Abstract: A CVD process for producing a rare earth-doped, epitaxial semiconductor layer on a substrate is disclosed. The process utilizes a silane or germane and a rare earth compound in the gas phase. By this method single phase, rare earth-doped semiconductor layers, supersaturated in the rare earth, are produced. The preferred rare earth is erbium and the preferred precursors for depositing erbium by CVD are erbium hexafluoroacetylacetonate, acetylacetonate, tetramethylheptanedionate and flurooctanedionate. The process may be used to produce optoelectronic devices comprising a silicon substrate and an erbium-doped epitaxial silicon film.

Abstract: An automated system for vending airline tickets to credit card purchasers based upon reservation data stored in a central host computer, without the intervention of any ticket agents. A plurality of remote ticket terminals each include a credit card reader, video monitor, ticket printer, local computer, and an interface for permitting communication with the host computer. The local computer of each terminal reads data from an inserted credit card and causes the video monitor to display alphanumeric and graphic inquiries to the purchaser regarding the passenger's reservation. The CRT of the video monitor is provided with touch input mechanisms for enabling the passenger to respond to the inquiries by placing a finger on a visual response target. The local computer interrogates the host computer to determine the purchaser's reservation data and displays the reservation data on the CRT for confirmation by the purchaser.