Abstract: Disclosed herein are apparatus and system aspects for a camera lens flexure collar. An aspect includes an interior wall with one or more inner protrusions, an exterior wall with one or more openings, a cam located between the interior wall and the exterior wall, an actuator arm coupled to the cam and extending through the one or more openings of the exterior wall, and two flexures. The aspect operates through manipulation of the actuator arm, where manipulation of the actuator arm moves the cam and causes a force through the one or more inner protrusions of the interior wall, causing the interior wall to move in the axial direction within the stress limitations of the two flexures. In this aspect, movement of the interior wall in the axial direction can focus one or more camera lenses.

Abstract: Disclosed herein are apparatus and system aspects for a camera lens flexure collar. An aspect includes an interior wall with one or more inner protrusions, an exterior wall with one or more openings, a cam located between the interior wall and the exterior wall, an actuator arm coupled to the cam and extending through the one or more openings of the exterior wall, and two flexures. The aspect operates through manipulation of the actuator arm, where manipulation of the actuator arm moves the cam and causes a force through the one or more inner protrusions of the interior wall, causing the interior wall to move in the axial direction within the stress limitations of the two flexures. In this aspect, movement of the interior wall in the axial direction can focus one or more camera lenses.

Abstract: Disclosed herein are system, apparatus, and method for accurately setting a focus flange depth and planarity of a camera lens. An aspect includes a lens housing with at least one camera lens, a camera body with an imaging plane, and a lens mount removably coupling the lens housing to the camera body via a coupling mechanism. At least one shim may be inserted between the lens mount and the camera body to adjust a depth, pitch, and yaw of the camera lens in the lens housing with respect to the imaging plane in the camera body. Each shim may comprise a body having an opening extending from an edge of the body to a center of the body. The opening of each shim is configured to receive the coupling mechanism such that the pitch and yaw may be adjusted without fully removing the lens housing from the camera body.

Abstract: Disclosed herein are system, apparatus, and method for accurately setting a focus flange depth and planarity of a camera lens. An aspect includes a lens housing with at least one camera lens, a camera body with an imaging plane, and a lens mount removably coupling the lens housing to the camera body via a coupling mechanism. At least one shim may be inserted between the lens mount and the camera body to adjust a depth, pitch, and yaw of the camera lens in the lens housing with respect to the imaging plane in the camera body. Each shim may comprise a body having an opening extending from an edge of the body to a center of the body. The opening of each shim is configured to receive the coupling mechanism such that the pitch and yaw may be adjusted without fully removing the lens housing from the camera body.

Abstract: Disclosed herein are system, apparatus, and method for accurately setting a focus flange depth and planarity of a camera lens. An aspect includes a lens housing with at least one camera lens, a camera body with an imaging plane, and a lens mount removably coupling the lens housing to the camera body via a coupling mechanism. At least one shim may be inserted between the lens mount and the camera body to adjust a depth, pitch, and yaw of the camera lens in the lens housing with respect to the imaging plane in the camera body. Each shim may comprise a body having an opening extending from an edge of the body to a center of the body. The opening of each shim is configured to receive the coupling mechanism such that the pitch and yaw may be adjusted without fully removing the lens housing from the camera body.

Abstract: Disclosed herein are system, apparatus, and method for accurately setting a focus flange depth and planarity of a camera lens. An aspect includes a lens housing with at least one camera lens, a camera body with an imaging plane, and a lens mount removably coupling the lens housing to the camera body via a coupling mechanism. At least one shim may be inserted between the lens mount and the camera body to adjust a depth, pitch, and yaw of the camera lens in the lens housing with respect to the imaging plane in the camera body. Each shim may comprise a body having an opening extending from an edge of the body to a center of the body. The opening of each shim is configured to receive the coupling mechanism such that the pitch and yaw may be adjusted without fully removing the lens housing from the camera body.

Abstract: Disclosed herein are system, apparatus, and method for accurately setting a focus flange depth and planarity of a camera lens. An aspect includes a lens housing with at least one camera lens, a camera body with an imaging plane, and a lens mount removably coupling the lens housing to the camera body via a coupling mechanism. At least one shim may be inserted between the lens mount and the camera body to adjust a depth, pitch, and yaw of the camera lens in the lens housing with respect to the imaging plane in the camera body. Each shim may comprise a body having an opening extending from an edge of the body to a center of the body. The opening of each shim is configured to receive the coupling mechanism such that the pitch and yaw may be adjusted without fully removing the lens housing from the camera body.

Abstract: Disclosed herein are apparatus and system aspects for a camera lens flexure collar. An aspect includes an interior wall with one or more inner protrusions, an exterior wall with one or more openings, a cam located between the interior wall and the exterior wall, an actuator arm coupled to the cam and extending through the one or more openings of the exterior wall, and two flexures. The aspect operates through manipulation of the actuator arm, where manipulation of the actuator arm moves the cam and causes a force through the one or more inner protrusions of the interior wall, causing the interior wall to move in the axial direction within the stress limitations of the two flexures. In this aspect, movement of the interior wall in the axial direction can focus one or more camera lenses.

