Patents by Inventor Bruce E. Beattie
Bruce E. Beattie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240145598Abstract: Gate all around semiconductor devices, such as nanowire or nanoribbon devices, are described that include a low dielectric constant (“low-k”) material disposed between a first nanowire closest to the substrate and the substrate. This configuration enables gate control over all surfaces of the nanowires in a channel region of a semiconductor device via the high-k dielectric material, while also preventing leakage current from the first nanowire into the substrate.Type: ApplicationFiled: January 4, 2024Publication date: May 2, 2024Inventors: Bruce E. BEATTIE, Leonard GULER, Biswajeet GUHA, Jun Sung KANG, William HSU
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Patent number: 11901458Abstract: Gate all around semiconductor devices, such as nanowire or nanoribbon devices, are described that include a low dielectric constant (“low-k”) material disposed between a first nanowire closest to the substrate and the substrate. This configuration enables gate control over all surfaces of the nanowires in a channel region of a semiconductor device via the high-k dielectric material, while also preventing leakage current from the first nanowire into the substrate.Type: GrantFiled: June 27, 2022Date of Patent: February 13, 2024Assignee: Intel CorporationInventors: Bruce E. Beattie, Leonard Guler, Biswajeet Guha, Jun Sung Kang, William Hsu
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Publication number: 20220336668Abstract: Gate all around semiconductor devices, such as nanowire or nanoribbon devices, are described that include a low dielectric constant (“low-k”) material disposed between a first nanowire closest to the substrate and the substrate. This configuration enables gate control over all surfaces of the nanowires in a channel region of a semiconductor device via the high-k dielectric material, while also preventing leakage current from the first nanowire into the substrate.Type: ApplicationFiled: June 27, 2022Publication date: October 20, 2022Inventors: Bruce E. BEATTIE, Leonard GULER, Biswajeet GUHA, Jun Sung KANG, William HSU
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Patent number: 11404578Abstract: Gate all around semiconductor devices, such as nanowire or nanoribbon devices, are described that include a low dielectric constant (“low-?”) material disposed between a first nanowire closest to the substrate and the substrate. This configuration enables gate control over all surfaces of the nanowires in a channel region of a semiconductor device via the high-k dielectric material, while also preventing leakage current from the first nanowire into the substrate.Type: GrantFiled: June 22, 2018Date of Patent: August 2, 2022Assignee: Intel CorporationInventors: Bruce E. Beattie, Leonard Guler, Biswajeet Guha, Jun Sung Kang, William Hsu
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Patent number: 11069795Abstract: Integrated circuits include fins including an upper/channel region and a lower/sub-channel region, the lower region having a first chemical composition and opposing sidewalls adjacent to an insulator material, and the upper region having a second chemical composition. A first width indicates the distance between the opposing sidewalls of the lower region at a first location is at least 1 nm wider than a second width indicating the distance between the opposing sidewalls of the upper region at a second location, the first location being within 10 nm of the second location (or otherwise relatively close to one another). The first chemical composition is distinct from the second chemical composition and includes a surface chemical composition at an outer surface of the opposing sidewalls of the lower region and a bulk chemical composition therebetween, the surface chemical composition including one or more of oxygen, nitrogen, carbon, chlorine, fluorine, and sulfur.Type: GrantFiled: September 28, 2017Date of Patent: July 20, 2021Assignee: Intel CorporationInventors: Karthik Jambunathan, Glenn A. Glass, Anand S. Murthy, Jun Sung Kang, Bruce E. Beattie, Anupama Bowonder, Biswajeet Guha, Ju H. Nam, Tahir Ghani
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Publication number: 20200411513Abstract: Integrated circuits include fins including an upper/channel region and a lower/sub-channel region, the lower region having a first chemical composition and opposing sidewalls adjacent to an insulator material, and the upper region having a second chemical composition. A first width indicates the distance between the opposing sidewalls of the lower region at a first location is at least 1 nm wider than a second width indicating the distance between the opposing sidewalls of the upper region at a second location, the first location being within 10 nm of the second location (or otherwise relatively close to one another). The first chemical composition is distinct from the second chemical composition and includes a surface chemical composition at an outer surface of the opposing sidewalls of the lower region and a bulk chemical composition therebetween, the surface chemical composition including one or more of oxygen, nitrogen, carbon, chlorine, fluorine, and sulfur.Type: ApplicationFiled: September 28, 2017Publication date: December 31, 2020Applicant: INTEL CORPORATIONInventors: Karthik Jambunathan, Glenn A. Glass, Anand S. Murthy, Jun Sung Kang, Bruce E. Beattie, Anupama Bowonder, Biswajeet Guha, Ju H. Nam, Tahir Ghani
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Publication number: 20190393351Abstract: Gate all around semiconductor devices, such as nanowire or nanoribbon devices, are described that include a low dielectric constant (“low-?”) material disposed between a first nanowire closest to the substrate and the substrate. This configuration enables gate control over all surfaces of the nanowires in a channel region of a semiconductor device via the high-k dielectric material, while also preventing leakage current from the first nanowire into the substrate.Type: ApplicationFiled: June 22, 2018Publication date: December 26, 2019Applicant: INTEL CORPORATIONInventors: Bruce E. Beattie, Leonard Guler, Biswajeet Guha, Jun Sung Kang, William Hsu
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Publication number: 20170025499Abstract: Three-dimensional germanium-based semiconductor devices formed on globally or locally isolated substrates are described. For example, a semiconductor device includes a semiconductor substrate. An insulating structure is disposed above the semiconductor substrate. A three-dimensional germanium-containing body is disposed on a semiconductor release layer disposed on the insulating structure. The three-dimensional germanium-containing body includes a channel region and source/drain regions on either side of the channel region. The semiconductor release layer is under the source/drain regions but not under the channel region. The semiconductor release layer is composed of a semiconductor material different from the three-dimensional germanium-containing body. A gate electrode stack surrounds the channel region with a portion disposed on the insulating structure and laterally adjacent to the semiconductor release layer.Type: ApplicationFiled: October 6, 2016Publication date: January 26, 2017Inventors: Annalisa Cappellani, Pragyansri Pathi, Bruce E. Beattie, Abhijit Jayant Pethe
