Patents by Inventor Bruce Beattie
Bruce Beattie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240120335Abstract: Gate-all-around integrated circuit structures fabricated using alternate etch selective material, and the resulting structures, are described. For example, an integrated circuit structure includes a vertical arrangement of horizontal nanowires. A gate stack is over the vertical arrangement of horizontal nanowires. A pair of dielectric spacers is along sides of the gate stack and over the vertical arrangement of horizontal nanowires. A metal oxide material is between adjacent ones of the vertical arrangement of horizontal nanowires at a location between the pair of dielectric spacers and the sides of the gate stack.Type: ApplicationFiled: December 20, 2023Publication date: April 11, 2024Inventors: Sudipto NASKAR, Biswajeet GUHA, William HSU, Bruce BEATTIE, Tahir GHANI
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Publication number: 20240096896Abstract: Non-planar integrated circuit structures having mitigated source or drain etch from replacement gate process are described. For example, an integrated circuit structure includes a fin or nanowire. A gate stack is over the fin or nanowire. The gate stack includes a gate dielectric and a gate electrode. A first dielectric spacer is along a first side of the gate stack, and a second dielectric spacer is along a second side of the gate stack. The first and second dielectric spacers are over at least a portion of the fin or nanowire. An insulating material is vertically between and in contact with the portion of the fin or nanowire and the first and second dielectric spacers. A first epitaxial source or drain structure is at the first side of the gate stack, and a second epitaxial source or drain structure is at the second side of the gate stack.Type: ApplicationFiled: November 29, 2023Publication date: March 21, 2024Inventors: Jun Sung KANG, Kai Loon CHEONG, Erica J. THOMPSON, Biswajeet GUHA, William HSU, Dax M. CRUM, Tahir GHANI, Bruce BEATTIE
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Publication number: 20240088296Abstract: A nanowire device includes one or more nanowire having a first end portion, a second end portion, and a body portion between the first end portion and the second end portion. A first conductive structure is in contact with the first end portion and a second conductive structure is in contact with the second end portion. The body portion of the nanowire has a first cross-sectional shape and the first end portion has a second cross-sectional shape different from the first cross-sectional shape. Integrated circuits including the nanowire device and a method of cleaning a semiconductor structure are also disclosed.Type: ApplicationFiled: November 20, 2023Publication date: March 14, 2024Applicant: Intel CorporationInventors: Erica J. THOMPSON, Aditya Kasukurti, Jun Sung Kang, Kai Loon Cheong, Biswajeet Guha, William Hsu, Bruce Beattie
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Patent number: 11929396Abstract: A transistor structure includes a base and a body over the base. The body comprises a semiconductor material and has a first end portion and a second end portion. A gate structure is wrapped around the body between the first end portion and the second end portion, where the gate structure includes a gate electrode and a dielectric between the gate electrode and the body. A source is in contact with the first end portion and a drain is in contact with the second end portion. A first spacer material is on opposite sides of the gate electrode and above the first end portion. A second spacer material is adjacent the gate structure and under the first end portion of the nanowire body. The second spacer material is below and in contact with a bottom surface of the source and the drain.Type: GrantFiled: April 20, 2022Date of Patent: March 12, 2024Assignee: Intel CorporationInventors: William Hsu, Biswajeet Guha, Leonard Guler, Souvik Chakrabarty, Jun Sung Kang, Bruce Beattie, Tahir Ghani
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Patent number: 11894368Abstract: Gate-all-around integrated circuit structures fabricated using alternate etch selective material, and the resulting structures, are described. For example, an integrated circuit structure includes a vertical arrangement of horizontal nanowires. A gate stack is over the vertical arrangement of horizontal nanowires. A pair of dielectric spacers is along sides of the gate stack and over the vertical arrangement of horizontal nanowires. A metal oxide material is between adjacent ones of the vertical arrangement of horizontal nanowires at a location between the pair of dielectric spacers and the sides of the gate stack.Type: GrantFiled: December 26, 2019Date of Patent: February 6, 2024Assignee: Intel CorporationInventors: Sudipto Naskar, Biswajeet Guha, William Hsu, Bruce Beattie, Tahir Ghani
