Patents by Inventor Bruce Boeck

Bruce Boeck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming a tensile plasma enhanced nitride capping layer over a gate electrode
    Patent number: 6284633
    Abstract: A tPEN layer (108) having a tensile stress is formed over a conductive gate stack (104-106) provided on a semiconductor substrate. Following the formation of the conductive gate stack (104-106), an anneal is performed. The conductive gate stack includes a metal layer to prevent outgassing and poly depletion during the anneal. Next, a photoresist layer (110) is formed and patterned to form a gate (122, 124).
    Type: Grant
    Filed: November 24, 1997
    Date of Patent: September 4, 2001
    Assignee: Motorola Inc.
    Inventors: Rajan Nagabushnam, Stanley M. Filipiak, Bruce Boeck