Patents by Inventor Brown Peethala

Brown Peethala has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods employing sacrificial barrier layer for protection of vias during trench formation
    Patent number: 9799559
    Abstract: A method includes, for example, providing an intermediate semiconductor structure comprising a metallic layer, a patternable layer disposed over the metallic layer, and a hard mask disposed over the patternable layer, the intermediate semiconductor structure comprising a plurality of vias extending through the hard mask onto the metallic layer, depositing a sacrificial barrier layer over the intermediate semiconductor structure and in the plurality of vias, removing a portion of the sacrificial barrier layer between the plurality of vias while maintaining a portion of the sacrificial barrier layer in the plurality of vias, forming a trench in the patternable layer between the removed portion of the sacrificial barrier layer and the plurality of vias, and removing the remaining portions of the sacrificial barrier layer from the plurality of vias.
    Type: Grant
    Filed: May 19, 2016
    Date of Patent: October 24, 2017
    Assignees: GLOBALFOUNDRIES Inc., International Business Machines Corporation
    Inventors: Shariq Siddiqui, Frank W. Mont, Xunyuan Zhang, Brown Peethala, Douglas M. Trickett