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Patent number: 11869891Abstract: Non-planar integrated circuit structures having mitigated source or drain etch from replacement gate process are described. For example, an integrated circuit structure includes a fin or nanowire. A gate stack is over the fin or nanowire. The gate stack includes a gate dielectric and a gate electrode. A first dielectric spacer is along a first side of the gate stack, and a second dielectric spacer is along a second side of the gate stack. The first and second dielectric spacers are over at least a portion of the fin or nanowire. An insulating material is vertically between and in contact with the portion of the fin or nanowire and the first and second dielectric spacers. A first epitaxial source or drain structure is at the first side of the gate stack, and a second epitaxial source or drain structure is at the second side of the gate stack.Type: GrantFiled: September 28, 2018Date of Patent: January 9, 2024Assignee: Intel CorporationInventors: Jun Sung Kang, Kai Loon Cheong, Erica J. Thompson, Biswajeet Guha, William Hsu, Dax M. Crum, Tahir Ghani, Bruce Beattie
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Patent number: 11869973Abstract: A nanowire device includes one or more nanowire having a first end portion, a second end portion, and a body portion between the first end portion and the second end portion. A first conductive structure is in contact with the first end portion and a second conductive structure is in contact with the second end portion. The body portion of the nanowire has a first cross-sectional shape and the first end portion has a second cross-sectional shape different from the first cross-sectional shape. Integrated circuits including the nanowire device and a method of cleaning a semiconductor structure are also disclosed.Type: GrantFiled: June 20, 2018Date of Patent: January 9, 2024Assignee: Intel CorporationInventors: Erica J. Thompson, Aditya Kasukurti, Jun Sung Kang, Kai Loon Cheong, Biswajeet Guha, William Hsu, Bruce Beattie
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Patent number: 11715787Abstract: A method comprising: forming a substrate; forming a first nanowire over the substrate; forming a second nanowire over the substrate; forming a gate over a portion of the first and second nanowires; implanting a dopant such that a region between the first and second nanowires under the gate does not receive the dopant while a region between the first and second nanowires away from the gate receives the dopant, wherein the dopant amorphize a material of the region between the first and second nanowires away from the gate; and isotopically etching of the region between the first and second nanowires away from the gate.Type: GrantFiled: October 29, 2021Date of Patent: August 1, 2023Assignee: INTEL CORPORATIONInventors: Mark Armstrong, Biswajeet Guha, Jun Sung Kang, Bruce Beattie, Tahir Ghani
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Publication number: 20220246721Abstract: A transistor structure includes a base and a body over the base. The body comprises a semiconductor material and has a first end portion and a second end portion. A gate structure is wrapped around the body between the first end portion and the second end portion, where the gate structure includes a gate electrode and a dielectric between the gate electrode and the body. A source is in contact with the first end portion and a drain is in contact with the second end portion. A first spacer material is on opposite sides of the gate electrode and above the first end portion. A second spacer material is adjacent the gate structure and under the first end portion of the nanowire body. The second spacer material is below and in contact with a bottom surface of the source and the drain.Type: ApplicationFiled: April 20, 2022Publication date: August 4, 2022Applicant: INTEL CORPORATIONInventors: William HSU, Biswajeet GUHA, Leonard GULER, Souvik CHAKRABARTY, Jun Sung KANG, Bruce BEATTIE, Tahir GHANI
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Patent number: 11342411Abstract: A transistor structure includes a base and a body over the base. The body comprises a semiconductor material and has a first end portion and a second end portion. A gate structure is wrapped around the body between the first end portion and the second end portion, where the gate structure includes a gate electrode and a dielectric between the gate electrode and the body. A source is in contact with the first end portion and a drain is in contact with the second end portion. A first spacer material is on opposite sides of the gate electrode and above the first end portion. A second spacer material is adjacent the gate structure and under the first end portion of the nanowire body. The second spacer material is below and in contact with a bottom surface of the source and the drain.Type: GrantFiled: June 29, 2018Date of Patent: May 24, 2022Assignee: Intel CorporationInventors: William Hsu, Biswajeet Guha, Leonard Guler, Souvik Chakrabarty, Jun Sung Kang, Bruce Beattie, Tahir Ghani
