Patents by Inventor Bryan Moosman

Bryan Moosman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7339973
    Abstract: Fluorine gas discharge laser electrodes and electrode systems that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition electrodes may comprise a first discharge shaping magnet mounted in a first elongated gas discharge electrode and a second discharge shaping magnet mounted in a second elongated gas discharge electrode. Also is an electrode may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode and a pair of elongated high erosion regions on either side of the crown comprising a second material with a relatively higher erosion rate during gas discharge than that of the first material.
    Type: Grant
    Filed: September 26, 2003
    Date of Patent: March 4, 2008
    Assignee: Cymer, Inc.
    Inventors: Richard G. Morton, Bryan Moosman, Timothy S. Dyer, James A. Carmichael, Jiping Zhang
  • Patent number: 7132123
    Abstract: The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge.
    Type: Grant
    Filed: July 29, 2003
    Date of Patent: November 7, 2006
    Assignee: Cymer, Inc.
    Inventors: Richard G. Morton, Timothy S. Dyer, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman, Alex P. Ivaschenko, Walter Gillespie, Curtis Rettig
  • Publication number: 20060222034
    Abstract: A high pulse repetition rate gas discharge laser system pulse power system magnetic reactor may comprise a housing comprising a core containing compartment between an inner wall of the housing, an outer wall and a bottom wall of the housing; a cooling mechanism operative to withdraw heat from the at least one of the inner wall, outer wall and bottom of the housing; at least one two magnetic cores contained within the core containing compartment; a cooling fin disposed between each of the at least two magnetic cores; and a thermal conductivity enhancement mechanism intermediate at least one of each respective cooling fin and each respective core and a respective one of the inner wall, the outer wall or the bottom wall, the thermal conductivity enhancement mechanism comprising a band comprising a plurality of torsion spring or leaf spring elements.
    Type: Application
    Filed: March 31, 2005
    Publication date: October 5, 2006
    Applicant: Cymer, Inc.
    Inventors: Richard Ujazdowski, Richard Ness, J. Algots, Vladimir Fleurov, Frederick Palenschat, Walter Gillespie, Bryan Moosman, Thomas Steiger, Brett Smith, Thomas McKelvey
  • Publication number: 20060209916
    Abstract: A laser system and method is disclosed which may comprise a first line narrowed gas discharge laser system producing a first laser output light pulse beam at a pulse repetition rate of ?2000 Hz; a second line narrowed gas discharge laser system producing a second laser output light pulse beam at a pulse repetition rate of ?2000 Hz; a beam combiner combining the first and second output light pulse beams into a combined laser output light pulse beam with a ?4000 Hz pulse repetition rate. The apparatus and method may comprise a compression head comprising a storage device being charged at x times per second; a gas discharge chamber comprising at least two sets of paired gas discharge electrodes; at least two magnetically saturable switches, respectively connected between the compression head charge storage device and one of the at least two sets of paired electrodes.
    Type: Application
    Filed: February 27, 2006
    Publication date: September 21, 2006
    Inventors: Edward Holtaway, Bryan Moosman, Rajasekhar Rao
  • Patent number: 7006547
    Abstract: A method and apparatus for producing a very high repetition rate gas discharge laser system in a MOPA configuration is disclosed which may comprise a master oscillator gas discharge layer system producing a beam of oscillator laser output light pulses at a very high pulse repetition rate; at least two power amplification gas discharge laser systems receiving laser output light pulses from the master oscillator gas discharge laser system and each of the at least two power amplification gas discharge laser systems amplifying some of the received laser output light pulses at a pulse repetition that is a fraction of the very high pulse repetition rate equal to one over the number of the at least two power amplification gas discharge laser systems to form an amplified output laser light pulse beam at the very high pulse repetition rate, which may be positioned in series with respect to the oscillator laser output light pulse beam.
    Type: Grant
    Filed: March 31, 2004
    Date of Patent: February 28, 2006
    Assignee: Cymer, Inc.
