Abstract: A method of fabricating an optical fiber alignment structure for an optical device fabricated on the surface of a substrate, the integrated optical device being adapted to be optically coupled to an end of an optical fiber. The method comprises the steps of: (a) forming a sacrificial structure of a predetermined shape on a surface of a planar substrate, wherein the predetermined shape is chosen to be an inversion of a desired shape of the alignment structure to be fabricated; (b) fabricating the optical device on the substrate such that the sacrificial structure faces a waveguide portion of the optical device; (c) etching an optical fiber insertion aperture into said substrate, such that the optical fiber insertion aperture is aligned substantially underneath the sacrificial structure; and (d) selectively etching said sacrificial structure so as to form a region shaped to receive and align an end of an optical fiber, whereby the alignment structure of the desired shape is fabricated.