Patents by Inventor Bruce E. Beattie

Bruce E. Beattie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240145598
    Abstract: Gate all around semiconductor devices, such as nanowire or nanoribbon devices, are described that include a low dielectric constant (“low-k”) material disposed between a first nanowire closest to the substrate and the substrate. This configuration enables gate control over all surfaces of the nanowires in a channel region of a semiconductor device via the high-k dielectric material, while also preventing leakage current from the first nanowire into the substrate.
    Type: Application
    Filed: January 4, 2024
    Publication date: May 2, 2024
    Inventors: Bruce E. BEATTIE, Leonard GULER, Biswajeet GUHA, Jun Sung KANG, William HSU
  • Patent number: 11901458
    Abstract: Gate all around semiconductor devices, such as nanowire or nanoribbon devices, are described that include a low dielectric constant (“low-k”) material disposed between a first nanowire closest to the substrate and the substrate. This configuration enables gate control over all surfaces of the nanowires in a channel region of a semiconductor device via the high-k dielectric material, while also preventing leakage current from the first nanowire into the substrate.
    Type: Grant
    Filed: June 27, 2022
    Date of Patent: February 13, 2024
    Assignee: Intel Corporation
    Inventors: Bruce E. Beattie, Leonard Guler, Biswajeet Guha, Jun Sung Kang, William Hsu
  • Publication number: 20220336668
    Abstract: Gate all around semiconductor devices, such as nanowire or nanoribbon devices, are described that include a low dielectric constant (“low-k”) material disposed between a first nanowire closest to the substrate and the substrate. This configuration enables gate control over all surfaces of the nanowires in a channel region of a semiconductor device via the high-k dielectric material, while also preventing leakage current from the first nanowire into the substrate.
    Type: Application
    Filed: June 27, 2022
    Publication date: October 20, 2022
    Inventors: Bruce E. BEATTIE, Leonard GULER, Biswajeet GUHA, Jun Sung KANG, William HSU
  • Patent number: 11404578
    Abstract: Gate all around semiconductor devices, such as nanowire or nanoribbon devices, are described that include a low dielectric constant (“low-?”) material disposed between a first nanowire closest to the substrate and the substrate. This configuration enables gate control over all surfaces of the nanowires in a channel region of a semiconductor device via the high-k dielectric material, while also preventing leakage current from the first nanowire into the substrate.
    Type: Grant
    Filed: June 22, 2018
    Date of Patent: August 2, 2022
    Assignee: Intel Corporation
    Inventors: Bruce E. Beattie, Leonard Guler, Biswajeet Guha, Jun Sung Kang, William Hsu
  • Patent number: 11069795
    Abstract: Integrated circuits include fins including an upper/channel region and a lower/sub-channel region, the lower region having a first chemical composition and opposing sidewalls adjacent to an insulator material, and the upper region having a second chemical composition. A first width indicates the distance between the opposing sidewalls of the lower region at a first location is at least 1 nm wider than a second width indicating the distance between the opposing sidewalls of the upper region at a second location, the first location being within 10 nm of the second location (or otherwise relatively close to one another). The first chemical composition is distinct from the second chemical composition and includes a surface chemical composition at an outer surface of the opposing sidewalls of the lower region and a bulk chemical composition therebetween, the surface chemical composition including one or more of oxygen, nitrogen, carbon, chlorine, fluorine, and sulfur.