    Inventors: Thomas D. Steiger, Edward P. Holtaway, Bryan Moosman, Rajasekhar M. Rao
  • Publication number: 20050226300
    Abstract: A method and apparatus for producing a very high repetition rate gas discharge laser system in a MOPA configuration is disclosed which may comprise a master oscillator gas discharge layer system producing a beam of oscillator laser output light pulses at a very high pulse repetition rate; at least two power amplification gas discharge laser systems receiving laser output light pulses from the master oscillator gas discharge laser system and each of the at least two power amplification gas discharge laser systems amplifying some of the received laser output light pulses at a pulse repetition that is a fraction of the very high pulse repetition rate equal to one over the number of the at least two power amplification gas discharge laser systems to form an amplified output laser light pulse beam at the very high pulse repetition rate, which may be positioned in series with respect to the oscillator laser output light pulse beam.
    Type: Application
    Filed: March 31, 2004
    Publication date: October 13, 2005
    Inventors: Thomas Steiger, Edward Holtaway, Bryan Moosman, Rajasekhar Rao
  • Publication number: 20050226301
    Abstract: A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall.
    Type: Application
    Filed: March 31, 2004
    Publication date: October 13, 2005
    Inventors: William Partlo, Yoshiho Amada, James Carmichael, Timothy Dyer, Walter Gillespie, Bryan Moosman, Richard Morton, Curtis Rettig, Brian Strate, Thomas Steiger, Fedor Trintchouk, Richard Ujazdowski
  • Patent number: 6937635
    Abstract: The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge.
    Type: Grant
    Filed: August 7, 2003
    Date of Patent: August 30, 2005
    Assignee: Cymer, Inc.
    Inventors: Richard G. Morton, Timothy S. Dyer, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman, Alex P. Ivaschenko, Walter Gillespie, Curtis Rettig
  • Publication number: 20050047471
    Abstract: A method and apparatus for operating a gas discharge laser is disclosed which may comprise a laser chamber containing a laser gas, the laser gas comprising a halogen, two elongated electrode elements defining a cathode and an anode, each of the cathode and anode having an elongated discharge receiving region having a discharge receiving region width defining a width of an electric discharge between the electrode elements in the laser gas, the discharge receiving region defining two longitudinal edges, and the anode comprising: a first elongated anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region of the anode, a pair of second elongated anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an elongated electrode center base portion integral with the fi
    Type: Application
    Filed: June 25, 2004
    Publication date: March 3, 2005
    Inventors: Thomas Steiger, Richard Ujazdowski, Timothy Dyer, Thomas Duffey, Walter Gillespie, Bryan Moosman, Richard Morton, Brian Strate
  • Publication number: 20040165638
    Abstract: Fluorine gas discharge laser electrodes and electrode systems are disclosed that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition disclosed are electrodes that may comprise a first discharge shaping magnet mounted in a first elongated gas discharge electrode and a second discharge shaping magnet mounted in a second elongated gas discharge electrode. This may also comprise at least one of the first and second gas discharge electrodes has imbedded therein a first and a second auxiliary field creating magnet.
    Type: Application
    Filed: September 26, 2003
    Publication date: August 26, 2004
    Inventors: Richard G. Morton, Bryan Moosman, Timothy S. Dyer, James A. Carmichael, Jiping Zhang
  • Publication number: 20040037338
    Abstract: The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge.
    Type: Application
    Filed: August 7, 2003
    Publication date: February 26, 2004
    Inventors: Richard G. Morton, Timothy S. Dyer, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman, Alex P. Ivaschenko, Walter Gillespie, Curtis Rettig
  • Patent number: 6690706
    Abstract: The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge.
    Type: Grant
    Filed: March 22, 2002
    Date of Patent: February 10, 2004
    Assignee: Cymer, Inc.
    Inventors: Richard G. Morton, Timothy S. Dyer, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman, Alex P. Ivaschenko
  • Publication number: 20040022292
    Abstract: The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge.
    Type: Application
    Filed: July 29, 2003
    Publication date: February 5, 2004
    Inventors: Richard G. Morton, Timothy S. Dyer, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman, Alex P. Ivaschenko, Walter Gillespie, Curtis Rettig
  • Publication number: 20020191661
    Abstract: The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge.
    Type: Application
    Filed: March 22, 2002
    Publication date: December 19, 2002
    Inventors: Richard G. Morton, Timothy S. Dyer, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman, Alex P. Ivaschenko