Abstract: Preferred embodiments of a purge gas port, laser beam attenuating input window, and laser shutter constitute subsystems of a UV laser optical system in which a laser beam is completely enclosed to reduce contamination of the optical system components. Purge gas is injected through multiple locations in a beam tube assembly to ensure that the optical component surfaces sensitive to contamination are in the flow path of the purge gas. The input window functions as a fixed level attenuator to limit photopolymerization of airborne molecules and particles. Periodically rotating optical elements asymmetrically in their holders reduces burn damage to the optics.

Abstract: Apparatus and techniques for automated optical inspection (AOI) utilizing image scanning modules with multiple objectives for each camera are provided. A scanning mechanism includes optical components to sequentially steer optical signals from each of the multiple objectives to the corresponding camera.

Abstract: A multiple beam generator for use in a scanning system, wherein the generator includes an acousto-optic deflector (AOD) which during use receives a laser beam and generates a deflected beam, the deflection of which is determined by an AOD control signal; a diffractive element which generates an array of input beams from the deflected beam; and a control circuit which during operation generates the AOD control signal and varies a characteristic of the first control signal to account for errors in the scanning system.

Abstract: Apparatus and techniques for automated optical inspection (AOI) utilizing image scanning modules with multiple objectives for each camera are provided. A scanning mechanism includes optical components to sequentially steer optical signals from each of the multiple objectives to the corresponding camera.

Abstract: Apparatus and techniques for automated optical inspection (AOI) utilizing image scanning modules with multiple objectives for each camera are provided. A scanning mechanism includes optical components to sequentially steer optical signals from each of the multiple objectives to the corresponding camera.

Abstract: A counter-rotating anamorphic prism pair assembly with variable spacing allows the simultaneous adjustment of a prism pair using an adjustment member to circularize in cross section a range of elliptical laser beam cross sections. A first prism rotates and translates towards or away from an incident laser beam while a second prism simultaneously rotates towards or away from the laser beam in a fixed counter-rotating relationship with the first prism. The degree of rotation and translation is determined by a mechanical linkage connecting the two prisms.

Abstract: A counter-rotating anamorphic prism pair assembly with variable spacing allows the simultaneous adjustment of a prism pair using an adjustment member to circularize in cross section a range of elliptical laser beam cross sections. A first prism rotates and translates towards or away from an incident laser beam while a second prism simultaneously rotates towards or away from the laser beam in a fixed counter-rotating relationship with the first prism. The degree of rotation and translation is determined by a mechanical linkage connecting the two prisms.