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Patent number: 11276691Abstract: Gate-all-around integrated circuit structures having self-aligned source or drain undercut for varied widths are described. In an example, a structure includes first and second vertical arrangements of nanowires above a substrate, the nanowires of the second vertical arrangement of nanowires having a horizontal width greater than a horizontal width of the nanowires of the first vertical arrangement of nanowires. First and second gate stack portions are over the first and second vertical arrangements of nanowires, respectively. First embedded epitaxial source or drain regions are at ends of the first vertical arrangement of nanowires and extend beneath dielectric sidewalls spacers of the first gate stack portion by a first distance. Second embedded epitaxial source or drain regions are at ends of the second vertical arrangement of nanowires and extend beneath the dielectric sidewalls spacers of the second gate stack portion by a second distance substantially the same as the first distance.Type: GrantFiled: September 18, 2018Date of Patent: March 15, 2022Assignee: Intel CorporationInventors: Biswajeet Guha, Jun Sung Kang, Bruce Beattie, Stephen M. Cea, Tahir Ghani
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Publication number: 20220052178Abstract: A method comprising: forming a substrate; forming a first nanowire over the substrate; forming a second nanowire over the substrate; forming a gate over a portion of the first and second nanowires; implanting a dopant such that a region between the first and second nanowires under the gate does not receive the dopant while a region between the first and second nanowires away from the gate receives the dopant, wherein the dopant amorphize a material of the region between the first and second nanowires away from the gate; and isotopically etching of the region between the first and second nanowires away from the gate.Type: ApplicationFiled: October 29, 2021Publication date: February 17, 2022Applicant: Intel CorporationInventors: Mark Armstrong, Biswajeet Guha, Jun Sung Kang, Bruce Beattie, Tahir Ghani
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Patent number: 11205715Abstract: A method comprising: forming a substrate; forming a first nanowire over the substrate; forming a second nanowire over the substrate; forming a gate over a portion of the first and second nanowires; implanting a dopant such that a region between the first and second nanowires under the gate does not receive the dopant while a region between the first and second nanowires away from the gate receives the dopant, wherein the dopant amorphize a material of the region between the first and second nanowires away from the gate; and isotopically etching of the region between the first and second nanowires away from the gate.Type: GrantFiled: August 21, 2017Date of Patent: December 21, 2021Assignee: INTEL CORPORATIONInventors: Mark Armstrong, Biswajeet Guha, Jun Sung Kang, Bruce Beattie, Tahir Ghani
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Publication number: 20210202479Abstract: Gate-all-around integrated circuit structures fabricated using alternate etch selective material, and the resulting structures, are described. For example, an integrated circuit structure includes a vertical arrangement of horizontal nanowires. A gate stack is over the vertical arrangement of horizontal nanowires. A pair of dielectric spacers is along sides of the gate stack and over the vertical arrangement of horizontal nanowires. A metal oxide material is between adjacent ones of the vertical arrangement of horizontal nanowires at a location between the pair of dielectric spacers and the sides of the gate stack.Type: ApplicationFiled: December 26, 2019Publication date: July 1, 2021Inventors: Sudipto NASKAR, Biswajeet GUHA, William HSU, Bruce BEATTIE, Tahir GHANI
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Publication number: 20200152767Abstract: A method comprising: forming a substrate; forming a first nanowire over the substrate; forming a second nanowire over the substrate; forming a gate over a portion of the first and second nanowires; implanting a dopant such that a region between the first and second nanowires under the gate does not receive the dopant while a region between the first and second nanowires away from the gate receives the dopant, wherein the dopant amorphize a material of the region between the first and second nanowires away from the gate; and isotopically etching of the region between the first and second nanowires away from the gate.Type: ApplicationFiled: August 21, 2017Publication date: May 14, 2020Applicant: Intel CorporationInventors: Mark Armstrong, Biswajeet Guha, Jun Sung Kang, Bruce Beattie, Tahir Ghani
