Patents by Inventor Bryan Mitchell Tracy

Bryan Mitchell Tracy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Use of fiducial marks for improved blank wafer defect review
    Patent number: 5847821
    Abstract: A method for navigating directly to defects on a blank wafer caused by particles dropped from process tools. A blank wafer is marked with fiducial marks, the number of initial defects on the blank wafer is determined and the position coordinates of the initial defects and the fiducial marks are recorded. The blank wafer is placed into a selected process tool and the additional defects that are caused by particles dropped from the process tool are detected in an inspection tool and their position coordinates are determined and recorded as well as the position coordinates of the fiducial marks. The blank wafer is then placed in an analysis tool that is able to navigate directly to each of the additional defects at a high magnification using the position coordinates of the fiducial marks.
    Type: Grant
    Filed: July 10, 1997
    Date of Patent: December 8, 1998
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Bryan Mitchell Tracy, Donald L. Wollesen