    Type: Grant
    Filed: September 28, 2017
    Date of Patent: July 20, 2021
    Assignee: Intel Corporation
    Inventors: Karthik Jambunathan, Glenn A. Glass, Anand S. Murthy, Jun Sung Kang, Bruce E. Beattie, Anupama Bowonder, Biswajeet Guha, Ju H. Nam, Tahir Ghani
  • Publication number: 20200411513
    Abstract: Integrated circuits include fins including an upper/channel region and a lower/sub-channel region, the lower region having a first chemical composition and opposing sidewalls adjacent to an insulator material, and the upper region having a second chemical composition. A first width indicates the distance between the opposing sidewalls of the lower region at a first location is at least 1 nm wider than a second width indicating the distance between the opposing sidewalls of the upper region at a second location, the first location being within 10 nm of the second location (or otherwise relatively close to one another). The first chemical composition is distinct from the second chemical composition and includes a surface chemical composition at an outer surface of the opposing sidewalls of the lower region and a bulk chemical composition therebetween, the surface chemical composition including one or more of oxygen, nitrogen, carbon, chlorine, fluorine, and sulfur.
    Type: Application
    Filed: September 28, 2017
    Publication date: December 31, 2020
    Applicant: INTEL CORPORATION
    Inventors: Karthik Jambunathan, Glenn A. Glass, Anand S. Murthy, Jun Sung Kang, Bruce E. Beattie, Anupama Bowonder, Biswajeet Guha, Ju H. Nam, Tahir Ghani
  • Publication number: 20190393351
    Abstract: Gate all around semiconductor devices, such as nanowire or nanoribbon devices, are described that include a low dielectric constant (“low-?”) material disposed between a first nanowire closest to the substrate and the substrate. This configuration enables gate control over all surfaces of the nanowires in a channel region of a semiconductor device via the high-k dielectric material, while also preventing leakage current from the first nanowire into the substrate.
    Type: Application
    Filed: June 22, 2018
    Publication date: December 26, 2019
    Applicant: INTEL CORPORATION
    Inventors: Bruce E. Beattie, Leonard Guler, Biswajeet Guha, Jun Sung Kang, William Hsu
  • Publication number: 20170025499
    Abstract: Three-dimensional germanium-based semiconductor devices formed on globally or locally isolated substrates are described. For example, a semiconductor device includes a semiconductor substrate. An insulating structure is disposed above the semiconductor substrate. A three-dimensional germanium-containing body is disposed on a semiconductor release layer disposed on the insulating structure. The three-dimensional germanium-containing body includes a channel region and source/drain regions on either side of the channel region. The semiconductor release layer is under the source/drain regions but not under the channel region. The semiconductor release layer is composed of a semiconductor material different from the three-dimensional germanium-containing body. A gate electrode stack surrounds the channel region with a portion disposed on the insulating structure and laterally adjacent to the semiconductor release layer.
    Type: Application
    Filed: October 6, 2016
    Publication date: January 26, 2017
    Inventors: Annalisa Cappellani, Pragyansri Pathi, Bruce E. Beattie, Abhijit Jayant Pethe
  • Patent number: 9472399
    Abstract: Three-dimensional germanium-based semiconductor devices formed on globally or locally isolated substrates are described. For example, a semiconductor device includes a semiconductor substrate. An insulating structure is disposed above the semiconductor substrate. A three-dimensional germanium-containing body is disposed on a semiconductor release layer disposed on the insulating structure. The three-dimensional germanium-containing body includes a channel region and source/drain regions on either side of the channel region. The semiconductor release layer is under the source/drain regions but not under the channel region. The semiconductor release layer is composed of a semiconductor material different from the three-dimensional germanium-containing body. A gate electrode stack surrounds the channel region with a portion disposed on the insulating structure and laterally adjacent to the semiconductor release layer.
    Type: Grant
    Filed: May 24, 2015
    Date of Patent: October 18, 2016
    Assignee: Intel Corporation
    Inventors: Annalisa Cappellani, Pragyansri Pathi, Bruce E. Beattie, Abhijit Jayant Pethe
  • Publication number: 20150255280
    Abstract: Three-dimensional germanium-based semiconductor devices formed on globally or locally isolated substrates are described. For example, a semiconductor device includes a semiconductor substrate. An insulating structure is disposed above the semiconductor substrate. A three-dimensional germanium-containing body is disposed on a semiconductor release layer disposed on the insulating structure. The three-dimensional germanium-containing body includes a channel region and source/drain regions on either side of the channel region. The semiconductor release layer is under the source/drain regions but not under the channel region. The semiconductor release layer is composed of a semiconductor material different from the three-dimensional germanium-containing body. A gate electrode stack surrounds the channel region with a portion disposed on the insulating structure and laterally adjacent to the semiconductor release layer.
