Patents by Inventor Bryan J. Ludwig

Bryan J. Ludwig has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer rinser/dryer
    Patent number: 5000208
    Abstract: Improvements to an integrated circuit wafer rinsing and washing machine which include a streamlined housing for low turbulence air flow, improved rear maintenance capability, improved wafer carriers, foot operated switches and improved rotating part fastening means.
    Type: Grant
    Filed: June 21, 1990
    Date of Patent: March 19, 1991
    Assignee: Micron Technology, Inc.
    Inventors: Bryan J. Ludwig, David A. Cathey, Ernest E. Marks, Leo B. Jurica, L. Brian Dunn, Loyal R. Gibbons
  • Resistivity probe fixture
    Patent number: 4872356
    Abstract: Apparatus to enclose a resistivity probe, to be used with a semiconductor wafer washer. Said apparatus is detachable and easy to maintain; is made of readily available and inexpensive plumbing parts; substantially encloses said probe, reducing contamination; allows nitrogen purge of said probe, keeping it clean; fully submerges said probe in discharge fluid, improving measurement accuracy; and is compact enough to allow washers to be triple stacked.
    Type: Grant
    Filed: December 27, 1988
    Date of Patent: October 10, 1989
    Assignee: Micron Technology Inc.
    Inventors: Jay D. Barnett, Bryan J. Ludwig, Ernest E. Marks, Scott E. Moore