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Publication number: 20200105757Abstract: Non-planar integrated circuit structures having mitigated source or drain etch from replacement gate process are described. For example, an integrated circuit structure includes a fin or nanowire. A gate stack is over the fin or nanowire. The gate stack includes a gate dielectric and a gate electrode. A first dielectric spacer is along a first side of the gate stack, and a second dielectric spacer is along a second side of the gate stack. The first and second dielectric spacers are over at least a portion of the fin or nanowire. An insulating material is vertically between and in contact with the portion of the fin or nanowire and the first and second dielectric spacers. A first epitaxial source or drain structure is at the first side of the gate stack, and a second epitaxial source or drain structure is at the second side of the gate stack.Type: ApplicationFiled: September 28, 2018Publication date: April 2, 2020Inventors: Jun Sung KANG, Kai Loon CHEONG, Erica J. THOMPSON, Biswajeet GUHA, William HSU, Dax M. CRUM, Tahir GHANI, Bruce BEATTIE
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Publication number: 20200091145Abstract: Gate-all-around integrated circuit structures having self-aligned source or drain undercut for varied widths are described. In an example, a structure includes first and second vertical arrangements of nanowires above a substrate, the nanowires of the second vertical arrangement of nanowires having a horizontal width greater than a horizontal width of the nanowires of the first vertical arrangement of nanowires. First and second gate stack portions are over the first and second vertical arrangements of nanowires, respectively. First embedded epitaxial source or drain regions are at ends of the first vertical arrangement of nanowires and extend beneath dielectric sidewalls spacers of the first gate stack portion by a first distance. Second embedded epitaxial source or drain regions are at ends of the second vertical arrangement of nanowires and extend beneath the dielectric sidewalls spacers of the second gate stack portion by a second distance substantially the same as the first distance.Type: ApplicationFiled: September 18, 2018Publication date: March 19, 2020Inventors: Biswajeet GUHA, Jun Sung KANG, Bruce BEATTIE, Stephen M. CEA, Tahir GHANI
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Publication number: 20200006478Abstract: A transistor structure includes a base and a body over the base. The body comprises a semiconductor material and has a first end portion and a second end portion. A gate structure is wrapped around the body between the first end portion and the second end portion, where the gate structure includes a gate electrode and a dielectric between the gate electrode and the body. A source is in contact with the first end portion and a drain is in contact with the second end portion. A first spacer material is on opposite sides of the gate electrode and above the first end portion. A second spacer material is adjacent the gate structure and under the first end portion of the nanowire body. The second spacer material is below and in contact with a bottom surface of the source and the drain.Type: ApplicationFiled: June 29, 2018Publication date: January 2, 2020Applicant: INTEL CORPORATIONInventors: William Hsu, Biswajeet Guha, Leonard Guler, Souvik Chakrabarty, Jun Sung Kang, Bruce Beattie, Tahir Ghani
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Publication number: 20190393350Abstract: A nanowire device includes one or more nanowire having a first end portion, a second end portion, and a body portion between the first end portion and the second end portion. A first conductive structure is in contact with the first end portion and a second conductive structure is in contact with the second end portion. The body portion of the nanowire has a first cross-sectional shape and the first end portion has a second cross-sectional shape different from the first cross-sectional shape. Integrated circuits including the nanowire device and a method of cleaning a semiconductor structure are also disclosed.Type: ApplicationFiled: June 20, 2018Publication date: December 26, 2019Applicant: INTEL CORPORATIONInventors: Erica J. Thompson, Aditya Kasukurti, Jun Sung Kang, Kai Loon Cheong, Biswajeet Guha, William Hsu, Bruce Beattie
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Publication number: 20080152812Abstract: Methods and associated structures of forming a microelectronic device are described. Those methods may comprise forming a thin metal-organic layer on a copper structure, wherein the thin metal-organic layer substantially prevents corrosion of the copper structure, and wherein the thin metal-organic layer comprises an organo-copper compound comprising an alkyl group and a thiol group. In addition, methods of applying a high pH cleaning process using a surfactant to improve surface wetting in a low foaming solution is described.Type: ApplicationFiled: December 22, 2006Publication date: June 26, 2008Inventors: Ming Fang, Steve Keating, Vani Thirumala, Lin Sha, Bruce Beattie