric terminals from among a plurality of electric terminals, and a total number of electric terminals is less than or equal to a total of the first and second set of zones.

Abstract: In one form, the present disclosure is directed toward a method for controlling temperature of a heater including a resistive heating element. The method includes applying power to the resistive heating element of the heater at a variable ramp rate to increase temperature of the heater to a desired temperature setpoint. The variable ramp rate is set to a desired ramp rate. The method further includes monitoring an electric current flowing through the resistive heating element of the heater, and reducing the variable ramp rate from the desired ramp rate to a permitted ramp rate in response to the electric current being greater than a lower limit of an electric current limit band. An upper limit of the electric current limit band is provided as a system current limit.

Abstract: In one form, the present disclosure is directed toward a method of controlling temperature of a heater including a resistive heating element. The method includes applying power to the resistive heating element at a variable ramp rate to decrease temperature of the heater to a desired temperature setpoint, where the variable ramp rate is set to a desired ramp rate. The method further includes monitoring the temperature of the heater to detect a runaway condition and adjusting the variable ramp rate from the desired ramp rate to a permitted ramp rate in response to the runaway condition being detected.

Abstract: A method of calibrating a heater includes powering the heater to a first temperature setpoint. The heater includes a resistive heating element that has a varying temperature coefficient of resistance. The method further includes concurrently obtaining a plurality of resistance measurements of the resistive heating element and a plurality of reference temperature measurements of a reference member as the heater cools from a first temperature setpoint to a second temperature setpoint that is lower than the first temperature setpoint, and generating a resistance-temperature calibration table that correlates the plurality of resistance measurements with the plurality of reference temperature measurements.

Abstract: A method of dynamically calibrating a heater having a plurality of zones defined by one or more resistive heating elements includes controlling power to a heater having a plurality of zones based on a dynamic resistance-temperature (R-T) model to control a temperature of the heater to a temperature setpoint. For each of the plurality of zones, the method further includes measuring a temperature of a respective zone based on a resistance of the resistive heating elements of the respective zone and the dynamic R-T model, measuring a reference temperature for the respective zone, and incrementally adjusting a resistance value associated with the temperature setpoint provided in the dynamic R-T model for the respective zone to a calibrated resistance value. The method further includes providing the dynamic R-T model that correlates the calibrated resistance values of the plurality of zones with the temperature setpoint as a calibrated R-T model.

Abstract: A method includes selecting a state model control, as an operational state of the heater, from among a plurality of state model controls, measuring an electrical characteristic of the heater, where the electrical characteristic includes at least one of an electric current and a voltage, and controlling power to the heater based on the selected operational state and based on the measured electrical characteristic.

Abstract: The present disclosure is directed toward a control system for controlling a heater that includes at least one heating element. The control system includes a power converter operable to supply an adjustable voltage output to the heater, a sensor circuit that measures an electrical characteristic of the heating element of the heater, a reference temperature sensor that measures a reference temperature of a reference at the heater, and a controller. The controller is configured to calculate a primary temperature of a heater element based on the electrical characteristic and determines the voltage output to be applied to the heater based on at least one of the reference temperature and the primary temperature. The controller is configured to operate in at least one of an operation mode and a learn mode, and execute protection protocols when voltage is being supplied to the heater.

Abstract: A control system for controlling a heater includes a power converter, a sensor circuit, and a controller. The power converter supplies an adjustable power to the heater, and the sensor circuit is configured to measure an electrical characteristic of the heater. The controller is coupled to the power converter to control the power to the heater, and is configured to select a state model control, as an operation state of the heater, from among a plurality of defined state model controls. The controller controls the power supplied to the heater based on the operation state of the heater and on the electrical characteristics of the heater.

Abstract: A heater system is provided. The system includes a resistive element with a temperature coefficient of resistance (TCR) of at least about 1,000 ppm such that the resistive element functions as a heater and as a temperature sensor and the resistive element is a material having greater than about 95% nickel. The system also includes a heater control module including a two-wire controller with a power control module that is configured to periodically compare a measured resistance value of the resistive element against a reference temperature to adjust for resistance drift over time during operation such that a temperature drift of the resistive element is less than about 1% over a temperature range of about 500° C.-1,000° C.

Abstract: A heater includes at least one resistive element. The at least one resistive element includes a material having a high temperature coefficient of resistance (TCR) such that the resistive element functions as a heater and as a temperature sensor, the resistive element being a material selected from the group consisting of greater than about 95% nickel, a nickel copper alloy, stainless steel, a molybdenum-nickel alloy, niobium, a nickel-iron alloy, tantalum, zirconium, tungsten, molybdenum, Nisil, and titanium. In one form, the heater is a tubular heater with compacted MgO insulation and a metal sheath.

Abstract: The present disclosure is directed toward a control system for controlling a heater that includes at least one heating element. The control system includes a power converter operable to supply an adjustable voltage output to the heater, a sensor circuit that measures an electrical characteristic of the heating element of the heater, a reference temperature sensor that measures a reference temperature of a reference at the heater, and a controller. The controller is configured to calculate a primary temperature of a heater element based on the electrical characteristic and determines the voltage output to be applied to the heater based on at least one of the reference temperature and the primary temperature. The controller is configured to operate in at least one of an operation mode and a learn mode, and execute protection protocols when voltage is being supplied to the heater.

Abstract: The present disclosure provides a support pedestal that includes a support member including a resistive layer having at least two zones, a routing layer, and a plurality of conductive vias. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of vias. The number of zones of the resistive layer is greater than or equal to a number of wires coupled to the routing layer. The routing layer may include a plurality of arm portions that extend from a central region of the routing layer. The support pedestal may further include a second resistive layer disposed along the same plane as the routing layer.

Abstract: A support pedestal is provided that includes a substrate having a top resistive layer defining a first set of zones and a bottom resistive layer defining a second set of zones. Each zone of the first and second set of zones is coupled to at least two electric terminals from among a plurality of electric terminals, and a total number of electric terminals is less than or equal to a total of the first and second set of zones.

Abstract: A control system for controlling a heater includes a power converter, a sensor circuit, and a controller. The power converter supplies an adjustable power to the heater, and the sensor circuit is configured to measure an electrical characteristic of the heater. The controller is coupled to the power converter to control the power to the heater, and is configured to select a state model control, as an operation state of the heater, from among a plurality of defined state model controls. The controller controls the power supplied to the heater based on the operation state of the heater and on the electrical characteristics of the heater.

Abstract: A heater includes at least one resistive element. The at least one resistive element includes a material having a high temperature coefficient of resistance (TCR) such that the resistive element functions as a heater and as a temperature sensor, the resistive element being a material selected from the group consisting of greater than about 95% nickel, a nickel copper alloy, stainless steel, a molybdenum-nickel alloy, niobium, a nickel-iron alloy, tantalum, zirconium, tungsten, molybdenum, Nisil, and titanium. In one form, the heater is a tubular heater with compacted MgO insulation and a metal sheath.