Abstract: The invention relates to a method for cooling a plasma processing system for processing a mixture of particularly gaseous fluids, which comprises a means for coupling a source of microwave power to a mixture of particularly gaseous fluids flowing in a dielectric tube at the level of the coupling means adapted for transferring a portion of the microwave energy to the fluid mixture in order to generate therein a plasma for initiating the breaking of at least some chemical bonds of the fluid molecules, wherein said dielectric tube is at least partially cooled down by a coolant flow in thermal contact with the outer wall of the tube to be cooled.

Abstract: The invention relates to a method for the conversion of a gas or gas mixture and, in particular, a fluorinated gaseous effluent. According to the invention, at least one bond between two atoms of at least one molecule of the gas or gas mixture is broken under the influence of an electric and/or magnetic field to which the gas or gas mixture is subjected. The gas or gas mixture stream is injected through the electric and/or magnetic field in a non-rectilinear manner in order to increase the distance travelled by the gas molecules through the field and, in this way, increase the effectiveness of the conversion of the gas or gas mixture molecules.