Abstract: An alignment detection system is disclosed for determining whether a modulated illumination field in an imaging system employing an illumination modulator is mis-aligned. The alignment detection system includes a modulator adjustment unit for providing a test pattern on the illumination modulator, a detector for receiving a modulated illumination field from the illumination modulator, a sampling unit for determining at least two sample values (A and C) for each of two areas of the modulated illumination field respectively, and an evaluation unit for determining whether the value |A?C| is greater than a threshold value.

Abstract: A modulation quality detection system is disclosed for determining the modulation quality of an illumination modulator in an imaging system. The modulation quality detection system includes a modulator adjustment unit for providing a test pattern on the illumination modulator, a detector for receiving a modulated illumination field from the illumination modulator, a sampling unit for determining at least three sample values (A, B and C) for each of three areas of the modulated illumination field respectively, and an evaluation unit for determining whether the value ( A + C 2 ) - B is greater than a threshold value.

Abstract: An illumination modulator correction system is disclosed for adjusting the operational parameters of an illumination modulator in an imaging system. The correction system includes a modulator pattern unit for providing a test pattern on the illumination modulator, a modulator adjustment unit for permitting an actuation voltage on the illumination modulator to be changed through a range of actuation voltage values, a detector for receiving a modulated illumination field from the illumination modulator, a sampling unit for determining at least one sample value for at least one area of the modulated illumination field, and an evaluation unit for determining a minimum sample value within the range of actuation voltage values of the illumination modulator.

Abstract: A system is disclosed for determining whether an imaging system is in a proper operating condition. In an embodiment, the system includes an illumination modulator for providing a desired modulated illumination field at an image surface, a detection unit including a slit opening for receiving a portion of the modulated illumination field, an average power sample unit and a variation power sample unit. The average power sample unit is for determining the average power sample value of the modulated illumination field as the modulated illumination field is moved with respect to the slit opening and for determining whether the average power sample value has changed significantly since a previous scan. The variation power sample unit is for determining the variation in power sample values of the modulated illumination field as the modulated illumination field is moved with respect to the slit opening and for determining whether the variation in power sample values has changed significantly since a previous scan.