Abstract: A vacuum mechanism for flattening bowed panel samples includes a support structure with coplanar support elements and a fixture with a movable component actuated by a vacuum source. The movable component has a top surface disposed above the support elements when no vacuum is applied and is capable of being drawn to a substantially coplanar position with the support elements when actuated by the vacuum source. The top surface is fluidly connected to the vacuum source and adapted to adhere to the overlaying surface of the sample when vacuum is applied, thereby flattening the sample when the movable component is drawn in by the same vacuum source.

Abstract: A reference surface is used to develop an empirical plot between a parameter of interest, such as roughness or modulation, and the position of the reference mirror in an interferometer by repeating measurements of the reference surface at different positions of the reference mirror so as to identify the in-focus position of the reference mirror. Serial quality-control measurements of samples of interest are carried out with the reference mirror in such in-focus position until a predetermined quality-control event triggers an automated system re-calibration by re-measuring the reference surface and, if the result does not correspond to the in-focus position of the reference mirror according to the plot, by finding a new in-focus position for the reference mirror using the same plot or, alternatively, a new similarly produced plot. Sample measurements are then resumed with the mirror placed at that new position.

Abstract: A conductive conformable braided wire is used as the edge electrode for material characterization of a semiconductor wafer. The braided wire is adapted to contact the perimeter of the n-GaN layer using a retractable support structure that alternately places the electrode in contact with the edge of the n-GaN layer and retracts it during repeated cycles of operation to test a plurality of similar wafers. The braided wire produced a very stable and higher electrical contact than any prior-art edge electrode.

Abstract: A vacuum mechanism for flattening bowed panel samples includes a support structure with coplanar support elements and a fixture with a movable component actuated by a vacuum source. The movable component has a top surface disposed above the support elements when no vacuum is applied and is capable of being drawn to a substantially coplanar position with the support elements when actuated by the vacuum source. The top surface is fluidly connected to the vacuum source and adapted to adhere to the overlaying surface of the sample when vacuum is applied, thereby flattening the sample when the movable component is drawn in by the same vacuum source.

Abstract: A reference surface is used to develop an empirical plot between a parameter of interest, such as roughness or modulation, and the position of the reference mirror in an interferometer by repeating measurements of the reference surface at different positions of the reference mirror so as to identify the in-focus position of the reference mirror. Serial quality-control measurements of samples of interest are carried out with the reference mirror in such in-focus position until a predetermined quality-control event triggers an automated system re-calibration by re-measuring the reference surface and, if the result does not correspond to the in-focus position of the reference mirror according to the plot, by finding a new in-focus position for the reference mirror using the same plot or, alternatively, a new similarly produced plot. Sample measurements are then resumed with the mirror placed at that new position.

Abstract: A vacuum mechanism for flattening bowed panel samples includes a support structure with coplanar support elements and a fixture with a movable component actuated by a vacuum source. The movable component has a top surface disposed above the support elements when no vacuum is applied and is capable of being drawn to a substantially coplanar position with the support elements when actuated by the vacuum source. The top surface is fluidly connected to the vacuum source and adapted to adhere to the overlaying surface of the sample when vacuum is applied, thereby flattening the sample when the movable component is drawn in by the same vacuum source.

Abstract: A reference surface is used to develop an empirical plot between a parameter of interest, such as roughness or modulation, and the position of the reference mirror in an interferometer by repeating measurements of the reference surface at different positions of the reference mirror so as to identify the in-focus position of the reference mirror. Serial quality-control measurements of samples of interest are carried out with the reference mirror in such in-focus position until a predetermined quality-control event triggers an automated system re-calibration by re-measuring the reference surface and, if the result does not correspond to the in-focus position of the reference mirror according to the plot, by finding a new in-focus position for the reference mirror using the same plot or, alternatively, a new similarly produced plot. Sample measurements are then resumed with the mirror placed at that new position.

Abstract: An interferometric profiler includes an opening adapted to receive a removable compensating element in the reference arm. The compensating element is mounted on a holder adapted for slidable engagement within the opening. A retaining mechanism keeps the holder firmly in place in the opening. The reference mirror of the profiler is mounted on a slidable stage urged away from the compensating element by a spring-loaded mechanism. A knob is provided to manually push the stage inward to its operating position proximate to the compensating element. A stop ensures that the travel of the stage is limited to a safe distance from the compensating element and a lock is provided to releasably hold the stage in place during use. Multiple objectives with different magnifications may be coupled to the module for alternative use according to the needs of particular applications. An illumination module may also be coupled to the reference-arm module.