Patents by Inventor Bruce G. Walker

Bruce G. Walker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Air management system and method for chemical containment and contamination reduction in a semiconductor manufacturing facility
    Patent number: 6517594
    Abstract: An air manager and/or chemical containment apparatus, for environmental control of fumes from wet bench units of semiconductor manufacturing facilities. The air manager system is suitable for installation in an open architecture wet bench or an enclosed mini-environment wet bench, and includes an air source and an air exhaust arranged for flowing air across an open chemical tank, to entrain fumes from chemical in the tank that otherwise may migrate from the immediate vicinity of the tank, and transport such fumes to the exhaust with the air flowed from the air source to the exhaust.
    Type: Grant
    Filed: April 4, 2001
    Date of Patent: February 11, 2003
    Assignee: Advanced Technology Materials, Inc.
    Inventors: W. Karl Olander, Bruce G. Walker
  • Air management system and method for chemical containment and contamination reduction in a semiconductor manufacturing facility
    Publication number: 20020134060
    Abstract: An air manager and/or chemical containment apparatus, for environmental control of fumes from wet bench units of semiconductor manufacturing facilities. The air manager system is suitable for installation in an open architecture wet bench or an enclosed mini-environment wet bench, and includes an air source and an air exhaust arranged for flowing air across an open chemical tank, to entrain fumes from chemical in the tank that otherwise may migrate from the immediate vicinity of the tank, and transport such fumes to the exhaust with the air flowed from the air source to the exhaust.
    Type: Application
    Filed: April 4, 2001
    Publication date: September 26, 2002
    Inventors: W. Karl Olander, Bruce G. Walker