    Type: Application
    Filed: May 24, 2015
    Publication date: September 10, 2015
    Inventors: Annalisa Cappellani, Pragyansri Pathi, Bruce E. Beattie, Abhijit Jayant Pethe
  • Patent number: 9041106
    Abstract: Three-dimensional germanium-based semiconductor devices formed on globally or locally isolated substrates are described. For example, a semiconductor device includes a semiconductor substrate. An insulating structure is disposed above the semiconductor substrate. A three-dimensional germanium-containing body is disposed on a semiconductor release layer disposed on the insulating structure. The three-dimensional germanium-containing body includes a channel region and source/drain regions on either side of the channel region. The semiconductor release layer is under the source/drain regions but not under the channel region. The semiconductor release layer is composed of a semiconductor material different from the three-dimensional germanium-containing body. A gate electrode stack surrounds the channel region with a portion disposed on the insulating structure and laterally adjacent to the semiconductor release layer.
    Type: Grant
    Filed: September 27, 2012
    Date of Patent: May 26, 2015
    Assignee: Intel Corporation
    Inventors: Annalisa Cappellani, Pragyansri Pathi, Bruce E. Beattie, Abhijit Jayant Pethe
  • Publication number: 20140084370
    Abstract: Three-dimensional germanium-based semiconductor devices formed on globally or locally isolated substrates are described. For example, a semiconductor device includes a semiconductor substrate. An insulating structure is disposed above the semiconductor substrate. A three-dimensional germanium-containing body is disposed on a semiconductor release layer disposed on the insulating structure. The three-dimensional germanium-containing body includes a channel region and source/drain regions on either side of the channel region. The semiconductor release layer is under the source/drain regions but not under the channel region. The semiconductor release layer is composed of a semiconductor material different from the three-dimensional germanium-containing body. A gate electrode stack surrounds the channel region with a portion disposed on the insulating structure and laterally adjacent to the semiconductor release layer.
    Type: Application
    Filed: September 27, 2012
    Publication date: March 27, 2014
    Inventors: Annalisa Cappellani, Pragyansri Pathi, Bruce E. Beattie, Abhijit Jayant Pethe
  • Patent number: 5898968
    Abstract: A device for cleaning and drying golf club heads and for cleaning, drying, and carrying golf balls can be secured to the user during play. The device includes a generally pliant, hollow sleeve member having a large opening at its upper end and a smaller opening at its lower end. The upper and lower openings of the sleeve member are appropriately sized to allow golf club heads of any size to be cleaned within the sleeve upper interior portion while golf balls may be cleaned within the sleeve lower interior portion. Additionally, the appropriately sized lower opening permits golf balls to be retained within the lower interior portion of the sleeve member and squeezed out as needed. The device accomplishes all of the cleaning of the golf equipment internally and therefore prevents any cleaned off material from contacting the user or the user's clothing.
    Type: Grant
    Filed: July 29, 1997
    Date of Patent: May 4, 1999
    Inventor: Bruce E. Beattie
  • Patent number: 4909185
    Abstract: Apparatus for heating product with the product during heating subjected to a controlled, nonatmospheric gas environment. The apparatus includes a double-walled cold zone assembly adapted to be placed against an oven opening, the assembly having a depository chamber within it for securing product during cooling of the product. A cantilever projecting through the assembly is operated to move product between the depository chamber of the assembly and the oven where heat treatment occurs.
    Type: Grant
    Filed: February 3, 1988
    Date of Patent: March 20, 1990
    Assignee: Weiss Scientific Glass Blowing Co.
    Inventors: Robert E. Aldridge, Bruce E. Beattie