Abstract: Flow enhancement plugs and electrostatic chucks having the same are disclosed herein that that inhibit gas light-up while providing excellent flow conductance for the delivery of backside gases to the substrate support surface of the electrostatic chuck. The flow enhancement plugs advantageously prevents line of sight passage through the plug. The flow enhancement plugs described herein have high conductance flow structures selected from one, two or all of a network of engineered gas passages, external gas passages and internal gas passages. As a result, the high conductance flow structures of the flow enhancement plugs disclosed herein beneficially have a conductance that is much lower than conventional porous plug.

Abstract: Described herein is a chamber component having a body comprising a plurality of aluminum alloy compositions. A first portion of the body includes a first aluminum alloy composition having a first grain size, and a second portion of the body includes a second aluminum alloy composition having a second grain size, wherein the first grain size of the first aluminum alloy composition is greater than the second grain size of the second aluminum alloy composition. A method for preparing the chamber component is also provided.

Abstract: Described herein is a chamber component having a body comprising a plurality of aluminum alloy compositions. A first portion of the body includes a first aluminum alloy composition having a first grain size, and a second portion of the body includes a second aluminum alloy composition having a second grain size, wherein the first grain size of the first aluminum alloy composition is greater than the second grain size of the second aluminum alloy composition. A method for preparing the chamber component is also provided.

Abstract: Described herein is a chamber component having a body comprising one or more aluminum alloy compositions. A surface of the chamber component has an aluminum alloy composition comprising aluminum (Al), wherein the Al is included in an amount of about 85 wt % to about 98 wt %, based on total weight of the alloy composition, and magnesium (Mg), wherein the Mg is included in an amount of about 1 wt % to about 5 wt %, based on total weight of the alloy composition. The aluminum alloy composition further includes one or more additional chemical elements that form an equiaxed grain structure of an aluminum matrix of the alloy composition.