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Patent number: 9472399Abstract: Three-dimensional germanium-based semiconductor devices formed on globally or locally isolated substrates are described. For example, a semiconductor device includes a semiconductor substrate. An insulating structure is disposed above the semiconductor substrate. A three-dimensional germanium-containing body is disposed on a semiconductor release layer disposed on the insulating structure. The three-dimensional germanium-containing body includes a channel region and source/drain regions on either side of the channel region. The semiconductor release layer is under the source/drain regions but not under the channel region. The semiconductor release layer is composed of a semiconductor material different from the three-dimensional germanium-containing body. A gate electrode stack surrounds the channel region with a portion disposed on the insulating structure and laterally adjacent to the semiconductor release layer.Type: GrantFiled: May 24, 2015Date of Patent: October 18, 2016Assignee: Intel CorporationInventors: Annalisa Cappellani, Pragyansri Pathi, Bruce E. Beattie, Abhijit Jayant Pethe
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Publication number: 20150255280Abstract: Three-dimensional germanium-based semiconductor devices formed on globally or locally isolated substrates are described. For example, a semiconductor device includes a semiconductor substrate. An insulating structure is disposed above the semiconductor substrate. A three-dimensional germanium-containing body is disposed on a semiconductor release layer disposed on the insulating structure. The three-dimensional germanium-containing body includes a channel region and source/drain regions on either side of the channel region. The semiconductor release layer is under the source/drain regions but not under the channel region. The semiconductor release layer is composed of a semiconductor material different from the three-dimensional germanium-containing body. A gate electrode stack surrounds the channel region with a portion disposed on the insulating structure and laterally adjacent to the semiconductor release layer.Type: ApplicationFiled: May 24, 2015Publication date: September 10, 2015Inventors: Annalisa Cappellani, Pragyansri Pathi, Bruce E. Beattie, Abhijit Jayant Pethe
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Patent number: 9041106Abstract: Three-dimensional germanium-based semiconductor devices formed on globally or locally isolated substrates are described. For example, a semiconductor device includes a semiconductor substrate. An insulating structure is disposed above the semiconductor substrate. A three-dimensional germanium-containing body is disposed on a semiconductor release layer disposed on the insulating structure. The three-dimensional germanium-containing body includes a channel region and source/drain regions on either side of the channel region. The semiconductor release layer is under the source/drain regions but not under the channel region. The semiconductor release layer is composed of a semiconductor material different from the three-dimensional germanium-containing body. A gate electrode stack surrounds the channel region with a portion disposed on the insulating structure and laterally adjacent to the semiconductor release layer.Type: GrantFiled: September 27, 2012Date of Patent: May 26, 2015Assignee: Intel CorporationInventors: Annalisa Cappellani, Pragyansri Pathi, Bruce E. Beattie, Abhijit Jayant Pethe
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Publication number: 20140084370Abstract: Three-dimensional germanium-based semiconductor devices formed on globally or locally isolated substrates are described. For example, a semiconductor device includes a semiconductor substrate. An insulating structure is disposed above the semiconductor substrate. A three-dimensional germanium-containing body is disposed on a semiconductor release layer disposed on the insulating structure. The three-dimensional germanium-containing body includes a channel region and source/drain regions on either side of the channel region. The semiconductor release layer is under the source/drain regions but not under the channel region. The semiconductor release layer is composed of a semiconductor material different from the three-dimensional germanium-containing body. A gate electrode stack surrounds the channel region with a portion disposed on the insulating structure and laterally adjacent to the semiconductor release layer.Type: ApplicationFiled: September 27, 2012Publication date: March 27, 2014Inventors: Annalisa Cappellani, Pragyansri Pathi, Bruce E. Beattie, Abhijit Jayant Pethe
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Patent number: 5898968Abstract: A device for cleaning and drying golf club heads and for cleaning, drying, and carrying golf balls can be secured to the user during play. The device includes a generally pliant, hollow sleeve member having a large opening at its upper end and a smaller opening at its lower end. The upper and lower openings of the sleeve member are appropriately sized to allow golf club heads of any size to be cleaned within the sleeve upper interior portion while golf balls may be cleaned within the sleeve lower interior portion. Additionally, the appropriately sized lower opening permits golf balls to be retained within the lower interior portion of the sleeve member and squeezed out as needed. The device accomplishes all of the cleaning of the golf equipment internally and therefore prevents any cleaned off material from contacting the user or the user's clothing.Type: GrantFiled: July 29, 1997Date of Patent: May 4, 1999Inventor: Bruce E. Beattie
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Patent number: 4909185Abstract: Apparatus for heating product with the product during heating subjected to a controlled, nonatmospheric gas environment. The apparatus includes a double-walled cold zone assembly adapted to be placed against an oven opening, the assembly having a depository chamber within it for securing product during cooling of the product. A cantilever projecting through the assembly is operated to move product between the depository chamber of the assembly and the oven where heat treatment occurs.Type: GrantFiled: February 3, 1988Date of Patent: March 20, 1990Assignee: Weiss Scientific Glass Blowing Co.Inventors: Robert E. Aldridge, Bruce E. Beattie