Patents by Inventor Bruce D. Abel

Bruce D. Abel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for adjustably supporting a light source for use in photolithography
    Patent number: 6194733
    Abstract: A method and apparatus for producing extreme ultra-violet light comprising a nozzle for flowing a gas at a supersonic velocity, a source for directing a radiated energy beam into the flowing gas to stimulate emission of extreme ultra-violet light therefrom, and optionally a diffuser for capturing a substantial portion of the gas so that the gas may be recycled in a closed-loop system. The extreme ultra-violet light so produced is suitable for use in photolithography for integrated circuit fabrication and the like. A remotely-controlled XYZ micro-positioning stage facilitates alignment of the nozzle and the diffuser to the radiated energy beam.
    Type: Grant
    Filed: April 3, 1998
    Date of Patent: February 27, 2001
    Assignee: Advanced Energy Systems, Inc.
    Inventors: Edwin G. Haas, Vincent A. Christina, Richard A. Hartley, Jr., Bruce D. Abel, Alan M. M. Todd