Patents by Inventor Brittany Serke

Brittany Serke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • NON-SELECTIVE OXIDE ETCH WET CLEAN COMPOSITION AND METHOD OF USE
    Publication number: 20110117751
    Abstract: Composition and method to remove undoped silicon-containing materials from microelectronic devices at rates greater than or equal to the removal of doped silicon-containing materials.
    Type: Application
    Filed: March 6, 2009
    Publication date: May 19, 2011
    Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.
    Inventors: Prerna Sonthalia, Emanuel I. Cooper, David Minsek, Peng Zhang, Melissa A. Petruska, Brittany Serke, Trace Quentin Hurd
  • NON-FLUORIDE CONTAINING COMPOSITION FOR THE REMOVAL OF RESIDUE FROM A MICROELECTRONIC DEVICE
    Publication number: 20100261632
    Abstract: Cleaning compositions and processes for removing residue from a microelectronic device having said residue thereon. The composition, which is substantially devoid of fluoride species, amine species, and organic solvents, achieves highly efficacious cleaning of the residue material, including post-etch residue, post-ash residue and/or post-CMP residue, from the microelectronic device while simultaneously not damaging the interlevel dielectric and metal interconnect material also present thereon.
    Type: Application
    Filed: August 4, 2008
    Publication date: October 14, 2010
    Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.
    Inventors: Michael Korzenski, Ping Jiang, Brittany Serke