Patents by Inventor Bryan Gallivan

Bryan Gallivan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11476092
    Abstract: A plasma generation system includes a reference clock, a plurality of solid state generator modules, and a processing chamber. The reference clock is configured to generate a reference signal. Each solid state generator module is linked to an electronic switch and each electronic switch is linked to the reference clock. The solid state generator modules are each configured to generate an output based on the reference signal from the reference clock. The processing chamber is configured to receive the output of at least two of the solid state generator modules to combine the outputs of said solid state generator modules therein.
    Type: Grant
    Filed: May 22, 2020
    Date of Patent: October 18, 2022
    Assignee: MKS Instruments, Inc.
    Inventors: Kenneth Trenholm, Mohammad Kamarehi, Mohamed Shaheen, Bryan Gallivan
  • Publication number: 20200381219
    Abstract: A plasma generation system includes a reference clock, a plurality of solid state generator modules, and a processing chamber. The reference clock is configured to generate a reference signal. Each solid state generator module is linked to an electronic switch and each electronic switch is linked to the reference clock. The solid state generator modules are each configured to generate an output based on the reference signal from the reference clock. The processing chamber is configured to receive the output of at least two of the solid state generator modules to combine the outputs of said solid state generator modules therein.
    Type: Application
    Filed: May 22, 2020
    Publication date: December 3, 2020
    Applicant: MKS Instruments, Inc.
    Inventors: Kenneth Trenholm, Mohammad Kamarehi, Mohamed Shaheen, Bryan Gallivan