Patents by Inventor Bruce Mackedanz

Bruce Mackedanz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • VERTICAL NO-SPIN PROCESS CHAMBER
    Publication number: 20160118290
    Abstract: A processing chamber includes a base, a cover, and grippers. The base includes a body, a mating surface, an inner zone cavity extending into the body, a divider substantially surrounding the inner zone cavity, and an outer zone cavity extending into the body and substantially surrounding the divider. The cover includes a mating surface that contacts the body mating surface when the processing chamber is closed. The grippers hold the wafer in the inner zone cavity when the processing chamber is closed.
    Type: Application
    Filed: June 26, 2014
    Publication date: April 28, 2016
    Inventors: Bruce MACKEDANZ, Sally-Ann HENRY, Don C. BURKMAN, Charlie A. PETERSON, Cary M. LEY
  • VERTICAL NO-SPIN PROCESS CHAMBER
    Publication number: 20160086811
    Abstract: A processing chamber includes a base, a cover, and grippers. The base includes a body, a mating surface, an inner zone cavity extending into the body, a divider substantially surrounding the inner zone cavity, and an outer zone cavity extending into the body and substantially surrounding the divider. The cover includes a mating surface that contacts the body mating surface when the processing chamber is closed. The grippers hold the wafer in the inner zone cavity when the processing chamber is closed.
    Type: Application
    Filed: December 2, 2015
    Publication date: March 24, 2016
    Inventors: Bruce Mackedanz, Sally-Ann Henry, Don C. Burkman, Charlie A. Peterson, Cary M. Ley