Patents by Inventor Bruha Raicu

Bruha Raicu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for forming low sheet resistance polysilicon having anisotropic etch characteristics
    Patent number: 4561907
    Abstract: A method for forming highly doped, low sheet resistance, anisotropically etched polysilicon using heat pulse annealing and plasma etching. The combination of low sheet resistance and anisotropic etch behavior is provided by heat pulse annealing for a time which corresponds to a characteristic transition region of the sheet resistance-annealing time curve.
    Type: Grant
    Filed: July 12, 1984
    Date of Patent: December 31, 1985
    Inventor: Bruha Raicu